JP2011521457A5 - - Google Patents

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Publication number
JP2011521457A5
JP2011521457A5 JP2011509782A JP2011509782A JP2011521457A5 JP 2011521457 A5 JP2011521457 A5 JP 2011521457A5 JP 2011509782 A JP2011509782 A JP 2011509782A JP 2011509782 A JP2011509782 A JP 2011509782A JP 2011521457 A5 JP2011521457 A5 JP 2011521457A5
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JP
Japan
Prior art keywords
capacitor
dielectric film
electrode
forming
capacitor electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011509782A
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English (en)
Japanese (ja)
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JP2011521457A (ja
JP5688492B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2009/044248 external-priority patent/WO2009140658A1/en
Publication of JP2011521457A publication Critical patent/JP2011521457A/ja
Publication of JP2011521457A5 publication Critical patent/JP2011521457A5/ja
Application granted granted Critical
Publication of JP5688492B2 publication Critical patent/JP5688492B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011509782A 2008-05-15 2009-05-15 複数コンデンサを有する監視デバイス Expired - Fee Related JP5688492B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US12789908P 2008-05-15 2008-05-15
US61/127,899 2008-05-15
US5680408P 2008-05-28 2008-05-28
US61/056,804 2008-05-28
PCT/US2009/044248 WO2009140658A1 (en) 2008-05-15 2009-05-15 Surveillance devices with multiple capacitors

Publications (3)

Publication Number Publication Date
JP2011521457A JP2011521457A (ja) 2011-07-21
JP2011521457A5 true JP2011521457A5 (https=) 2012-06-21
JP5688492B2 JP5688492B2 (ja) 2015-03-25

Family

ID=41319084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011509782A Expired - Fee Related JP5688492B2 (ja) 2008-05-15 2009-05-15 複数コンデンサを有する監視デバイス

Country Status (7)

Country Link
US (1) US8296943B2 (https=)
EP (1) EP2286391B1 (https=)
JP (1) JP5688492B2 (https=)
KR (1) KR101634819B1 (https=)
CN (1) CN102027515B (https=)
CA (1) CA2725460C (https=)
WO (1) WO2009140658A1 (https=)

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