JP2011217595A5 - - Google Patents
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- Publication number
- JP2011217595A5 JP2011217595A5 JP2011007695A JP2011007695A JP2011217595A5 JP 2011217595 A5 JP2011217595 A5 JP 2011217595A5 JP 2011007695 A JP2011007695 A JP 2011007695A JP 2011007695 A JP2011007695 A JP 2011007695A JP 2011217595 A5 JP2011217595 A5 JP 2011217595A5
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibration wave
- base
- protrusion
- wave driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 238000005452 bending Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011007695A JP5979817B2 (ja) | 2010-03-16 | 2011-01-18 | 振動波駆動装置 |
| US13/044,008 US8987972B2 (en) | 2010-03-16 | 2011-03-09 | Vibrator in vibration type driving apparatus and manufacturing method thereof |
| US13/047,673 US20110227453A1 (en) | 2010-03-16 | 2011-03-14 | Vibration wave driving apparatus and method of making vibrating body thereof |
| CN201110062887.3A CN102195515B (zh) | 2010-03-16 | 2011-03-16 | 振动型驱动设备中的振动器及其制造方法 |
| CN201110062904.3A CN102195517B (zh) | 2010-03-16 | 2011-03-16 | 振动波驱动装置及其振动体的制造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010058779 | 2010-03-16 | ||
| JP2010058779 | 2010-03-16 | ||
| JP2011007695A JP5979817B2 (ja) | 2010-03-16 | 2011-01-18 | 振動波駆動装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011217595A JP2011217595A (ja) | 2011-10-27 |
| JP2011217595A5 true JP2011217595A5 (enExample) | 2014-03-06 |
| JP5979817B2 JP5979817B2 (ja) | 2016-08-31 |
Family
ID=44603039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011007695A Active JP5979817B2 (ja) | 2010-03-16 | 2011-01-18 | 振動波駆動装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20110227453A1 (enExample) |
| JP (1) | JP5979817B2 (enExample) |
| CN (1) | CN102195517B (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5627258B2 (ja) | 2010-03-23 | 2014-11-19 | キヤノン株式会社 | 振動型アクチュエータおよびその製造方法 |
| JP5930595B2 (ja) * | 2010-04-06 | 2016-06-08 | キヤノン株式会社 | 振動型アクチュエータ、振動子及び振動子の製造方法 |
| JP5909624B2 (ja) * | 2010-08-04 | 2016-04-27 | パナソニックIpマネジメント株式会社 | 駆動装置 |
| JP5791339B2 (ja) * | 2011-04-13 | 2015-10-07 | キヤノン株式会社 | 円環型振動波アクチュエータ |
| JP5818500B2 (ja) * | 2011-04-26 | 2015-11-18 | キヤノン株式会社 | 振動波駆動装置とその振動体の製造方法 |
| JP6128868B2 (ja) * | 2012-02-23 | 2017-05-17 | キヤノン株式会社 | 振動型駆動装置及び撮像装置 |
| EP3386091B1 (en) * | 2017-04-03 | 2019-07-10 | Physik Instrumente (PI) GmbH & Co. Kg | Piezoelectric vibrator device and piezoelectric motor |
| US11336212B2 (en) * | 2017-09-01 | 2022-05-17 | Piezomotor Uppsala Ab | Electromechanical stator, motor and method for driving an electromechanical motor |
| JP6393383B2 (ja) * | 2017-09-28 | 2018-09-19 | キヤノン株式会社 | 振動波モータ |
| JP6852033B2 (ja) * | 2018-10-03 | 2021-03-31 | キヤノン株式会社 | 振動型アクチュエータ及び装置 |
| JP7110060B2 (ja) * | 2018-10-24 | 2022-08-01 | キヤノン株式会社 | 振動型アクチュエータ、接触体及びその製造方法 |
| JP7313909B2 (ja) * | 2019-05-30 | 2023-07-25 | キヤノン株式会社 | 振動波モータおよび電子機器。 |
| JP7016898B2 (ja) * | 2020-02-19 | 2022-02-07 | キヤノン株式会社 | 振動型モータ、レンズ装置、および、電子機器 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63220777A (ja) * | 1987-03-09 | 1988-09-14 | Marcon Electronics Co Ltd | 超音波モ−タ |
| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
| JP3016617B2 (ja) * | 1991-05-08 | 2000-03-06 | キヤノン株式会社 | 振動波モータ |
| JP3450524B2 (ja) * | 1994-08-04 | 2003-09-29 | キヤノン株式会社 | 振動アクチュエータ |
| JPH1141957A (ja) * | 1997-07-24 | 1999-02-12 | Asmo Co Ltd | 超音波モータのステータ及び振動板 |
| US7187104B2 (en) * | 2003-03-28 | 2007-03-06 | Canon Kabushiki Kaisha | Vibration-type driving device, control apparatus for controlling the driving of the vibration-type driving device, and electronic equipment having the vibration-type driving device and the control apparatus |
| JP4072518B2 (ja) * | 2004-06-09 | 2008-04-09 | キヤノン株式会社 | 振動波駆動装置 |
| WO2008007653A1 (en) * | 2006-07-14 | 2008-01-17 | Alps Electric Co., Ltd. | Drive regulation structure of piezoelectric actuator and lens drive equipped with the same |
| KR100817470B1 (ko) * | 2006-10-24 | 2008-03-31 | 한국과학기술연구원 | 압전 선형 모터 |
| JP4965973B2 (ja) * | 2006-11-08 | 2012-07-04 | キヤノン株式会社 | 振動型アクチュエータ |
| JP5153184B2 (ja) * | 2007-03-30 | 2013-02-27 | キヤノン株式会社 | 振動波駆動装置 |
-
2011
- 2011-01-18 JP JP2011007695A patent/JP5979817B2/ja active Active
- 2011-03-14 US US13/047,673 patent/US20110227453A1/en not_active Abandoned
- 2011-03-16 CN CN201110062904.3A patent/CN102195517B/zh not_active Expired - Fee Related
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