JP2011213594A5 - - Google Patents
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- Publication number
- JP2011213594A5 JP2011213594A5 JP2011168526A JP2011168526A JP2011213594A5 JP 2011213594 A5 JP2011213594 A5 JP 2011213594A5 JP 2011168526 A JP2011168526 A JP 2011168526A JP 2011168526 A JP2011168526 A JP 2011168526A JP 2011213594 A5 JP2011213594 A5 JP 2011213594A5
- Authority
- JP
- Japan
- Prior art keywords
- oso
- sih
- triflate
- silicon
- kgeh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 claims 8
- JIMODRYHNQDMSX-UHFFFAOYSA-N [GeH2].[Si] Chemical compound [GeH2].[Si] JIMODRYHNQDMSX-UHFFFAOYSA-N 0.000 claims 6
- 238000000034 method Methods 0.000 claims 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 5
- 238000006243 chemical reaction Methods 0.000 claims 5
- 229910000077 silane Inorganic materials 0.000 claims 5
- -1 germyl group compound Chemical class 0.000 claims 4
- 238000001308 synthesis method Methods 0.000 claims 4
- 241000581652 Hagenia abyssinica Species 0.000 claims 3
- 239000003446 ligand Substances 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 239000002904 solvent Substances 0.000 claims 3
- 150000001875 compounds Chemical class 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 238000009835 boiling Methods 0.000 claims 1
- 125000003800 germyl group Chemical group [H][Ge]([H])([H])[*] 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 238000003756 stirring Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000002194 synthesizing effect Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61012004P | 2004-09-14 | 2004-09-14 | |
| US60/610,120 | 2004-09-14 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007531151A Division JP4970267B2 (ja) | 2004-09-14 | 2004-12-31 | 珪素およびゲルマニウムの核原子付き水素化合物、および同化合物の合成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011213594A JP2011213594A (ja) | 2011-10-27 |
| JP2011213594A5 true JP2011213594A5 (https=) | 2012-10-25 |
Family
ID=36060344
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007531151A Expired - Fee Related JP4970267B2 (ja) | 2004-09-14 | 2004-12-31 | 珪素およびゲルマニウムの核原子付き水素化合物、および同化合物の合成法 |
| JP2011168526A Pending JP2011213594A (ja) | 2004-09-14 | 2011-08-01 | 珪素およびゲルマニウムの核原子付き水素化合物、および同化合物の合成法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007531151A Expired - Fee Related JP4970267B2 (ja) | 2004-09-14 | 2004-12-31 | 珪素およびゲルマニウムの核原子付き水素化合物、および同化合物の合成法 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7981392B2 (https=) |
| JP (2) | JP4970267B2 (https=) |
| CN (1) | CN101057008B (https=) |
| WO (1) | WO2006031240A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8821635B2 (en) * | 2004-09-14 | 2014-09-02 | Arizona Board Of Regents On Behalf Of Arizona State University | Method for growing Si-Ge semiconductor materials and devices on substrates |
| JP2008532294A (ja) | 2005-03-11 | 2008-08-14 | アリゾナ ボード オブ リージェンツ ア ボディー コーポレート アクティング オン ビハーフ オブ アリゾナ ステイト ユニバーシティ | 新規なＧｅＳｉＳｎベースの化合物、テンプレート、及び半導体構造 |
| KR101014066B1 (ko) | 2005-11-23 | 2011-02-14 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | 규소-게르마늄 수소화물 및 그의 제조 및 사용 방법 |
| KR101014143B1 (ko) | 2005-11-23 | 2011-02-14 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | 규소-게르마늄 수소화물 및 그의 제조 및 사용 방법 |
| CN101365648B (zh) * | 2005-11-23 | 2012-09-26 | 亚利桑那董事会,代表亚利桑那州立大学行事的法人团体 | 硅锗氢化物以及制造和使用其的方法 |
| CN101678665B (zh) * | 2007-04-02 | 2013-07-10 | 代表亚利桑那州立大学行事的亚利桑那董事会 | 制备和使用卤代甲硅烷基锗烷的新方法 |
| US7915104B1 (en) | 2007-06-04 | 2011-03-29 | The Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | Methods and compositions for preparing tensile strained Ge on Ge1-ySny buffered semiconductor substrates |
| WO2009123926A1 (en) * | 2008-04-02 | 2009-10-08 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Actg For & On Behalf ... | Selective deposition of sige layers from single source of si-ge hydrides |
| KR101869246B1 (ko) * | 2012-01-13 | 2018-07-20 | 엘지이노텍 주식회사 | 발광소자 패키지 |
| CN107316802B (zh) * | 2017-06-26 | 2020-04-28 | 南京大学 | 一种高锗含量锗硅薄膜的低温外延制备方法 |
| CN109585504B (zh) * | 2018-10-08 | 2020-12-25 | 惠科股份有限公司 | 显示面板及显示面板的制作方法 |
| US11830734B2 (en) | 2021-05-19 | 2023-11-28 | Applied Materials, Inc. | Thermal deposition of silicon-germanium |
| CN116924335A (zh) * | 2022-04-02 | 2023-10-24 | 烟台万华电子材料有限公司 | 一种在液氨中反应生产乙锗烷的方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2968427A (en) * | 1955-06-28 | 1961-01-17 | Meshberg Philip | Valve for aerosol container |
| FR1204724A (fr) | 1957-07-17 | 1960-01-27 | Kali Chemie Ag | Procédé d'obtention d'éléments très purs du quatrième groupe du système périodique |
| US4910153A (en) | 1986-02-18 | 1990-03-20 | Solarex Corporation | Deposition feedstock and dopant materials useful in the fabrication of hydrogenated amorphous silicon alloys for photovoltaic devices and other semiconductor devices |
| EG18056A (en) * | 1986-02-18 | 1991-11-30 | Solarex Corp | Dispositif feedstock materials useful in the fabrication of hydrogenated amorphous silicon alloys for photo-voltaic devices and other semiconductor devices |
| US4777023A (en) * | 1986-02-18 | 1988-10-11 | Solarex Corporation | Preparation of silicon and germanium hydrides containing two different group 4A atoms |
| JP3978490B2 (ja) * | 2002-08-06 | 2007-09-19 | 独立行政法人物質・材料研究機構 | シリコンゲルマニウムナノワイヤー集合体 |
| US7594967B2 (en) | 2002-08-30 | 2009-09-29 | Amberwave Systems Corporation | Reduction of dislocation pile-up formation during relaxed lattice-mismatched epitaxy |
| JP4074794B2 (ja) * | 2002-08-30 | 2008-04-09 | ソタジャパン有限会社 | ゲルマニウム合金−シリカ複合体を用いた装身具 |
| US7540920B2 (en) | 2002-10-18 | 2009-06-02 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
| US7598513B2 (en) * | 2003-06-13 | 2009-10-06 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University, A Corporate Body Organized Under Arizona Law | SixSnyGe1-x-y and related alloy heterostructures based on Si, Ge and Sn |
| US8821635B2 (en) | 2004-09-14 | 2014-09-02 | Arizona Board Of Regents On Behalf Of Arizona State University | Method for growing Si-Ge semiconductor materials and devices on substrates |
| KR101014066B1 (ko) * | 2005-11-23 | 2011-02-14 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | 규소-게르마늄 수소화물 및 그의 제조 및 사용 방법 |
| KR101014143B1 (ko) | 2005-11-23 | 2011-02-14 | 아리조나 보드 오브 리전트스, 아리조나주의 아리조나 주립대 대행법인 | 규소-게르마늄 수소화물 및 그의 제조 및 사용 방법 |
-
2004
- 2004-12-31 US US11/662,722 patent/US7981392B2/en not_active Expired - Fee Related
- 2004-12-31 WO PCT/US2004/043854 patent/WO2006031240A1/en not_active Ceased
- 2004-12-31 JP JP2007531151A patent/JP4970267B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-08 CN CN200580038437.3A patent/CN101057008B/zh not_active Expired - Fee Related
-
2011
- 2011-07-12 US US13/180,961 patent/US8568681B2/en not_active Expired - Fee Related
- 2011-08-01 JP JP2011168526A patent/JP2011213594A/ja active Pending
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