JP2011514669A - 2つの基板を結合するための加工 - Google Patents
2つの基板を結合するための加工 Download PDFInfo
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- JP2011514669A JP2011514669A JP2010546412A JP2010546412A JP2011514669A JP 2011514669 A JP2011514669 A JP 2011514669A JP 2010546412 A JP2010546412 A JP 2010546412A JP 2010546412 A JP2010546412 A JP 2010546412A JP 2011514669 A JP2011514669 A JP 2011514669A
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- substrates
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- 239000000758 substrate Substances 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 claims abstract description 38
- 239000004065 semiconductor Substances 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 82
- 238000010438 heat treatment Methods 0.000 claims description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000005304 joining Methods 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 230000008878 coupling Effects 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 abstract description 7
- 238000005859 coupling reaction Methods 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 230000007547 defect Effects 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 239000000203 mixture Substances 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010070 molecular adhesion Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910008284 Si—F Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
Description
Claims (15)
- 2つの基板、特に2つの半導体基板を結合させる方法であって、結合させる前に、該基板(1,3)の結合表面(7,9)上に気体流(13)を供給し、該気体流(13)は、該基板が接触するまで該2つの基板(1,3)の間に供給されることを特徴とする方法。
- 気体流(13)が層流であることを特徴とする請求項1に記載の方法。
- 気体流(13)が該基板(1,3)の表面(7,9)に本質的に平行であることを特徴とする請求項1または2に記載の方法。
- 気体流(13,13’)が室温から100℃までの範囲の温度を有することを特徴とする請求項1から3のいずれかに記載の方法。
- 気体流(13,13’)が、該2つの基板(1,3)の熱処理中に供給されることを特徴とする請求項1から3のいずれかに記載の方法。
- 気体流(13’)を加熱し、該熱処理の少なくとも一部が、加熱された気体流(13’)を用いて実施されることを特徴とする請求項5に記載の方法。
- 該熱処理が、完全に、加熱された気体流(13’)を用いて実施されることを特徴とする請求項6に記載の方法。
- 気体流(13)が10×10-3W/mKの熱伝導率を有することを特徴とする請求項1から7のいずれかに記載の方法。
- 気体流(13)が、窒素および/または不活性ガス、特にアルゴンを含むことを特徴とする請求項1から8のいずれかに記載の方法。
- 気体流処理が数秒から開始され数分までの時間にわたって実施されることを特徴とする請求項1から9のいずれかに記載の方法。
- 気体流(13)は、酸化性雰囲気、特に空気すなわちN2中20%O2に、および/または低湿度の乾燥環境中に供給されることを特徴とする請求項1から10のいずれかに記載の方法。
- 2つの基板(1,3)を結合するための装置であって、該装置は、該2つの基板(1.3)の間に気体流(13)を供給するための手段(25a,25b)を含み、該手段(25a,25b)は、層流の気体流を供給するように設計されていることを特徴とする装置。
- 該気体流を供給するための手段は、通気システム(25a)および/または吸引システム(25b)および/または1つまたは複数の気体注入口を含むことを特徴とする請求項12に記載の装置。
- 該手段(25a,25b)は、該基板の表面(7,9)に本質的に平行な気体流(13)を供給するように設計されていることを特徴とする請求項12または13に記載の装置。
- 該気体流を供給するための手段(25a,25b)は、該気体流を特に100℃まで加熱するための手段(27)をさらに含むことを特徴とする請求項12から14のいずれかに記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08290150A EP2091071B1 (en) | 2008-02-15 | 2008-02-15 | Process for bonding two substrates |
PCT/IB2009/000142 WO2009101495A1 (en) | 2008-02-15 | 2009-01-23 | Processing for bonding two substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011514669A true JP2011514669A (ja) | 2011-05-06 |
JP2011514669A5 JP2011514669A5 (ja) | 2011-12-22 |
Family
ID=39577753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010546412A Pending JP2011514669A (ja) | 2008-02-15 | 2009-01-23 | 2つの基板を結合するための加工 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20110000612A1 (ja) |
EP (1) | EP2091071B1 (ja) |
JP (1) | JP2011514669A (ja) |
KR (1) | KR20100119780A (ja) |
CN (1) | CN101925978A (ja) |
WO (1) | WO2009101495A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013531395A (ja) * | 2010-07-22 | 2013-08-01 | ソイテック | 分子接着によって2枚のウェーハを互いにボンディングするための方法及び装置 |
JP2014188536A (ja) * | 2013-03-26 | 2014-10-06 | National Institute For Materials Science | 金属材の拡散接合方法および金属材の拡散接合装置 |
JP2020123747A (ja) * | 2020-04-28 | 2020-08-13 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 2つの基板をボンディングするための基板ホルダおよび方法 |
US11315813B2 (en) | 2015-04-10 | 2022-04-26 | Ev Group E. Thallner Gmbh | Substrate holder and method for bonding two substrates |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2963982B1 (fr) * | 2010-08-20 | 2012-09-28 | Soitec Silicon On Insulator | Procede de collage a basse temperature |
JP2013008921A (ja) * | 2011-06-27 | 2013-01-10 | Toshiba Corp | 半導体製造装置及び製造方法 |
US9922851B2 (en) | 2014-05-05 | 2018-03-20 | International Business Machines Corporation | Gas-controlled bonding platform for edge defect reduction during wafer bonding |
CN105197880B (zh) * | 2014-06-24 | 2018-03-20 | 中芯国际集成电路制造(上海)有限公司 | 一种带空腔晶片的键合方法 |
FR3029352B1 (fr) | 2014-11-27 | 2017-01-06 | Soitec Silicon On Insulator | Procede d'assemblage de deux substrats |
US11056356B1 (en) * | 2017-09-01 | 2021-07-06 | Intel Corporation | Fluid viscosity control during wafer bonding |
CN109887860B (zh) * | 2018-12-28 | 2020-12-25 | 上海集成电路研发中心有限公司 | 一种键合腔体结构及键合方法 |
KR20210055451A (ko) | 2019-11-07 | 2021-05-17 | 삼성전자주식회사 | 기판 본딩 장치 |
TWI816091B (zh) * | 2020-03-06 | 2023-09-21 | 日商尼康股份有限公司 | 控制裝置、控制方法及程式 |
CN113707564B (zh) * | 2021-08-31 | 2024-06-21 | 浙江同芯祺科技有限公司 | 一种超薄半导体基板加工工艺 |
US12001193B2 (en) * | 2022-03-11 | 2024-06-04 | Applied Materials, Inc. | Apparatus for environmental control of dies and substrates for hybrid bonding |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0745801A (ja) * | 1993-08-03 | 1995-02-14 | Matsushita Electric Ind Co Ltd | 基板の接合方法 |
JP2002334816A (ja) * | 2001-05-10 | 2002-11-22 | Toshiba Corp | 化合物半導体素子の製造方法及びウェハ接着装置 |
JP2005101617A (ja) * | 2003-09-24 | 2005-04-14 | Erich Thallner | ウェハー結合装置及びその方法 |
Family Cites Families (14)
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DE4133820A1 (de) * | 1991-10-12 | 1993-04-15 | Bosch Gmbh Robert | Verfahren zur herstellung von halbleiterelementen |
JP3321882B2 (ja) * | 1993-02-28 | 2002-09-09 | ソニー株式会社 | 基板はり合わせ方法 |
SE507152C2 (sv) | 1996-08-22 | 1998-04-06 | Volvo Lastvagnar Ab | Anordning och förfarande för reglering av luftkompressor |
DE19737051B4 (de) | 1997-08-26 | 2007-02-15 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Verfahren und Vorrichtung zur Steuerung wenigstens einer Komponente einer pneumatischen Bremsanlage eines Fahrzeugs |
DE10048374B4 (de) * | 1999-10-01 | 2009-06-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Verfahren zum großflächigen Verbinden von Verbindungshalbleitermaterialien |
US6372561B1 (en) * | 2001-06-01 | 2002-04-16 | Advanced Micro Devices, Inc. | Fabrication of fully depleted field effect transistor formed in SOI technology with a single implantation step |
KR100442310B1 (ko) | 2001-11-28 | 2004-07-30 | 최우범 | 플라즈마 전처리를 구비한 기판접합장치 및 그 제어방법 |
DE10240600A1 (de) | 2002-09-03 | 2004-03-18 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Verfahren zur Erzeugung von Druckluft und Kompressoranordnung zur Durchführung des Verfahrens |
JP2006134900A (ja) * | 2002-11-28 | 2006-05-25 | Toray Eng Co Ltd | 接合方法および装置 |
WO2005054147A1 (ja) * | 2003-12-02 | 2005-06-16 | Bondtech Inc. | 接合方法及びこの方法により作成されるデバイス並びに接合装置 |
US20070110917A1 (en) * | 2003-12-02 | 2007-05-17 | Bondtech, Inc | Bonding method, device formed by such method, surface activating unit and bonding apparatus comprising such unit |
US7601271B2 (en) | 2005-11-28 | 2009-10-13 | S.O.I.Tec Silicon On Insulator Technologies | Process and equipment for bonding by molecular adhesion |
DE102006000687B4 (de) * | 2006-01-03 | 2010-09-09 | Thallner, Erich, Dipl.-Ing. | Kombination aus einem Träger und einem Wafer, Vorrichtung zum Trennen der Kombination und Verfahren zur Handhabung eines Trägers und eines Wafers |
US7554103B2 (en) * | 2006-06-26 | 2009-06-30 | Applied Materials, Inc. | Increased tool utilization/reduction in MWBC for UV curing chamber |
-
2008
- 2008-02-15 EP EP08290150A patent/EP2091071B1/en active Active
-
2009
- 2009-01-23 KR KR1020107019406A patent/KR20100119780A/ko not_active Application Discontinuation
- 2009-01-23 CN CN2009801028815A patent/CN101925978A/zh active Pending
- 2009-01-23 WO PCT/IB2009/000142 patent/WO2009101495A1/en active Application Filing
- 2009-01-23 JP JP2010546412A patent/JP2011514669A/ja active Pending
- 2009-01-23 US US12/811,209 patent/US20110000612A1/en not_active Abandoned
-
2013
- 2013-01-24 US US13/749,471 patent/US8999090B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0745801A (ja) * | 1993-08-03 | 1995-02-14 | Matsushita Electric Ind Co Ltd | 基板の接合方法 |
JP2002334816A (ja) * | 2001-05-10 | 2002-11-22 | Toshiba Corp | 化合物半導体素子の製造方法及びウェハ接着装置 |
JP2005101617A (ja) * | 2003-09-24 | 2005-04-14 | Erich Thallner | ウェハー結合装置及びその方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013531395A (ja) * | 2010-07-22 | 2013-08-01 | ソイテック | 分子接着によって2枚のウェーハを互いにボンディングするための方法及び装置 |
JP2014188536A (ja) * | 2013-03-26 | 2014-10-06 | National Institute For Materials Science | 金属材の拡散接合方法および金属材の拡散接合装置 |
US11315813B2 (en) | 2015-04-10 | 2022-04-26 | Ev Group E. Thallner Gmbh | Substrate holder and method for bonding two substrates |
JP2020123747A (ja) * | 2020-04-28 | 2020-08-13 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 2つの基板をボンディングするための基板ホルダおよび方法 |
JP7014850B2 (ja) | 2020-04-28 | 2022-02-01 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 2つの基板をボンディングするための基板ホルダおよび方法 |
Also Published As
Publication number | Publication date |
---|---|
US8999090B2 (en) | 2015-04-07 |
US20110000612A1 (en) | 2011-01-06 |
EP2091071A1 (en) | 2009-08-19 |
KR20100119780A (ko) | 2010-11-10 |
CN101925978A (zh) | 2010-12-22 |
WO2009101495A1 (en) | 2009-08-20 |
US20130139946A1 (en) | 2013-06-06 |
EP2091071B1 (en) | 2012-12-12 |
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