JP2011098394A5 - - Google Patents

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Publication number
JP2011098394A5
JP2011098394A5 JP2011024232A JP2011024232A JP2011098394A5 JP 2011098394 A5 JP2011098394 A5 JP 2011098394A5 JP 2011024232 A JP2011024232 A JP 2011024232A JP 2011024232 A JP2011024232 A JP 2011024232A JP 2011098394 A5 JP2011098394 A5 JP 2011098394A5
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JP
Japan
Prior art keywords
laser beam
workpiece
link
speed
axis
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Granted
Application number
JP2011024232A
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English (en)
Japanese (ja)
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JP2011098394A (ja
JP5055443B2 (ja
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Publication of JP2011098394A publication Critical patent/JP2011098394A/ja
Publication of JP2011098394A5 publication Critical patent/JP2011098394A5/ja
Application granted granted Critical
Publication of JP5055443B2 publication Critical patent/JP5055443B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2011024232A 2001-02-16 2011-02-07 メモリリンク処理用の走査ビーム経路の誤差の補正 Expired - Lifetime JP5055443B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26964601P 2001-02-16 2001-02-16
US60/269,646 2001-02-16

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007114770A Division JP4833909B2 (ja) 2001-02-16 2007-04-24 メモリリンク処理用の走査ビーム経路の誤差の補正

Publications (3)

Publication Number Publication Date
JP2011098394A JP2011098394A (ja) 2011-05-19
JP2011098394A5 true JP2011098394A5 (enrdf_load_stackoverflow) 2012-04-05
JP5055443B2 JP5055443B2 (ja) 2012-10-24

Family

ID=23028100

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2002566426A Expired - Lifetime JP4397163B2 (ja) 2001-02-16 2002-02-15 メモリリンク処理用の走査ビーム経路の誤差の補正
JP2007114770A Expired - Fee Related JP4833909B2 (ja) 2001-02-16 2007-04-24 メモリリンク処理用の走査ビーム経路の誤差の補正
JP2011024232A Expired - Lifetime JP5055443B2 (ja) 2001-02-16 2011-02-07 メモリリンク処理用の走査ビーム経路の誤差の補正

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP2002566426A Expired - Lifetime JP4397163B2 (ja) 2001-02-16 2002-02-15 メモリリンク処理用の走査ビーム経路の誤差の補正
JP2007114770A Expired - Fee Related JP4833909B2 (ja) 2001-02-16 2007-04-24 メモリリンク処理用の走査ビーム経路の誤差の補正

Country Status (8)

Country Link
JP (3) JP4397163B2 (enrdf_load_stackoverflow)
KR (1) KR100821115B1 (enrdf_load_stackoverflow)
CN (2) CN101172319A (enrdf_load_stackoverflow)
CA (1) CA2438566A1 (enrdf_load_stackoverflow)
DE (1) DE10296339T5 (enrdf_load_stackoverflow)
GB (1) GB2390699B (enrdf_load_stackoverflow)
TW (1) TW535199B (enrdf_load_stackoverflow)
WO (1) WO2002067180A1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6706999B1 (en) * 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
US7363180B2 (en) * 2005-02-15 2008-04-22 Electro Scientific Industries, Inc. Method for correcting systematic errors in a laser processing system
US7297972B2 (en) * 2005-08-26 2007-11-20 Electro Scientific Industries, Inc. Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
US8026158B2 (en) * 2007-06-01 2011-09-27 Electro Scientific Industries, Inc. Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window
US8378259B2 (en) * 2008-06-17 2013-02-19 Electro Scientific Industries, Inc. Eliminating head-to-head offsets along common chuck travel direction in multi-head laser machining systems
TWI594828B (zh) 2009-05-28 2017-08-11 伊雷克托科學工業股份有限公司 應用於雷射處理工件中的特徵的聲光偏轉器及相關雷射處理方法
JP6055414B2 (ja) * 2010-10-22 2016-12-27 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド ビームディザリング及びスカイビングのためのレーザ加工システム並びに方法
JP6636417B2 (ja) * 2013-03-15 2020-01-29 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド Ａｏｄ移動減少用ａｏｄツール整定のためのレーザシステム及び方法
US9527159B2 (en) 2013-03-15 2016-12-27 Electro Scientific Industries, Inc. Laser emission-based control of beam positioner
CN111266741A (zh) * 2018-11-19 2020-06-12 深圳市圭华智能科技有限公司 激光加工系统及激光加工方法
JP7442351B2 (ja) * 2020-03-12 2024-03-04 株式会社ディスコ レーザー加工装置
WO2022038682A1 (ja) * 2020-08-18 2022-02-24 株式会社ニコン 光学装置および加工装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1006938B (zh) * 1985-04-01 1990-02-21 索尼公司 光信息再现设备
JPH089110B2 (ja) * 1988-03-03 1996-01-31 株式会社ニコン レーザ加工装置のレーザビーム制御方法
JP2942804B2 (ja) * 1988-03-03 1999-08-30 株式会社ニコン レーザ加工装置及びレーザ加工装置のレーザビーム制御方法
DE4000166A1 (de) * 1990-01-05 1991-07-11 Hell Rudolf Dr Ing Gmbh Verfahren und einrichtung zur korrektur von positionsfehlern eines abgelenkten lichtstrahls
US5673110A (en) * 1993-01-26 1997-09-30 Phase Metrics, Inc. Multiplexed laser interferometer for non-dispersed spectrum detection in a dynamic flying height tester
JPH08195461A (ja) * 1995-01-18 1996-07-30 Hitachi Constr Mach Co Ltd ダムバー加工方法及びダムバー加工装置
US5847960A (en) * 1995-03-20 1998-12-08 Electro Scientific Industries, Inc. Multi-tool positioning system
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
JPH08316396A (ja) * 1995-05-16 1996-11-29 Hitachi Constr Mach Co Ltd ダムバー切断方法及びダムバー切断装置
JPH0970679A (ja) * 1995-09-07 1997-03-18 Nikon Corp レーザ加工装置の制御方法
CN1180221A (zh) * 1996-09-30 1998-04-29 大宇电子株式会社 控制光盘播放机的跟踪平衡装置和方法
JP3769942B2 (ja) * 1997-09-02 2006-04-26 セイコーエプソン株式会社 レーザー加工方法及び装置、並びに非導電性透明基板の回路形成方法及び装置
JPH11267873A (ja) * 1998-03-23 1999-10-05 Seiko Epson Corp レーザ光の走査光学系及びレーザ加工装置
US6088107A (en) * 1998-10-20 2000-07-11 Trw Inc. High resolution positioner
JPH11245061A (ja) * 1998-12-15 1999-09-14 Nikon Corp レーザ加工装置のレーザビーム制御方法

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