CN101923051B - 基于阵列波导分光的红外光谱式mems气敏传感器 - Google Patents
基于阵列波导分光的红外光谱式mems气敏传感器 Download PDFInfo
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CN102175610A (zh) * | 2010-12-29 | 2011-09-07 | 北京邮电大学 | 一种可实现并行感知的光子晶体生化传感器阵列实现方法 |
WO2012111851A1 (ja) * | 2011-02-18 | 2012-08-23 | 日本電気株式会社 | 赤外線検知センサアレイおよび赤外線検知装置 |
CN103900988B (zh) * | 2014-04-18 | 2016-03-23 | 重庆川仪分析仪器有限公司 | 红外气体传感器气室及其红外气体传感器 |
CN104008626B (zh) * | 2014-06-11 | 2017-05-03 | 湖南大学 | 一种面向环境健康的无线便携式智能综合感知装置与系统 |
CN105928884B (zh) * | 2016-04-28 | 2019-02-01 | 西安石油大学 | 基于二维光子晶体的多种气体传感系统及其检测方法 |
CN105823749B (zh) * | 2016-05-18 | 2019-04-23 | 南京信息工程大学 | 一种基于mems的电容式红外气体传感器 |
CN106501205A (zh) * | 2017-01-03 | 2017-03-15 | 云南警官学院 | 提高三氯甲烷快速甄别准确性的装置及甄别方法 |
CN111521577B (zh) * | 2020-04-29 | 2023-06-27 | 清华大学合肥公共安全研究院 | 一种以二氧化碳峰面积为参比的红外光谱定量分析方法 |
CN112763443B (zh) * | 2020-12-02 | 2022-04-26 | 珠海格力电器股份有限公司 | 一种二氧化碳传感器、校准方法及在线检测仪 |
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Effective date of registration: 20160706 Address after: 830002, the Xinjiang Uygur Autonomous Region Urumqi economic and Technological Development Zone, 499 West Road, Longhai Kashi property building, room 628 Patentee after: Xinjiang Zhongke Silk Road Technology Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics, Chinese Academy of Sciences |
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Denomination of invention: Infrared Spectroscopic MEMS Gas Sensor Based on Array Waveguide Spectroscopy Effective date of registration: 20230925 Granted publication date: 20120523 Pledgee: Agricultural Bank of China Limited Urumqi Branch Pledgor: Xinjiang Zhongke Silk Road Technology Co.,Ltd. Registration number: Y2023980058617 |
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