CN101990789B - 具有整合的均流器并具有改善的传导性的下部内衬件 - Google Patents

具有整合的均流器并具有改善的传导性的下部内衬件 Download PDF

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Publication number
CN101990789B
CN101990789B CN2009801124193A CN200980112419A CN101990789B CN 101990789 B CN101990789 B CN 101990789B CN 2009801124193 A CN2009801124193 A CN 2009801124193A CN 200980112419 A CN200980112419 A CN 200980112419A CN 101990789 B CN101990789 B CN 101990789B
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quadrant
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CN2009801124193A
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CN101990789A (zh
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詹姆斯·D·卡达希
安德鲁·源
阿吉特·巴拉克利斯纳
迈克尔·C·库特内
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Applied Materials Inc
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Applied Materials Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H01J37/32495—Means for protecting the vessel against plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
CN2009801124193A 2008-04-07 2009-04-06 具有整合的均流器并具有改善的传导性的下部内衬件 Expired - Fee Related CN101990789B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310264587.2A CN103402299B (zh) 2008-04-07 2009-04-06 具有整合的均流器并具有改善的传导性的下部内衬件

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/099,007 US7987814B2 (en) 2008-04-07 2008-04-07 Lower liner with integrated flow equalizer and improved conductance
US12/099,007 2008-04-07
PCT/US2009/039662 WO2009126576A2 (en) 2008-04-07 2009-04-06 Lower liner with integrated flow equalizer and improved conductance

Related Child Applications (1)

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CN201310264587.2A Division CN103402299B (zh) 2008-04-07 2009-04-06 具有整合的均流器并具有改善的传导性的下部内衬件

Publications (2)

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CN101990789A CN101990789A (zh) 2011-03-23
CN101990789B true CN101990789B (zh) 2013-07-17

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CN2009801124193A Expired - Fee Related CN101990789B (zh) 2008-04-07 2009-04-06 具有整合的均流器并具有改善的传导性的下部内衬件
CN201310264587.2A Expired - Fee Related CN103402299B (zh) 2008-04-07 2009-04-06 具有整合的均流器并具有改善的传导性的下部内衬件

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Country Link
US (4) US7987814B2 (https=)
JP (1) JP5875864B2 (https=)
KR (4) KR20100135894A (https=)
CN (2) CN101990789B (https=)
TW (4) TWI435401B (https=)
WO (1) WO2009126576A2 (https=)

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US8440019B2 (en) 2013-05-14
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