JP2011205101A - 半導体メモリ装置及びその製造方法 - Google Patents

半導体メモリ装置及びその製造方法 Download PDF

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Publication number
JP2011205101A
JP2011205101A JP2011065756A JP2011065756A JP2011205101A JP 2011205101 A JP2011205101 A JP 2011205101A JP 2011065756 A JP2011065756 A JP 2011065756A JP 2011065756 A JP2011065756 A JP 2011065756A JP 2011205101 A JP2011205101 A JP 2011205101A
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JP
Japan
Prior art keywords
pull
well region
semiconductor memory
memory device
active region
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Pending
Application number
JP2011065756A
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English (en)
Japanese (ja)
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JP2011205101A5 (enExample
Inventor
Sun-Me Lim
善美 林
Han-Byung Park
漢秉 朴
Yong-Shik Kim
容▲シク▼ 金
Hee-Bum Hong
熙範 洪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110001087A external-priority patent/KR20110107268A/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2011205101A publication Critical patent/JP2011205101A/ja
Publication of JP2011205101A5 publication Critical patent/JP2011205101A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10—Integrated device layouts

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  • Semiconductor Memories (AREA)
JP2011065756A 2010-03-24 2011-03-24 半導体メモリ装置及びその製造方法 Pending JP2011205101A (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2010-0026406 2010-03-24
KR20100026406 2010-03-24
KR1020110001087A KR20110107268A (ko) 2010-03-24 2011-01-05 반도체 메모리 장치 및 그 제조 방법
KR10-2011-0001087 2011-01-05

Publications (2)

Publication Number Publication Date
JP2011205101A true JP2011205101A (ja) 2011-10-13
JP2011205101A5 JP2011205101A5 (enExample) 2014-05-08

Family

ID=44656326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011065756A Pending JP2011205101A (ja) 2010-03-24 2011-03-24 半導体メモリ装置及びその製造方法

Country Status (2)

Country Link
US (1) US20110235407A1 (enExample)
JP (1) JP2011205101A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8598633B2 (en) * 2012-01-16 2013-12-03 GlobalFoundries, Inc. Semiconductor device having contact layer providing electrical connections
US9111634B2 (en) * 2012-07-13 2015-08-18 Freescale Semiconductor, Inc. Methods and structures for multiport memory devices
KR20140049356A (ko) * 2012-10-17 2014-04-25 삼성전자주식회사 반도체 소자
JP6258672B2 (ja) * 2013-11-21 2018-01-10 ルネサスエレクトロニクス株式会社 半導体装置の製造方法
US9251888B1 (en) 2014-09-15 2016-02-02 Taiwan Semiconductor Manufacturing Company, Ltd. SRAM cells with vertical gate-all-round MOSFETs
KR102223970B1 (ko) * 2015-03-12 2021-03-09 삼성전자주식회사 반도체 장치, 레이아웃 시스템 및 스탠다드 셀 라이브러리
TWI685088B (zh) * 2015-07-15 2020-02-11 聯華電子股份有限公司 靜態隨機存取記憶體單元結構以及靜態隨機存取記憶體佈局結構
US9620509B1 (en) * 2015-10-30 2017-04-11 Taiwan Semiconductor Manufacturing Co., Ltd. Static random access memory device with vertical FET devices
JP2017108031A (ja) 2015-12-11 2017-06-15 ルネサスエレクトロニクス株式会社 半導体装置
KR102256055B1 (ko) 2017-04-06 2021-05-27 삼성전자주식회사 반도체 소자
US10490558B2 (en) * 2017-05-31 2019-11-26 Qualcomm Incorporated Reducing or avoiding mechanical stress in static random access memory (SRAM) strap cells
US10276581B1 (en) 2017-10-31 2019-04-30 Taiwan Semiconductor Manufacturing Co., Ltd. Integrated circuit chip and manufacturing method thereof
US10861859B2 (en) * 2018-06-29 2020-12-08 Taiwan Semiconductor Manufacturing Company Ltd. Memory cells with butted contacts and method of forming same
US10964705B2 (en) * 2018-09-10 2021-03-30 Semiconductor Components Industries, Llc Method of forming a semiconductor device
US11048849B2 (en) * 2018-10-31 2021-06-29 Taiwan Semiconductor Manufacturing Company Ltd. Integrated circuit and method of manufacturing the same
CN111463210B (zh) * 2020-04-08 2021-07-20 长江存储科技有限责任公司 一种外围电路及三维存储器
US11916017B2 (en) * 2021-08-26 2024-02-27 Taiwan Semiconductor Manufacturing Company, Ltd. Signal conducting line arrangements in integrated circuits
CN117395984A (zh) * 2022-06-29 2024-01-12 长鑫存储技术有限公司 半导体结构及其制作方法
US12414344B2 (en) * 2022-07-20 2025-09-09 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device having active regions of different dimensions and method of manufacturing the same
CN120152380B (zh) * 2025-03-10 2025-12-05 长鑫科技集团股份有限公司 半导体结构、存储芯片

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003060089A (ja) * 2001-08-16 2003-02-28 Mitsubishi Electric Corp 半導体記憶装置
JP2003086713A (ja) * 2001-06-28 2003-03-20 Matsushita Electric Ind Co Ltd Ｓｒａｍ装置
JP2003152111A (ja) * 2001-11-13 2003-05-23 Mitsubishi Electric Corp 半導体記憶装置
JP2006269674A (ja) * 2005-03-23 2006-10-05 Nec Electronics Corp 半導体集積回路

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6295224B1 (en) * 1999-12-30 2001-09-25 Stmicroelectronics, Inc. Circuit and method of fabricating a memory cell for a static random access memory
US6898111B2 (en) * 2001-06-28 2005-05-24 Matsushita Electric Industrial Co., Ltd. SRAM device
US7605447B2 (en) * 2005-09-22 2009-10-20 International Business Machines Corporation Highly manufacturable SRAM cells in substrates with hybrid crystal orientation
US7592247B2 (en) * 2006-10-04 2009-09-22 International Business Machines Corporation Sub-lithographic local interconnects, and methods for forming same
US7957178B2 (en) * 2008-01-04 2011-06-07 Texas Instruments Incorporated Storage cell having buffer circuit for driving the bitline
US8315084B2 (en) * 2010-03-10 2012-11-20 Taiwan Semiconductor Manufacturing Company, Ltd. Fully balanced dual-port memory cell
US8183639B2 (en) * 2010-10-07 2012-05-22 Freescale Semiconductor, Inc. Dual port static random access memory cell layout

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086713A (ja) * 2001-06-28 2003-03-20 Matsushita Electric Ind Co Ltd Ｓｒａｍ装置
JP2003060089A (ja) * 2001-08-16 2003-02-28 Mitsubishi Electric Corp 半導体記憶装置
JP2003152111A (ja) * 2001-11-13 2003-05-23 Mitsubishi Electric Corp 半導体記憶装置
JP2006269674A (ja) * 2005-03-23 2006-10-05 Nec Electronics Corp 半導体集積回路

Also Published As

Publication number Publication date
US20110235407A1 (en) 2011-09-29

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