CN105823749B - 一种基于mems的电容式红外气体传感器 - Google Patents
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- CN105823749B CN105823749B CN201610331591.XA CN201610331591A CN105823749B CN 105823749 B CN105823749 B CN 105823749B CN 201610331591 A CN201610331591 A CN 201610331591A CN 105823749 B CN105823749 B CN 105823749B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
- G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques
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CN106979824B (zh) * | 2017-05-10 | 2023-09-12 | 南京信息工程大学 | 一种非分光红外乙烯气体传感器及其测量方法 |
CN108012416B (zh) * | 2017-12-25 | 2020-06-02 | 江苏蓝特电路板有限公司 | 一种自供电多功能柔性电路板 |
CN110080744B (zh) * | 2019-04-30 | 2022-12-23 | 南京信息工程大学 | 基于单片集成传感器的井下探测装置及制备方法 |
CN111257268B (zh) * | 2020-03-23 | 2023-11-28 | 京东方科技集团股份有限公司 | 红外滤光装置及其制备方法、红外气体传感器 |
CN113252579A (zh) * | 2021-04-27 | 2021-08-13 | 浙江省现代农业装备设计研究院 | 一种基于设施的农业综合传感器装置及其空气参数检测方法 |
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US3162761A (en) * | 1960-06-03 | 1964-12-22 | Onera (Off Nat Aerospatiale) | Apparatus for analyzing a mixture of substances by selective absorption of infrared radiation |
JP2644400B2 (ja) * | 1991-11-05 | 1997-08-25 | 動力炉・核燃料開発事業団 | 核燃料酸化物の炭素分析方法及び炭素分析用白金ルツボ |
CN2804856Y (zh) * | 2005-06-15 | 2006-08-09 | 重庆川仪总厂有限公司重庆川仪九厂 | 二氧化硫、一氧化氮传感器的接收器 |
CN101923051A (zh) * | 2009-06-17 | 2010-12-22 | 中国科学院微电子研究所 | 基于阵列波导分光的红外光谱式mems气敏传感器 |
CN102608078A (zh) * | 2012-03-07 | 2012-07-25 | 姜培刚 | 模块化式多组分红外气体分析装置 |
CN204718954U (zh) * | 2015-06-11 | 2015-10-21 | 重庆工商大学 | 便携式红外气体分析仪红外线气体分析单元 |
CN205786303U (zh) * | 2016-05-18 | 2016-12-07 | 南京信息工程大学 | 一种基于mems的电容式红外气体传感器 |
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2016
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US3162761A (en) * | 1960-06-03 | 1964-12-22 | Onera (Off Nat Aerospatiale) | Apparatus for analyzing a mixture of substances by selective absorption of infrared radiation |
JP2644400B2 (ja) * | 1991-11-05 | 1997-08-25 | 動力炉・核燃料開発事業団 | 核燃料酸化物の炭素分析方法及び炭素分析用白金ルツボ |
CN2804856Y (zh) * | 2005-06-15 | 2006-08-09 | 重庆川仪总厂有限公司重庆川仪九厂 | 二氧化硫、一氧化氮传感器的接收器 |
CN101923051A (zh) * | 2009-06-17 | 2010-12-22 | 中国科学院微电子研究所 | 基于阵列波导分光的红外光谱式mems气敏传感器 |
CN102608078A (zh) * | 2012-03-07 | 2012-07-25 | 姜培刚 | 模块化式多组分红外气体分析装置 |
CN204718954U (zh) * | 2015-06-11 | 2015-10-21 | 重庆工商大学 | 便携式红外气体分析仪红外线气体分析单元 |
CN205786303U (zh) * | 2016-05-18 | 2016-12-07 | 南京信息工程大学 | 一种基于mems的电容式红外气体传感器 |
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一种用于气体检测MEMS电容式红外发光强度探测器;杨地委等;《仪表技术》;20110315(第3期);全文 |
基于红外热效应的电容式气体传感器研究;张正勇等;《传感器与微系统》;20110420;第30卷(第4期);全文 |
用于气体检测的MEMS电容式红外光强探测器的设计与制备技术研究;杨地委;《中国优秀硕士学位论文全文数据库 信息科技辑》;20110915(第9期);摘要,第13-14、18、32-33页,第36页倒数第1-4行,第37页、第40页倒数第4行 |
高精度红外光学气体传感器设计;周雷刚;《中国优秀硕士学位论文全文数据库 信息科技辑》;20150715(第7期);第11页倒数第1行,第12页第1-6行,第42-44页 |
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Address after: 210044 No. 219 Ningliu Road, Jiangbei New District, Nanjing City, Jiangsu Province Patentee after: NANJING University OF INFORMATION SCIENCE & TECHNOLOGY Address before: The Olympic Avenue in Jianye District of Nanjing city of Jiangsu Province, No. 69 210019 Patentee before: NANJING University OF INFORMATION SCIENCE & TECHNOLOGY |
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Effective date of registration: 20201223 Address after: No.60100 e, No.606, Jiangning New District, Nanjing, Jiangsu Province Patentee after: NANJING TIANCHENG ENVIRONMENT TECHNOLOGY ENGINEERING Co.,Ltd. Address before: 210044 No. 219 Ning six road, Jiangbei new district, Nanjing, Jiangsu Patentee before: NANJING University OF INFORMATION SCIENCE & TECHNOLOGY |