JP5700665B2 - 光電変換装置の作製方法 - Google Patents
光電変換装置の作製方法 Download PDFInfo
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- JP5700665B2 JP5700665B2 JP2011128179A JP2011128179A JP5700665B2 JP 5700665 B2 JP5700665 B2 JP 5700665B2 JP 2011128179 A JP2011128179 A JP 2011128179A JP 2011128179 A JP2011128179 A JP 2011128179A JP 5700665 B2 JP5700665 B2 JP 5700665B2
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- 229910021417 amorphous silicon Inorganic materials 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
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- 229910052725 zinc Inorganic materials 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
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- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
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- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
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- 239000010936 titanium Substances 0.000 description 1
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Images
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0465—PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising particular structures for the electrical interconnection of adjacent PV cells in the module
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Sustainable Energy (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Description
本実施の形態では、本発明の一態様である光電変換装置の構造、及びその作製方法について説明する。
本実施の形態では、実施の形態1とは異なる光電変換装置及びその作製方法について説明する。
本明細書に開示する光電変換装置は、さまざまな電子機器に用いることができる。本実施の形態では、その一例として、電子書籍の電源として用いる例を説明する。
110 パーティクル
110a パーティクル
110b パーティクル
120 第1の電極
140 第1の半導体層
150 第2の半導体層
160 第3の半導体層
180 第2の電極
190 絶縁樹脂
200a 構造欠陥
200b 構造欠陥
220a 第1の分離溝
220b 第1の分離溝
220c 第1の分離溝
220d 第1の分離溝
260a 第2の分離溝
260b 第2の分離溝
260c 第2の分離溝
280a 第3の分離溝
280b 第3の分離溝
280c 第3の分離溝
320 透光性導電膜
380 導電膜
420 第1の電極
440 第1の半導体層
450 第2の半導体層
460 第3の半導体層
480 第2の電極
490 第1の絶縁樹脂
500 構造欠陥
520a 第1の分離溝
520b 第2の分離溝
520c 第3の分離溝
600a 第2の絶縁樹脂
600b 第2の絶縁樹脂
600c 第2の絶縁樹脂
640a 第2の分離溝
640b 第2の分離溝
640c 第2の分離溝
660a 第3の絶縁樹脂
660b 第3の絶縁樹脂
660c 第3の絶縁樹脂
680a 第3の電極
680b 第3の電極
680c 第3の電極
700a 接続溝
700b 接続溝
700c 接続溝
720 グリッド電極
9630 筐体
9631 表示部
9632 操作キー
9633 光電変換装置
9634 充放電制御回路
9635 バッテリー
9636 DCDCコンバータ
9637 DCDCコンバータ
Claims (1)
- 基板上に第1の導電層を形成し、
前記第1の導電層上に一導電型を有する第1の半導体層を形成し、
前記第1の半導体層上に真性半導体からなる第2の半導体層を形成し、
前記第2の半導体層上に前記第1の半導体層とは逆の導電型を有する第3の半導体層を形成し、
前記第1の導電層、前記第1の半導体層、前記第2の半導体層、及び前記第3の半導体層を複数に分離する第1の分離溝を形成し、
前記第3の半導体層を覆い、かつ前記第1の分離溝を充填するように絶縁樹脂を形成し、
前記絶縁樹脂の不要な領域を除去し、
前記第1の半導体層、前記第2の半導体層、及び前記第3の半導体層を複数に分離する第2の分離溝を形成し、
前記第3の半導体層、及び前記絶縁樹脂を覆い、かつ前記第2の分離溝を充填するように第2の導電層を形成し、
前記第2の導電層を複数に分離する第3の分離溝を形成する光電変換装置の作製方法であって、
前記絶縁樹脂は、前記第1の半導体層、前記第2の半導体層、及び前記第3の半導体層を含む領域、またはその領域の一部に存在する構造欠陥を充填するように形成されることを特徴とする光電変換装置の作製方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011128179A JP5700665B2 (ja) | 2010-06-09 | 2011-06-08 | 光電変換装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010131841 | 2010-06-09 | ||
JP2010131841 | 2010-06-09 | ||
JP2011128179A JP5700665B2 (ja) | 2010-06-09 | 2011-06-08 | 光電変換装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012019208A JP2012019208A (ja) | 2012-01-26 |
JP2012019208A5 JP2012019208A5 (ja) | 2014-05-22 |
JP5700665B2 true JP5700665B2 (ja) | 2015-04-15 |
Family
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Family Applications (1)
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JP5912404B2 (ja) | 2010-10-29 | 2016-04-27 | 株式会社半導体エネルギー研究所 | 光電変換装置 |
KR20130136739A (ko) * | 2012-06-05 | 2013-12-13 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
KR101393743B1 (ko) * | 2012-06-28 | 2014-05-13 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조 방법 |
KR102497067B1 (ko) * | 2017-11-30 | 2023-02-06 | 차이나 트라이엄프 인터내셔널 엔지니어링 컴퍼니 리미티드 | 추가 도전성 라인을 갖는 박막 장치 및 그 제조 방법 |
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JPS6254478A (ja) * | 1985-08-24 | 1987-03-10 | Semiconductor Energy Lab Co Ltd | 光電変換装置 |
JPS6269566A (ja) * | 1985-09-21 | 1987-03-30 | Semiconductor Energy Lab Co Ltd | 光電変換装置作製方法 |
JPS6284569A (ja) * | 1985-10-08 | 1987-04-18 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
US4981525A (en) * | 1988-02-19 | 1991-01-01 | Sanyo Electric Co., Ltd. | Photovoltaic device |
AU8872891A (en) * | 1990-10-15 | 1992-05-20 | United Solar Systems Corporation | Monolithic solar cell array and method for its manufacture |
JPH04336471A (ja) * | 1991-05-13 | 1992-11-24 | Canon Inc | 半導体薄膜のピンホールの除去方法 |
US6720576B1 (en) * | 1992-09-11 | 2004-04-13 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and photoelectric conversion device |
US5385848A (en) * | 1993-09-20 | 1995-01-31 | Iowa Thin Film Technologies, Inc | Method for fabricating an interconnected array of semiconductor devices |
TW387152B (en) * | 1996-07-24 | 2000-04-11 | Tdk Corp | Solar battery and manufacturing method thereof |
US7276453B2 (en) * | 2004-08-10 | 2007-10-02 | E.I. Du Pont De Nemours And Company | Methods for forming an undercut region and electronic devices incorporating the same |
US20070079866A1 (en) * | 2005-10-07 | 2007-04-12 | Applied Materials, Inc. | System and method for making an improved thin film solar cell interconnect |
JP2010514184A (ja) * | 2006-12-21 | 2010-04-30 | ヘリアンソス,ビー.ブイ. | 太陽電池から太陽電池サブセルをつくる方法 |
EP1970951A3 (en) * | 2007-03-13 | 2009-05-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
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US20110303272A1 (en) | 2011-12-15 |
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