JP2011107034A - リークディテクタ - Google Patents
リークディテクタ Download PDFInfo
- Publication number
- JP2011107034A JP2011107034A JP2009264064A JP2009264064A JP2011107034A JP 2011107034 A JP2011107034 A JP 2011107034A JP 2009264064 A JP2009264064 A JP 2009264064A JP 2009264064 A JP2009264064 A JP 2009264064A JP 2011107034 A JP2011107034 A JP 2011107034A
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- JP
- Japan
- Prior art keywords
- test
- leak
- exhaust pipe
- helium
- leak detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
Abstract
【解決手段】 ヘリウムガスを用いて試験体からの微小なリークの有無を検知する本発明のリークディテクタ10は、試験体TPが配置される真空チャンバ1から真空ポンプ6に通じる排気管5内に挿設され、この排気管内の流線方向に対して開口する開口部16aを備えたガイド管16を有する。そして、ヘリウムを検知する質量分析管11を、開閉弁V3を介して上記ガイド管に接続して構成する。
【選択図】 図2
Description
Claims (3)
- ヘリウムガスを用いて試験体からの微小なリークの有無を検知するリークディテクタであって、
試験体が配置される真空チャンバから真空ポンプに通じる排気管内に挿設され、この排気管内の流線方向に対して開口する開口部を備えたガイド管と、このガイド管に開閉弁を介して接続され、ヘリウムを検知する質量分析管とを備えたことを特徴とするリークディテクタ。 - 前記ガイド管は所定長さの筒部を有し、この筒部が前記排気管に同心に配置されていることを特徴とする請求項1記載のリークディテクタ。
- 前記筒部の開口部がその端部に向かって拡径されていることを特徴とする請求項2記載のリークディテクタ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009264064A JP5292261B2 (ja) | 2009-11-19 | 2009-11-19 | リークディテクタ |
MYPI2010000491A MY156348A (en) | 2009-11-19 | 2010-01-29 | Leak detector |
US12/696,377 US20110113861A1 (en) | 2009-11-19 | 2010-01-29 | Leak detector and method of detecting leak |
KR1020100011947A KR20110055334A (ko) | 2009-11-19 | 2010-02-09 | 리크 디텍터 및 누설 검출 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009264064A JP5292261B2 (ja) | 2009-11-19 | 2009-11-19 | リークディテクタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011107034A true JP2011107034A (ja) | 2011-06-02 |
JP5292261B2 JP5292261B2 (ja) | 2013-09-18 |
Family
ID=44010296
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009264064A Active JP5292261B2 (ja) | 2009-11-19 | 2009-11-19 | リークディテクタ |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110113861A1 (ja) |
JP (1) | JP5292261B2 (ja) |
KR (1) | KR20110055334A (ja) |
MY (1) | MY156348A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101377718B1 (ko) * | 2013-11-12 | 2014-03-24 | 윤중호 | 가스 누출 검출장치 |
WO2015072745A1 (ko) * | 2013-11-12 | 2015-05-21 | 윤중호 | 가스 누출 검출장치 |
JP2017072414A (ja) * | 2015-10-05 | 2017-04-13 | 日産自動車株式会社 | 検査方法及び検査装置 |
WO2018003977A1 (ja) * | 2016-06-30 | 2018-01-04 | 株式会社キッツ | バルブ用耐圧検査装置とその検査方法並びに水素ガス検出ユニット |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2592408B1 (en) * | 2010-07-05 | 2018-06-20 | Yamaguchi University | Leakage inspection device and leakage inspection method |
US8950242B1 (en) * | 2011-11-09 | 2015-02-10 | The Boeing Company | Testing hoses at increased pressure vessels |
DE102012220108A1 (de) * | 2012-11-05 | 2014-05-22 | Inficon Gmbh | Verfahren zur Prüfung einer Dichtheitsprüfanlage |
CN104713684B (zh) * | 2013-12-17 | 2017-08-25 | 上海航天设备制造总厂 | 蓄压器的超低温检漏试验方法 |
DE102015005833A1 (de) * | 2015-05-07 | 2016-11-10 | Sartorius Stedim Biotech Gmbh | Verfahren und Vorrichtung für einen Integritätstest eines Testbehälters |
JP6708191B2 (ja) * | 2017-09-21 | 2020-06-10 | 株式会社デンソー | 漏れ検査装置及び漏れ検査方法 |
JP7209992B2 (ja) * | 2018-03-19 | 2023-01-23 | 伸和コントロールズ株式会社 | 三方弁装置のリークの有無を検査する検査装置及び検査方法 |
CN111272348B (zh) * | 2019-11-08 | 2023-05-09 | 中国电力科学研究院有限公司 | 一种gil硬质扣罩氦质谱真空动态检漏的试验装置及方法 |
CN113063551B (zh) * | 2021-04-14 | 2023-08-15 | 建投邢台热电有限责任公司 | 热管式低温省煤器泄漏管束数量判断装置及方法 |
CN114321720B (zh) * | 2022-01-06 | 2023-12-19 | 上海三井光中真空设备股份有限公司 | 一种加速器光束线快阀控制系统 |
CN114646432B (zh) * | 2022-03-24 | 2023-02-17 | 苏州中科科美科技有限公司 | 一种构件分区检漏箱体组件、联合组件、检漏系统、检漏方法 |
CN114608763B (zh) * | 2022-03-24 | 2023-01-24 | 苏州中科科美科技有限公司 | 抽真空-检漏组件、整体检测容器组件、检漏设备以及检漏方法 |
KR102492815B1 (ko) * | 2022-04-07 | 2023-01-26 | 이흥열 | 헬륨 분사장치와 리크 디텍터를 이용한 리크 검사 방법 및 이를 포함한 반도체 장비 리퍼비시 방법 |
KR102492814B1 (ko) * | 2022-04-07 | 2023-01-26 | 이흥열 | 헬륨 분사장치를 이용한 리크 검사 방법 및 이를 포함한 반도체 장비 리퍼비시 방법 |
CN117030144B (zh) * | 2023-10-09 | 2024-02-06 | 西安核设备有限公司 | 一种格架氦检漏方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3390011B2 (ja) * | 1994-03-24 | 2003-03-24 | バルツァース ウント ライボルト ドイチュラント ホールディング アクチエンゲゼルシャフト | テストガス・漏洩探知機 |
JP3817916B2 (ja) * | 1998-08-03 | 2006-09-06 | 株式会社島津製作所 | リークテスト装置 |
Family Cites Families (7)
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US3888111A (en) * | 1973-11-21 | 1975-06-10 | Gen Motors Corp | Sealed beam headlamp unit leak detection system |
US5386717A (en) * | 1991-02-08 | 1995-02-07 | Yamaha Corporation | Gas leakage testing method |
JPH0674855A (ja) * | 1992-07-08 | 1994-03-18 | Hitachi Bill Shisetsu Eng Kk | 真空漏洩検出方法、および同装置 |
US5417105A (en) * | 1994-02-18 | 1995-05-23 | Hughes Aircraft Company | Flow accelerator for leak detector probe |
US6286362B1 (en) * | 1999-03-31 | 2001-09-11 | Applied Materials, Inc. | Dual mode leak detector |
DE102006056215A1 (de) * | 2006-11-29 | 2008-06-05 | Inficon Gmbh | Schnüffellecksuchgerät |
WO2009076287A2 (en) * | 2007-12-07 | 2009-06-18 | Integrated Sensing Systems, Inc. | System and method of assessing a property of a flowing fluid |
-
2009
- 2009-11-19 JP JP2009264064A patent/JP5292261B2/ja active Active
-
2010
- 2010-01-29 MY MYPI2010000491A patent/MY156348A/en unknown
- 2010-01-29 US US12/696,377 patent/US20110113861A1/en not_active Abandoned
- 2010-02-09 KR KR1020100011947A patent/KR20110055334A/ko not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3390011B2 (ja) * | 1994-03-24 | 2003-03-24 | バルツァース ウント ライボルト ドイチュラント ホールディング アクチエンゲゼルシャフト | テストガス・漏洩探知機 |
JP3817916B2 (ja) * | 1998-08-03 | 2006-09-06 | 株式会社島津製作所 | リークテスト装置 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101377718B1 (ko) * | 2013-11-12 | 2014-03-24 | 윤중호 | 가스 누출 검출장치 |
WO2015072745A1 (ko) * | 2013-11-12 | 2015-05-21 | 윤중호 | 가스 누출 검출장치 |
JP2017072414A (ja) * | 2015-10-05 | 2017-04-13 | 日産自動車株式会社 | 検査方法及び検査装置 |
WO2018003977A1 (ja) * | 2016-06-30 | 2018-01-04 | 株式会社キッツ | バルブ用耐圧検査装置とその検査方法並びに水素ガス検出ユニット |
JPWO2018003977A1 (ja) * | 2016-06-30 | 2018-11-15 | 株式会社キッツ | バルブ用耐圧検査装置とその検査方法並びに水素ガス検出ユニットとバルブ |
CN109313100A (zh) * | 2016-06-30 | 2019-02-05 | 株式会社开滋 | 阀用耐压检查装置和其检查方法、以及氢气检测单元 |
US11162914B2 (en) | 2016-06-30 | 2021-11-02 | Kitz Corporation | Pressure-resistance inspection apparatus for valves and its inspection method, and hydrogen gas detection unit |
CN109313100B (zh) * | 2016-06-30 | 2021-12-21 | 株式会社开滋 | 阀用耐压检查装置和其检查方法、以及氢气检测单元 |
CN114018497A (zh) * | 2016-06-30 | 2022-02-08 | 株式会社开滋 | 阀用耐压检查装置和其检查方法、以及氢气检测单元 |
CN114018497B (zh) * | 2016-06-30 | 2024-03-26 | 株式会社开滋 | 阀用耐压检查装置和其检查方法、以及氢气检测单元 |
Also Published As
Publication number | Publication date |
---|---|
KR20110055334A (ko) | 2011-05-25 |
US20110113861A1 (en) | 2011-05-19 |
JP5292261B2 (ja) | 2013-09-18 |
MY156348A (en) | 2016-02-15 |
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