JP2011099756A5 - - Google Patents

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Publication number
JP2011099756A5
JP2011099756A5 JP2009254452A JP2009254452A JP2011099756A5 JP 2011099756 A5 JP2011099756 A5 JP 2011099756A5 JP 2009254452 A JP2009254452 A JP 2009254452A JP 2009254452 A JP2009254452 A JP 2009254452A JP 2011099756 A5 JP2011099756 A5 JP 2011099756A5
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JP
Japan
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light
wavelength
polarization direction
reference wavelength
phase
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JP2009254452A
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English (en)
Japanese (ja)
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JP5489658B2 (ja
JP2011099756A (ja
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Priority to JP2009254452A priority Critical patent/JP5489658B2/ja
Priority claimed from JP2009254452A external-priority patent/JP5489658B2/ja
Priority to US12/910,250 priority patent/US8559015B2/en
Publication of JP2011099756A publication Critical patent/JP2011099756A/ja
Publication of JP2011099756A5 publication Critical patent/JP2011099756A5/ja
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JP2009254452A 2009-11-05 2009-11-05 計測装置 Expired - Fee Related JP5489658B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009254452A JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置
US12/910,250 US8559015B2 (en) 2009-11-05 2010-10-22 Measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009254452A JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置

Publications (3)

Publication Number Publication Date
JP2011099756A JP2011099756A (ja) 2011-05-19
JP2011099756A5 true JP2011099756A5 (https=) 2012-12-20
JP5489658B2 JP5489658B2 (ja) 2014-05-14

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JP2009254452A Expired - Fee Related JP5489658B2 (ja) 2009-11-05 2009-11-05 計測装置

Country Status (2)

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US (1) US8559015B2 (https=)
JP (1) JP5489658B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012251828A (ja) * 2011-06-01 2012-12-20 Canon Inc 波長走査干渉計
JP2013181780A (ja) * 2012-02-29 2013-09-12 Canon Inc 計測装置及び物品の製造方法
JP2014206419A (ja) 2013-04-11 2014-10-30 キヤノン株式会社 計測装置、それを用いた物品の製造方法
KR102144541B1 (ko) * 2014-05-08 2020-08-18 주식회사 히타치엘지 데이터 스토리지 코리아 2방향 거리 검출 장치
AU2016333145B2 (en) * 2015-09-28 2020-04-02 Baraja Pty Ltd Spatial profiling system and method
CN105655267A (zh) * 2016-01-04 2016-06-08 京东方科技集团股份有限公司 一种用于对基板进行检测的预警系统及生产设备
KR20190079679A (ko) 2016-11-16 2019-07-05 바라자 피티와이 엘티디 광학 빔 지향기
WO2024132990A1 (de) * 2022-12-20 2024-06-27 Attocube Systems Ag System und verfahren zum interferometrischen messen eines abstands

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Publication number Priority date Publication date Assignee Title
JPS62240801A (ja) * 1986-04-14 1987-10-21 Hoya Corp 光路長差測定装置
JP2808136B2 (ja) * 1989-06-07 1998-10-08 キヤノン株式会社 測長方法及び装置
JPH03257353A (ja) * 1990-03-08 1991-11-15 Yokogawa Electric Corp 空気の屈折率測定装置
JP2725434B2 (ja) 1990-03-30 1998-03-11 横河電機株式会社 Ｆｍヘテロダイン法を用いたアブソリュート測長方法およびアブソリュート測長器
JPH0466804A (ja) * 1990-07-06 1992-03-03 Yokogawa Electric Corp アブソリュート測長器
JPH06117810A (ja) * 1991-05-28 1994-04-28 Yokogawa Electric Corp 外乱補正機能付きアブソリュ−ト測長器
JPH05203408A (ja) * 1991-11-26 1993-08-10 Olympus Optical Co Ltd 位相差検出器
DE4314486C2 (de) 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
JPH1144503A (ja) * 1997-07-28 1999-02-16 Nikon Corp 光波干渉測定装置
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6051835A (en) * 1998-01-07 2000-04-18 Bio-Rad Laboratories, Inc. Spectral imaging apparatus and methodology
US6208424B1 (en) * 1998-08-27 2001-03-27 Zygo Corporation Interferometric apparatus and method for measuring motion along multiple axes
US6417927B2 (en) * 1999-04-28 2002-07-09 Zygo Corporation Method and apparatus for accurately compensating both long and short term fluctuations in the refractive index of air in an interferometer
US6724486B1 (en) * 1999-04-28 2004-04-20 Zygo Corporation Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry
JP3510569B2 (ja) * 2000-06-22 2004-03-29 三菱重工業株式会社 光周波数変調方式距離計
JP2005300250A (ja) * 2004-04-08 2005-10-27 Canon Inc 光干渉測定装置、光干渉測定方法、光学素子、及び露光装置
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US7697195B2 (en) * 2006-05-25 2010-04-13 Zygo Corporation Apparatus for reducing wavefront errors in output beams of acousto-optic devices
KR100951618B1 (ko) * 2008-02-19 2010-04-09 한국과학기술원 광주파수 발생기를 이용한 절대거리 측정방법 및 시스템

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