JP2011523203A - 相互接続を伴うウェハレベルインテグレーションモジュール - Google Patents
相互接続を伴うウェハレベルインテグレーションモジュール Download PDFInfo
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- 238000000034 method Methods 0.000 claims description 67
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- 238000013507 mapping Methods 0.000 abstract description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 87
- 229910052710 silicon Inorganic materials 0.000 description 87
- 239000010703 silicon Substances 0.000 description 87
- 239000010410 layer Substances 0.000 description 44
- 239000010408 film Substances 0.000 description 40
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- 229920005591 polysilicon Polymers 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910010380 TiNi Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
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- 229910052727 yttrium Inorganic materials 0.000 description 1
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Abstract
【選択図】図9
Description
Claims (17)
- 相互接続部を伴うウェハレベルインテグレーションモジュールを製造する方法において、
第1面及び第2面を有するウェハを用意するステップと、
前記ウェハの前記第1面に凹部を形成するステップと、
前記ウェハの前記第1面に第1の絶縁層を堆積するステップと、
前記第1の絶縁層上に、第1面及び第2面を有する第1の導電層を堆積するステップと、
前記第1の導電層の前記第1面上に第2の絶縁層を堆積するステップと、
前記第1の導電層を露出させるステップと、
前記ウェハの前記第1面に半導体機能デバイスを製造するステップと、
前記ウェハの前記第2面から前記第1の導電層の前記第2面を露出させるステップと、
前記第1の導電層の露出された前記第2面に第3の絶縁層を堆積するステップと、
前記第3の絶縁層をパターン化し、前記第1の導電層の部分を露出させるステップと、
パターン化された前記第3の絶縁層上に第2の導電層を堆積するステップと、
外部デバイスと接触させるために前記第2の導電層を露出させるステップと
を備える方法。 - 前記凹部がマイクロ構造体を形成する、請求項1に記載の方法。
- 前記導電層が高温導電性膜である、請求項1又は2に記載の方法。
- 導電性の前記相互接続膜が化学的機械的研磨により露出される、請求項1〜3のいずれか一項に記載の方法。
- 前記ウェハの前記第1面を保護するために導電性の前記相互接続膜の第1面に基板を設けるステップを更に備える、請求項1〜4のいずれか一項に記載の方法。
- 外部デバイスと接触させるために前記第2の導電層に導電性材料を堆積するステップを更に備える、請求項1〜5のいずれか一項に記載の方法。
- 前記半導体機能デバイスを製造するステップが、当該半導体機能デバイスを形成する付加的な層を堆積することを含む、請求項1〜6のいずれか一項に記載の方法。
- 前記付加的な層が複数の半導体機能デバイスを形成する、請求項7に記載の方法。
- 前記付加的な層が積層形態で形成される、請求項8に記載の方法。
- 前記ウェハ上に複数のダイを形成する、請求項1〜9のいずれか一項に記載の方法。
- 分離ゾーンに沿って複数のダイを分離するステップを更に備える、請求項10に記載の方法。
- 前記半導体機能デバイスがトランジスタである、請求項7〜9のいずれか一項に記載の方法。
- 複数の半導体機能デバイスが複数のトランジスタである、請求項7〜9及び12のいずれか一項に記載の方法。
- 前記半導体機能デバイスをその製造後にテストするステップを更に備える、請求項1〜13のいずれか一項に記載の方法。
- 前記半導体機能デバイスをテストする前記ステップが、前記ウェハの前記第1面にテストパッドを形成することを含む、請求項14に記載の方法。
- 前記テストの後であって、次のデバイスの製造前に、前記テストパッドを除去するステップを更に備える、請求項15に記載の方法。
- 前記第2の導電層を保護するために第4の絶縁層を堆積するステップを更に備える、請求項1〜16のいずれか一項に記載の方法。
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SG200803479-5A SG156550A1 (en) | 2008-05-06 | 2008-05-06 | Wafer level integration module with interconnects |
PCT/SG2009/000164 WO2009136873A2 (en) | 2008-05-06 | 2009-05-06 | Wafer level integration module with interconnects |
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JP2011523203A true JP2011523203A (ja) | 2011-08-04 |
JP2011523203A5 JP2011523203A5 (ja) | 2012-06-28 |
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JP (1) | JP2011523203A (ja) |
CN (1) | CN102084479A (ja) |
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JP2014146780A (ja) * | 2013-01-28 | 2014-08-14 | Win Semiconductors Corp | 半導体集積回路 |
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CN102339816A (zh) * | 2011-09-30 | 2012-02-01 | 上海宏力半导体制造有限公司 | 晶圆测试键结构及晶圆测试方法 |
US10163773B1 (en) | 2017-08-11 | 2018-12-25 | General Electric Company | Electronics package having a self-aligning interconnect assembly and method of making same |
US10811390B2 (en) * | 2019-01-21 | 2020-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Die stack structure and method of fabricating the same and package |
CN112800715B (zh) * | 2021-01-14 | 2021-09-24 | 国家数字交换系统工程技术研究中心 | 软件定义晶上系统及数据交互方法和系统体系架构 |
CN114975333A (zh) * | 2022-07-29 | 2022-08-30 | 广东大普通信技术股份有限公司 | 芯片结构 |
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US20110278569A1 (en) | 2011-11-17 |
CN102084479A (zh) | 2011-06-01 |
WO2009136873A2 (en) | 2009-11-12 |
TW201001623A (en) | 2010-01-01 |
US7998854B2 (en) | 2011-08-16 |
SG156550A1 (en) | 2009-11-26 |
US20110065215A1 (en) | 2011-03-17 |
WO2009136873A3 (en) | 2010-08-12 |
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