JP2011161534A - 研磨ヘッド及び研磨装置 - Google Patents
研磨ヘッド及び研磨装置 Download PDFInfo
- Publication number
- JP2011161534A JP2011161534A JP2010024532A JP2010024532A JP2011161534A JP 2011161534 A JP2011161534 A JP 2011161534A JP 2010024532 A JP2010024532 A JP 2010024532A JP 2010024532 A JP2010024532 A JP 2010024532A JP 2011161534 A JP2011161534 A JP 2011161534A
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- tape
- pressing
- substrate
- polishing head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/005—Portal grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
【解決手段】ベース部材521aの下部に対し、研磨ヘッド521bを、研磨テープ510の幅方向に直交する方向を軸521cとして揺動可能に取り付ける。そして、研磨面510dを挟んで幅方向両端に研磨動作のストッパとして機能する平滑面510e,510eを備えた研磨テープ510を、前記研磨ヘッド521bによって微少突起αに押圧させ、前記研磨テープ510を移送させて微少突起αを研磨する。ここで、研磨が進行し、微少突起αの高さが低くなるに従って、研磨ヘッド521の基板BSに対する傾きが小さくなり、最終的には、平滑面510e,510eの双方が基板BSに当接することになり、研磨テープ510の片当たりを防止できる。
【選択図】図6
Description
200…テーブル
300…X軸フレーム
400…X軸スライダ
500…研磨装置
510…研磨テープ
510d…研磨面
510e…平滑面
521…押圧シャフト
521a…ベース部材
521b…研磨ヘッド
521c…揺動軸
521f…半球状突起
521g…円筒状空間
521h…シャフト
521i…コイルばね
560…テープ移送手段
600…制御装置
α…微小突起
BS…基板
Claims (6)
- 研磨テープを研磨対象物に対して押圧する研磨ヘッドであって、ベース部材の下部に対し、前記研磨テープの幅方向に直交する方向を軸として揺動可能に取り付けたことを特徴とする研磨ヘッド。
- 前記研磨ヘッドの研磨テープを押圧する押圧部を、前記研磨テープの幅方向を軸とする半円柱状に形成したことを特徴とする請求項1記載の研磨ヘッド。
- 前記研磨ヘッドの研磨テープを押圧する押圧部を、前記研磨テープの幅方向に複数に分割して設けたことを特徴とする請求項1又は2記載の研磨ヘッド。
- 前記研磨ヘッドの研磨テープを押圧する押圧部を、前記研磨テープの幅方向に並べた複数の半球状突起で構成したことを特徴とする請求項1記載の研磨ヘッド。
- 前記複数の押圧部のうちの少なくとも1つを、前記研磨テープに対して離接する方向に移動可能に前記研磨ヘッドに支持し、かつ、前記移動可能に支持した押圧部を、前記研磨テープに向けて付勢する弾性部材を備えたことを特徴とする請求項3又は4記載の研磨ヘッド。
- 請求項1〜5のいずれか1つに記載の研磨ヘッドと、
前記研磨ヘッドに巻き掛けた研磨テープを移送させるテープ移送手段と、
を備えると共に、
前記研磨テープが、研磨面を挟んで幅方向両端に平滑面を備え、かつ、前記研磨面が、前記平滑面と同一面であるか、又は、前記平滑面よりも凹んでいることを特徴とする研磨装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010024532A JP5555865B2 (ja) | 2010-02-05 | 2010-02-05 | 研磨装置 |
PCT/JP2011/051248 WO2011096292A1 (ja) | 2010-02-05 | 2011-01-24 | 研磨ヘッド及び研磨装置 |
TW100103807A TWI499479B (zh) | 2010-02-05 | 2011-02-01 | 研磨裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010024532A JP5555865B2 (ja) | 2010-02-05 | 2010-02-05 | 研磨装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011161534A true JP2011161534A (ja) | 2011-08-25 |
JP5555865B2 JP5555865B2 (ja) | 2014-07-23 |
Family
ID=44355293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010024532A Expired - Fee Related JP5555865B2 (ja) | 2010-02-05 | 2010-02-05 | 研磨装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5555865B2 (ja) |
TW (1) | TWI499479B (ja) |
WO (1) | WO2011096292A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102601711B (zh) * | 2012-03-20 | 2014-10-08 | 友达光电(苏州)有限公司 | 板体研磨装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62130860U (ja) * | 1986-02-07 | 1987-08-18 | ||
JPH058163A (ja) * | 1991-07-02 | 1993-01-19 | Sanshin:Kk | 軸状部材研磨装置 |
JPH05329760A (ja) * | 1992-05-29 | 1993-12-14 | Sanshin:Kk | ガラス基板角縁面研磨装置 |
JP2003011050A (ja) * | 2001-07-03 | 2003-01-15 | Nissan Motor Co Ltd | 表面加工装置及びこれを用いた凹凸形成方法 |
JP2007105858A (ja) * | 2005-10-17 | 2007-04-26 | Amitec Corp | サンディングマシン |
JP2008213049A (ja) * | 2007-02-28 | 2008-09-18 | V Technology Co Ltd | 微小突起研磨装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2674213B2 (ja) * | 1989-06-06 | 1997-11-12 | 日立電子エンジニアリング株式会社 | ディスク研摩装置 |
JPH05111870A (ja) * | 1991-10-21 | 1993-05-07 | Tokiwa Kogyo Kk | 倣いベルトサンダ |
JPH11285958A (ja) * | 1998-04-03 | 1999-10-19 | Toyota Motor Corp | 研摩装置 |
-
2010
- 2010-02-05 JP JP2010024532A patent/JP5555865B2/ja not_active Expired - Fee Related
-
2011
- 2011-01-24 WO PCT/JP2011/051248 patent/WO2011096292A1/ja active Application Filing
- 2011-02-01 TW TW100103807A patent/TWI499479B/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62130860U (ja) * | 1986-02-07 | 1987-08-18 | ||
JPH058163A (ja) * | 1991-07-02 | 1993-01-19 | Sanshin:Kk | 軸状部材研磨装置 |
JPH05329760A (ja) * | 1992-05-29 | 1993-12-14 | Sanshin:Kk | ガラス基板角縁面研磨装置 |
JP2003011050A (ja) * | 2001-07-03 | 2003-01-15 | Nissan Motor Co Ltd | 表面加工装置及びこれを用いた凹凸形成方法 |
JP2007105858A (ja) * | 2005-10-17 | 2007-04-26 | Amitec Corp | サンディングマシン |
JP2008213049A (ja) * | 2007-02-28 | 2008-09-18 | V Technology Co Ltd | 微小突起研磨装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2011096292A1 (ja) | 2011-08-11 |
TW201206625A (en) | 2012-02-16 |
JP5555865B2 (ja) | 2014-07-23 |
TWI499479B (zh) | 2015-09-11 |
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