JP2011159780A - 半導体装置およびその製造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 238000005304 joining Methods 0.000 claims description 55
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 9
- 230000007774 longterm Effects 0.000 abstract description 7
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- 229910000679 solder Inorganic materials 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 239000011889 copper foil Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 230000009467 reduction Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
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Abstract
【解決手段】超音波接合ツールによって絶縁基板14の配線パターンに接合される外部接続端子18,20の接合端部18c,20aをビッカース硬度で90以上の硬度にする。複数の接合端部18cがバー18aに一体に設けられた外部接続端子18については、バー18aの長さ方向の略中央に位置する接合端部18cを最初に接合し、その後は、両端に向かって交互に接合していく。接合端部18c,20aを硬くしたことにより、超音波接合部の強度が増し、また、複数の接合端部18cを有する外部接続端子18は、その中央のものから接合していくことで両端側における接合端部18cの正規位置からのずれを小さく抑えることができるので、接合強度を高く維持できる。
【選択図】図1
Description
図1は本発明の実施の形態に係る半導体装置の内部を示す斜視図、図2は外部接続端子の超音波接合動作を示す説明図である。
硬度が高められた外部接続端子18,20の接合端部18c,20aは、図2に示したように、絶縁基板14の配線パターン14bに超音波接合される。すなわち、外部接続端子18,20は、治具により保持された状態で接合端部18c,20aが絶縁基板14の配線パターン14bに当接するまで降下され、接合端部18c,20aの上に超音波接合ツール24が配置される。超音波接合ツール24は、接合端部18c,20aと配線パターン14bとの接合界面に対して約500ニュートンの垂直な荷重を加えながら、19.15キロヘルツの周波数、約50マイクロメートルの振幅の超音波振動を、水平方向に500ミリ秒間加えることにより超音波接合が行われる。
12 ベースプレート
14 絶縁基板
14a 絶縁部材
14b,14b1〜14b5 配線パターン
14c 銅箔
16 パワー半導体チップ
18 外部接続端子
18a バー
18b 端子部
18c,18c1〜18c5 接合端部
20 外部接続端子
20a 接合端部
22 はんだ
24 超音波接合ツール
Claims (4)
- 絶縁基板にパワー半導体チップが搭載され、外部接続端子を前記絶縁基板に形成された配線パターンに超音波接合にて接合することにより構成される半導体装置において、
前記外部接続端子は、前記配線パターンに接合される少なくとも接合端部の硬度を、ビッカース硬度で少なくとも90にした銅であることを特徴とする半導体装置。 - 前記外部接続端子は、帯状のバーと、前記バーの幅方向の一方より延出された少なくとも1つの端子部と、前記バーの幅方向の他方より延出され前記バーの長さ方向に複数設けられた前記接合端部とが一体に形成され、前記外部接続端子の全体または前記接合端部を含む一部が硬化処理されている請求項1記載の半導体装置。
- 絶縁基板にパワー半導体チップが搭載され、外部接続端子を前記絶縁基板に形成された配線パターンに超音波接合にて接合することにより構成される半導体装置の製造方法において、
ビッカース硬度で少なくとも90の硬度を有する接合端部が同一方向に複数配置された銅の前記外部接続端子を前記絶縁基板上の前記配線パターンに接合するとき、複数の前記接合端部のうち、略中央に配置されている1つを最初に接合し、その後は、両端に向かって交互に1つずつ接合していくことを特徴とする半導体装置の製造方法。 - 前記超音波接合は、厚さが1.0ミリメートルの前記接合端部に対し、接合界面に垂直な約500ニュートンの荷重を加えながら、19.15キロヘルツの周波数、約50マイクロメートルの振幅の超音波振動を、水平方向に500ミリ秒間加えることにより行われることを特徴とする請求項3記載の半導体装置の製造方法。
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JP2010019964A JP5672707B2 (ja) | 2010-02-01 | 2010-02-01 | 半導体装置の製造方法 |
US12/879,940 US8395262B2 (en) | 2010-02-01 | 2010-09-10 | Semiconductor device and method for manufacturing the same |
US13/762,901 US8860220B2 (en) | 2010-02-01 | 2013-02-08 | Semiconductor device and method for manufacturing the same |
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Cited By (4)
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JP2013051366A (ja) * | 2011-08-31 | 2013-03-14 | Hitachi Ltd | パワーモジュール及びその製造方法 |
JP2015185561A (ja) * | 2014-03-20 | 2015-10-22 | 三菱電機株式会社 | 半導体装置 |
JP2015198250A (ja) * | 2014-03-31 | 2015-11-09 | ゼミクロン エレクトローニク ゲーエムベーハー ウント コンパニー カーゲー | 接続要素を溶接によってパワー半導体モジュールの基板に接続する装置及びそれに関連する方法 |
WO2022249951A1 (ja) * | 2021-05-26 | 2022-12-01 | 三菱電機株式会社 | パワー半導体装置及び電力変換装置 |
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JP5672707B2 (ja) * | 2010-02-01 | 2015-02-18 | 富士電機株式会社 | 半導体装置の製造方法 |
KR101278393B1 (ko) * | 2010-11-01 | 2013-06-24 | 삼성전기주식회사 | 파워 패키지 모듈 및 그의 제조방법 |
US9224665B2 (en) * | 2011-08-04 | 2015-12-29 | Mitsubishi Electric Corporation | Semiconductor device and method for producing the same |
DE102013211405B4 (de) * | 2013-06-18 | 2020-06-04 | Infineon Technologies Ag | Verfahren zur herstellung eines halbleitermoduls |
JP6665664B2 (ja) * | 2016-04-27 | 2020-03-13 | 富士電機株式会社 | 半導体装置及びその製造方法 |
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JP2013051366A (ja) * | 2011-08-31 | 2013-03-14 | Hitachi Ltd | パワーモジュール及びその製造方法 |
JP2015185561A (ja) * | 2014-03-20 | 2015-10-22 | 三菱電機株式会社 | 半導体装置 |
JP2015198250A (ja) * | 2014-03-31 | 2015-11-09 | ゼミクロン エレクトローニク ゲーエムベーハー ウント コンパニー カーゲー | 接続要素を溶接によってパワー半導体モジュールの基板に接続する装置及びそれに関連する方法 |
WO2022249951A1 (ja) * | 2021-05-26 | 2022-12-01 | 三菱電機株式会社 | パワー半導体装置及び電力変換装置 |
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US8860220B2 (en) | 2014-10-14 |
US20130244380A1 (en) | 2013-09-19 |
US20110186999A1 (en) | 2011-08-04 |
JP5672707B2 (ja) | 2015-02-18 |
US8395262B2 (en) | 2013-03-12 |
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