JP2011517116A5 - - Google Patents

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Publication number
JP2011517116A5
JP2011517116A5 JP2011504110A JP2011504110A JP2011517116A5 JP 2011517116 A5 JP2011517116 A5 JP 2011517116A5 JP 2011504110 A JP2011504110 A JP 2011504110A JP 2011504110 A JP2011504110 A JP 2011504110A JP 2011517116 A5 JP2011517116 A5 JP 2011517116A5
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Japan
Prior art keywords
chamber liner
chamber
liner
annular
quadrant
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JP2011504110A
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Japanese (ja)
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JP2011517116A (ja
JP5875864B2 (ja
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Priority claimed from US12/099,007 external-priority patent/US7987814B2/en
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JP2011504110A 2008-04-07 2009-04-06 統合型流量平衡器と改良されたコンダクタンスとを備える下部ライナ Active JP5875864B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/099,007 US7987814B2 (en) 2008-04-07 2008-04-07 Lower liner with integrated flow equalizer and improved conductance
US12/099,007 2008-04-07
PCT/US2009/039662 WO2009126576A2 (en) 2008-04-07 2009-04-06 Lower liner with integrated flow equalizer and improved conductance

Publications (3)

Publication Number Publication Date
JP2011517116A JP2011517116A (ja) 2011-05-26
JP2011517116A5 true JP2011517116A5 (https=) 2012-05-31
JP5875864B2 JP5875864B2 (ja) 2016-03-02

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JP2011504110A Active JP5875864B2 (ja) 2008-04-07 2009-04-06 統合型流量平衡器と改良されたコンダクタンスとを備える下部ライナ

Country Status (6)

Country Link
US (4) US7987814B2 (https=)
JP (1) JP5875864B2 (https=)
KR (4) KR20100135894A (https=)
CN (2) CN101990789B (https=)
TW (4) TWI435401B (https=)
WO (1) WO2009126576A2 (https=)

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