JP2011508422A5 - - Google Patents

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Publication number
JP2011508422A5
JP2011508422A5 JP2010539464A JP2010539464A JP2011508422A5 JP 2011508422 A5 JP2011508422 A5 JP 2011508422A5 JP 2010539464 A JP2010539464 A JP 2010539464A JP 2010539464 A JP2010539464 A JP 2010539464A JP 2011508422 A5 JP2011508422 A5 JP 2011508422A5
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Japan
Prior art keywords
assembly according
electrode assembly
showerhead electrode
composite showerhead
sheet
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JP2010539464A
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English (en)
Japanese (ja)
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JP5265700B2 (ja
JP2011508422A (ja
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Priority claimed from PCT/US2008/013782 external-priority patent/WO2009085163A1/en
Publication of JP2011508422A publication Critical patent/JP2011508422A/ja
Publication of JP2011508422A5 publication Critical patent/JP2011508422A5/ja
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Publication of JP5265700B2 publication Critical patent/JP5265700B2/ja
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JP2010539464A 2007-12-19 2008-12-17 プラズマ処理装置用の複合シャワーヘッド電極組立体 Active JP5265700B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US815207P 2007-12-19 2007-12-19
US61/008,152 2007-12-19
PCT/US2008/013782 WO2009085163A1 (en) 2007-12-19 2008-12-17 A composite showerhead electrode assembly for a plasma processing apparatus

Publications (3)

Publication Number Publication Date
JP2011508422A JP2011508422A (ja) 2011-03-10
JP2011508422A5 true JP2011508422A5 (enExample) 2012-01-12
JP5265700B2 JP5265700B2 (ja) 2013-08-14

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JP2010539464A Active JP5265700B2 (ja) 2007-12-19 2008-12-17 プラズマ処理装置用の複合シャワーヘッド電極組立体

Country Status (8)

Country Link
US (2) US8418649B2 (enExample)
JP (1) JP5265700B2 (enExample)
KR (1) KR101553422B1 (enExample)
CN (1) CN101903979B (enExample)
MY (1) MY166000A (enExample)
SG (2) SG10201407723PA (enExample)
TW (1) TWI507093B (enExample)
WO (1) WO2009085163A1 (enExample)

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