JP2012009618A - 抵抗率測定装置 - Google Patents

抵抗率測定装置 Download PDF

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Publication number
JP2012009618A
JP2012009618A JP2010144103A JP2010144103A JP2012009618A JP 2012009618 A JP2012009618 A JP 2012009618A JP 2010144103 A JP2010144103 A JP 2010144103A JP 2010144103 A JP2010144103 A JP 2010144103A JP 2012009618 A JP2012009618 A JP 2012009618A
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JP
Japan
Prior art keywords
probe
motor
rotation
eccentric cam
movement
Prior art date
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Pending
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JP2010144103A
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English (en)
Japanese (ja)
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JP2012009618A5 (enExample
Inventor
Kazuhiko Kinoshita
和彦 木下
Tatsuya Fukuda
達也 福田
Tadayuki Karasawa
端是 唐澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Kokusai Denki Engineering Co Ltd
Original Assignee
Hitachi Kokusai Denki Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi Kokusai Denki Engineering Co Ltd filed Critical Hitachi Kokusai Denki Engineering Co Ltd
Priority to JP2010144103A priority Critical patent/JP2012009618A/ja
Publication of JP2012009618A publication Critical patent/JP2012009618A/ja
Publication of JP2012009618A5 publication Critical patent/JP2012009618A5/ja
Pending legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2010144103A 2010-06-24 2010-06-24 抵抗率測定装置 Pending JP2012009618A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010144103A JP2012009618A (ja) 2010-06-24 2010-06-24 抵抗率測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010144103A JP2012009618A (ja) 2010-06-24 2010-06-24 抵抗率測定装置

Publications (2)

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JP2012009618A true JP2012009618A (ja) 2012-01-12
JP2012009618A5 JP2012009618A5 (enExample) 2013-08-08

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ID=45539842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010144103A Pending JP2012009618A (ja) 2010-06-24 2010-06-24 抵抗率測定装置

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JP (1) JP2012009618A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120280366A (zh) * 2025-06-06 2025-07-08 浙江求是半导体设备有限公司 晶圆电阻率的检测方法、装置及电子设备和存储介质

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07151800A (ja) * 1993-11-30 1995-06-16 Kokusai Electric Co Ltd 比抵抗測定装置
JP2003297890A (ja) * 2002-03-29 2003-10-17 Kokusai Electric Alhpa Co Ltd 半導体ウェーハ測定器
JP2005311009A (ja) * 2004-04-21 2005-11-04 Kokusai Electric Alhpa Co Ltd 半導体ウェーハ抵抗率測定装置
JP2008241484A (ja) * 2007-03-27 2008-10-09 Fujitsu Ltd 半導体素子の試験装置および半導体素子の試験方法
JP2010122108A (ja) * 2008-11-20 2010-06-03 Oki Semiconductor Co Ltd プローブカード及びそれを用いたテスト方法半導体試験装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07151800A (ja) * 1993-11-30 1995-06-16 Kokusai Electric Co Ltd 比抵抗測定装置
JP2003297890A (ja) * 2002-03-29 2003-10-17 Kokusai Electric Alhpa Co Ltd 半導体ウェーハ測定器
JP2005311009A (ja) * 2004-04-21 2005-11-04 Kokusai Electric Alhpa Co Ltd 半導体ウェーハ抵抗率測定装置
JP2008241484A (ja) * 2007-03-27 2008-10-09 Fujitsu Ltd 半導体素子の試験装置および半導体素子の試験方法
JP2010122108A (ja) * 2008-11-20 2010-06-03 Oki Semiconductor Co Ltd プローブカード及びそれを用いたテスト方法半導体試験装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120280366A (zh) * 2025-06-06 2025-07-08 浙江求是半导体设备有限公司 晶圆电阻率的检测方法、装置及电子设备和存储介质

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