JP2011237454A - 加熱アレイを有するマイクロエレクトロニクスデバイス - Google Patents
加熱アレイを有するマイクロエレクトロニクスデバイス Download PDFInfo
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Abstract
【解決手段】本発明は、局所駆動ユニットCU2を有する加熱素子HEのアレイ及び任意には試料室SCに隣り合うセンサ素子SEのアレイを有するマイクロエレクトロニクスデバイスの異なる設計に関する。適当な電流を加熱素子HEに印加することによって、試料室は、所望の温度プロファイルに従って加熱されることができる。局所駆動ユニットは、好適には、それらの個別の特性のバリエーションを補償する手段を有する。
【選択図】図1
Description
I=m・(V-Vthres)2
I=constant・m・(Vpower-V-Vthre)2
Claims (37)
- 試料を操作するためのマイクロエレクトロニクスデバイスであって、
a)試料室と、
b)複数の局所駆動ユニット及び関連する加熱素子を具える加熱アレイであって、前記加熱素子は、関連する前記局所駆動ユニットによって電気エネルギーを用いて駆動されると、前記試料室の少なくともサブ領域と熱を交換することができる、加熱アレイと、
c)前記局所駆動ユニットを選択的に制御する制御ユニットと、
d)前記局所駆動ユニットの個別の特性のバリエーションを補償する手段と、
を有する、マイクロエレクトロニクスデバイス。 - 前記加熱アレイが、前記加熱素子及び/又は前記局所駆動ユニットの規則的な2次元配列を有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記局所駆動ユニットは、それらの個別の特性を調整するハードウェア素子を有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記制御ユニットは、前記それらの個別の特性のバリエーションがなされる熱交換に対して無視できるほどの影響を有する動作レンジにおいて、前記局所駆動ユニットを駆動するように適応される、請求項1に記載のマイクロエレクトロニクスデバイス。
- すべての前記局所駆動ユニットが、共通電源ラインに結合され、すべての前記加熱素子が、別の共通電源ラインに結合される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記制御ユニットの一部は、前記加熱アレイの外側に位置しており、制御信号を伝えるために、制御ラインを介して前記局所駆動ユニットに接続されることを特徴とする、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記制御信号は、パルス幅変調され、パルス振幅変調され、及び/又はパルス周波数変調される、請求項6に記載のマイクロエレクトロニクスデバイス。
- 前記局所駆動ユニットは、前記制御信号の情報を記憶するメモリを有する、請求項6に記載のマイクロエレクトロニクスデバイス。
- 少なくとも1つの前記局所駆動ユニットは、
I=m・(V-Vthres)2
に従って、所与の入力電圧Vについて、出力電流Iを生成するトランジスタを有し、ここで、m及びVthresは、前記トランジスタの個別の特性である、請求項1に記載のマイクロエレクトロニクスデバイス。 - 前記局所駆動ユニットは、Vthresのバリエーションを補償する回路を有する、請求項9に記載のマイクロエレクトロニクスデバイス。
- 前記局所駆動ユニットは、mのバリエーションを補償する回路を有する、請求項9に記載のマイクロエレクトロニクスデバイス。
- 前記局所駆動ユニットの各々は、好適にはキャパシタであるメモリ素子を有し、前記メモリ素子は、前記トランジスタの制御ゲート及びVthresを補償する電圧に前記メモリ素子をチャージする回路に結合される、請求項9に記載のマイクロエレクトロニクスデバイス。
- 前記局所駆動ユニットの各々は、好適にはキャパシタであるメモリ素子を有し、前記メモリ素子は、予め決められた電流を生成するために、前記トランジスタの制御ゲート及び前記トランジスタを駆動する電圧に前記メモリ素子をチャージする回路に結合される、請求項9に記載のマイクロエレクトロニクスデバイス。
- 前記回路は、電流ミラー回路を有する、請求項13に記載のマイクロエレクトロニクスデバイス。
- 前記回路は、単一トランジスタ電流ミラー回路を有する、請求項13に記載のマイクロエレクトロニクスデバイス。
- 好適には光学的、磁気的又は電気的なセンサ素子である、前記試料室内の試料の特性を検知する少なくとも1つのセンサ素子を有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 複数の前記センサ素子を有する検知アレイを有する、請求項16に記載のマイクロエレクトロニクスデバイス。
- 前記加熱アレイの前記加熱素子及び前記検知アレイの前記センサ素子は、互いに関して位置合わせされる、請求項17に記載のマイクロエレクトロニクスデバイス。
- 前記加熱アレイ及び前記検知アレイは、前記試料室の互いに対向する側に配される、請求項17に記載のマイクロエレクトロニクスデバイス。
- 前記加熱アレイ及び前記検知アレイは、前記試料室の同じ側に配され、前記アレイは、他のアレイ上に配され又は1つの層にマージされる、請求項17に記載のマイクロエレクトロニクスデバイス。
- 前記検知アレイは、前記加熱アレイと前記試料室との間に配される、請求項20に記載のマイクロエレクトロニクスデバイス。
- 前記加熱素子は、抵抗ストリップ、透明電極、ペルティエ素子、高周波加熱電極又は放射加熱電極である、請求項1に記載のマイクロエレクトロニクスデバイス。
- 好適にはペルティエ素子又は冷却された塊体である、前記加熱アレイ及び/又は前記試料室と熱接触する冷却ユニットを有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 少なくとも1つの前記加熱素子が、前記試料室から熱を除去するように適応される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 好適には前記加熱アレイに組み込まれる、少なくとも1つの温度センサを有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 少なくとも1つの前記加熱素子が、温度センサとして動作されることができる、請求項25に記載のマイクロエレクトロニクスデバイス。
- 前記制御ユニットは、前記温度センサに結合されており、前記試料室の予め決められた温度プロファイルに従って、閉ループで前記加熱素子を制御するように適応される、請求項25に記載のマイクロエレクトロニクスデバイス。
- 好適にはポンプ又はバルブのような、前記試料室内の流体のフロー及び/又は粒子の移動を制御するマイクロメカニカルな又は電気的な装置を有する、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記加熱素子の少なくとも1つは、熱毛管効果によって前記試料室内の流体のフローを生成するように適応される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記試料室は、少なくとも2つのコンパートメントに熱絶縁によって分けられる、請求項1に記載のマイクロエレクトロニクスデバイス。
- 電気的絶縁層及び/又は生体適合層が、前記試料室と前記加熱アレイ及び/又はセンサ素子の検知アレイとの間に配される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 前記制御ユニットは、選択可能な強度及び/又は周波数の交流により前記加熱素子を駆動するように適応される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 薄膜エレクトロニクスにおいて実現される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 好適にはアクティブマトリックスアプローチである大面積エレクトロニクスマトリックスアプローチが、前記デバイスの前記加熱素子及び/又はセンサ素子と接触するために使用される、請求項1に記載のマイクロエレクトロニクスデバイス。
- 行単位アドレッシングアプローチが使用される、請求項34に記載のマイクロエレクトロニクスデバイス。
- 前記試料室と、前記加熱アレイ及び/又はセンサ素子の検知アレイとの間のインタフェースが、前記アレイの前記素子のパターンに合わせて調整されるパターンで化学的にコーティングされる、請求項1に記載のマイクロエレクトロニクスデバイス。
- 請求項1乃至請求項36のいずれか1項に記載のマイクロエレクトロニクスデバイスの、分子診断、生物学的試料解析又は化学的試料解析、食品解析及び/又は法科学解析のための使用。
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WO2007107947A1 (en) | 2007-09-27 |
JP5739769B2 (ja) | 2015-06-24 |
US20100167959A1 (en) | 2010-07-01 |
WO2007107892A1 (en) | 2007-09-27 |
EP1998886A1 (en) | 2008-12-10 |
JP2009529908A (ja) | 2009-08-27 |
ATE512714T1 (de) | 2011-07-15 |
US8323570B2 (en) | 2012-12-04 |
EP1998886B1 (en) | 2011-06-15 |
JP5133971B2 (ja) | 2013-01-30 |
JP2009530635A (ja) | 2009-08-27 |
EP1999272B1 (en) | 2017-11-01 |
US20100229656A1 (en) | 2010-09-16 |
US20100156444A1 (en) | 2010-06-24 |
JP2009529909A (ja) | 2009-08-27 |
EP1999272A1 (en) | 2008-12-10 |
US8683877B2 (en) | 2014-04-01 |
WO2007107934A1 (en) | 2007-09-27 |
EP1999273A1 (en) | 2008-12-10 |
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