JP2011209130A5 - - Google Patents

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JP2011209130A5
JP2011209130A5 JP2010077699A JP2010077699A JP2011209130A5 JP 2011209130 A5 JP2011209130 A5 JP 2011209130A5 JP 2010077699 A JP2010077699 A JP 2010077699A JP 2010077699 A JP2010077699 A JP 2010077699A JP 2011209130 A5 JP2011209130 A5 JP 2011209130A5
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substrate
membrane
flow path
gap
view
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JP2010077699A
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Japanese (ja)
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JP2011209130A (ja
JP4979788B2 (ja
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Priority claimed from JP2010077699A external-priority patent/JP4979788B2/ja
Priority to JP2010077699A priority Critical patent/JP4979788B2/ja
Priority to CA2794467A priority patent/CA2794467A1/en
Priority to PCT/JP2010/005658 priority patent/WO2011121680A1/ja
Priority to US13/637,872 priority patent/US20130008263A1/en
Priority to KR1020127023206A priority patent/KR101358698B1/ko
Priority to CN2010800654299A priority patent/CN102792130A/zh
Priority to EP10848862.8A priority patent/EP2554952A4/en
Publication of JP2011209130A publication Critical patent/JP2011209130A/ja
Publication of JP2011209130A5 publication Critical patent/JP2011209130A5/ja
Publication of JP4979788B2 publication Critical patent/JP4979788B2/ja
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JP2010077699A 2010-03-30 2010-03-30 流量センサーおよび流量検出装置 Expired - Fee Related JP4979788B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2010077699A JP4979788B2 (ja) 2010-03-30 2010-03-30 流量センサーおよび流量検出装置
KR1020127023206A KR101358698B1 (ko) 2010-03-30 2010-09-16 유량 센서 및 유량 검출 장치
PCT/JP2010/005658 WO2011121680A1 (ja) 2010-03-30 2010-09-16 流量センサーおよび流量検出装置
US13/637,872 US20130008263A1 (en) 2010-03-30 2010-09-16 Flowrate sensor and flowrate detection device
CA2794467A CA2794467A1 (en) 2010-03-30 2010-09-16 Flowrate sensor and flowrate detection device
CN2010800654299A CN102792130A (zh) 2010-03-30 2010-09-16 流量传感器及流量检测装置
EP10848862.8A EP2554952A4 (en) 2010-03-30 2010-09-16 FLOW SENSOR AND FLOW DETECTOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010077699A JP4979788B2 (ja) 2010-03-30 2010-03-30 流量センサーおよび流量検出装置

Publications (3)

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JP2011209130A JP2011209130A (ja) 2011-10-20
JP2011209130A5 true JP2011209130A5 (enExample) 2011-12-15
JP4979788B2 JP4979788B2 (ja) 2012-07-18

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JP2010077699A Expired - Fee Related JP4979788B2 (ja) 2010-03-30 2010-03-30 流量センサーおよび流量検出装置

Country Status (7)

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US (1) US20130008263A1 (enExample)
EP (1) EP2554952A4 (enExample)
JP (1) JP4979788B2 (enExample)
KR (1) KR101358698B1 (enExample)
CN (1) CN102792130A (enExample)
CA (1) CA2794467A1 (enExample)
WO (1) WO2011121680A1 (enExample)

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TWI720878B (zh) * 2020-04-24 2021-03-01 研能科技股份有限公司 致動傳感模組
CN111927751B (zh) * 2020-07-14 2021-07-02 西安交通大学 一种隔膜压缩机膜片位移无损监测系统及方法
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