JP2011077434A5 - - Google Patents
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- Publication number
- JP2011077434A5 JP2011077434A5 JP2009229508A JP2009229508A JP2011077434A5 JP 2011077434 A5 JP2011077434 A5 JP 2011077434A5 JP 2009229508 A JP2009229508 A JP 2009229508A JP 2009229508 A JP2009229508 A JP 2009229508A JP 2011077434 A5 JP2011077434 A5 JP 2011077434A5
- Authority
- JP
- Japan
- Prior art keywords
- etching
- gan
- semiconductor layer
- etching mask
- based semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005530 etching Methods 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000001312 dry etching Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 2
- 229910052801 chlorine Inorganic materials 0.000 claims description 2
- 239000000460 chlorine Substances 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 238000007747 plating Methods 0.000 claims description 2
- 238000011109 contamination Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009229508A JP5546194B2 (ja) | 2009-10-01 | 2009-10-01 | 半導体装置の製造方法 |
| US12/893,481 US8476166B2 (en) | 2009-10-01 | 2010-09-29 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009229508A JP5546194B2 (ja) | 2009-10-01 | 2009-10-01 | 半導体装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011077434A JP2011077434A (ja) | 2011-04-14 |
| JP2011077434A5 true JP2011077434A5 (enExample) | 2012-10-18 |
| JP5546194B2 JP5546194B2 (ja) | 2014-07-09 |
Family
ID=43823503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009229508A Active JP5546194B2 (ja) | 2009-10-01 | 2009-10-01 | 半導体装置の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8476166B2 (enExample) |
| JP (1) | JP5546194B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5566803B2 (ja) * | 2010-07-21 | 2014-08-06 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
| US8993437B2 (en) * | 2011-10-27 | 2015-03-31 | Infineon Technologies Ag | Method for etching substrate |
| CN103531527B (zh) * | 2012-07-03 | 2016-07-06 | 中芯国际集成电路制造(上海)有限公司 | 金属互连结构的制作方法 |
| CN102903671A (zh) * | 2012-10-12 | 2013-01-30 | 江阴长电先进封装有限公司 | 一种新型的芯片背面硅通孔结构的成形方法 |
| US20150099358A1 (en) * | 2013-10-07 | 2015-04-09 | Win Semiconductors Corp. | Method for forming through wafer vias in semiconductor devices |
| CN104599949A (zh) * | 2014-12-30 | 2015-05-06 | 上海师范大学 | 基于SiC衬底片深刻蚀光滑表面的加工工艺 |
| JP6863574B2 (ja) * | 2017-02-22 | 2021-04-21 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
| JP2019145546A (ja) | 2018-02-16 | 2019-08-29 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
| JP7070848B2 (ja) | 2018-07-26 | 2022-05-18 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008098456A (ja) * | 2006-10-13 | 2008-04-24 | Eudyna Devices Inc | 半導体装置の製造方法 |
| US8003525B2 (en) * | 2007-06-29 | 2011-08-23 | Fujitsu Limited | Semiconductor device and method of manufacturing the same |
| JP5298559B2 (ja) * | 2007-06-29 | 2013-09-25 | 富士通株式会社 | 半導体装置及びその製造方法 |
| JP5262185B2 (ja) * | 2008-02-29 | 2013-08-14 | 富士通株式会社 | 半導体装置の製造方法 |
-
2009
- 2009-10-01 JP JP2009229508A patent/JP5546194B2/ja active Active
-
2010
- 2010-09-29 US US12/893,481 patent/US8476166B2/en active Active
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