JP2011521477A5 - - Google Patents

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Publication number
JP2011521477A5
JP2011521477A5 JP2011510675A JP2011510675A JP2011521477A5 JP 2011521477 A5 JP2011521477 A5 JP 2011521477A5 JP 2011510675 A JP2011510675 A JP 2011510675A JP 2011510675 A JP2011510675 A JP 2011510675A JP 2011521477 A5 JP2011521477 A5 JP 2011521477A5
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JP
Japan
Prior art keywords
substrate
zinc oxide
epitaxial layer
group
oxide based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011510675A
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English (en)
Japanese (ja)
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JP2011521477A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2009/044646 external-priority patent/WO2009143226A1/en
Publication of JP2011521477A publication Critical patent/JP2011521477A/ja
Publication of JP2011521477A5 publication Critical patent/JP2011521477A5/ja
Pending legal-status Critical Current

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JP2011510675A 2008-05-21 2009-05-20 酸化亜鉛系エピタキシャルの層およびデバイス Pending JP2011521477A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US5484208P 2008-05-21 2008-05-21
US61/054,842 2008-05-21
US6075408P 2008-06-11 2008-06-11
US61/060,754 2008-06-11
PCT/US2009/044646 WO2009143226A1 (en) 2008-05-21 2009-05-20 Zinc-oxide based epitaxial layers and devices

Publications (2)

Publication Number Publication Date
JP2011521477A JP2011521477A (ja) 2011-07-21
JP2011521477A5 true JP2011521477A5 (cg-RX-API-DMAC7.html) 2012-07-26

Family

ID=40851998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011510675A Pending JP2011521477A (ja) 2008-05-21 2009-05-20 酸化亜鉛系エピタキシャルの層およびデバイス

Country Status (5)

Country Link
US (1) US8772829B2 (cg-RX-API-DMAC7.html)
EP (1) EP2304780A1 (cg-RX-API-DMAC7.html)
JP (1) JP2011521477A (cg-RX-API-DMAC7.html)
TW (1) TW201006014A (cg-RX-API-DMAC7.html)
WO (2) WO2009143229A1 (cg-RX-API-DMAC7.html)

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KR101998339B1 (ko) * 2012-11-16 2019-07-09 삼성전자주식회사 금속 산화물 반도체의 성장 결정면 제어방법 및 제어된 성장 결정면을 가지는 금속 산화물 반도체 구조물
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