JP2011035214A - 化合物半導体装置の製造方法 - Google Patents
化合物半導体装置の製造方法 Download PDFInfo
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
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Abstract
【解決手段】基板の上方に、第1のバンドギャップのAlxGa1-xN(0≦x<1)を含む第1の化合物半導体層を形成する。前記第1の化合物半導体層上に、前記第1のバンドギャップよりも広い第2のバンドギャップのAlyInzGa1-y-zN(0<y<1、0<y+z≦1)を含む第2の化合物半導体層を形成する。前記第2の化合物半導体層の上方に、化合物半導体積層構造を形成する。前記第1のバンドギャップと前記第2のバンドギャップとの間のエネルギを有する光を前記第1の化合物半導体層に照射しながら前記第1の化合物半導体層を除去して、前記基板を前記化合物半導体積層構造から分離する。
【選択図】図7
Description
先ず、第1の実施形態に係る化合物半導体装置の製造方法について説明する。図1は、第1の実施形態に係る化合物半導体装置の製造方法におけるウェハ上でのレイアウトを示す図である。
2GaN+6OH-+6h+→Ga2O3+N2+3H2O・・・・・(1)
Ga2O3+6OH-→2GaO3 3-+3H2O・・・・・・・・・・(2)
次に、第2の実施形態について説明する。第2の実施形態でも、図1及び図2に示すレイアウトで化合物半導体装置を製造する。図8A乃至図8Bは、第2の実施形態に係る化合物半導体装置の製造方法を工程順に示す図2中のI−I線に沿った断面図である。
次に、第3の実施形態について説明する。第1の実施形態及び第2の実施形態では、横型HEMTをトランジスタ領域101内に形成しているのに対し、第3の実施形態では、トランジスタ領域101内に縦型HEMTを形成する。図9は、横型HEMTの表面側の電極のレイアウトを示す図である。図9に示すように、個々のトランジスタ領域101には、ゲート電極29g及びソース電極29sが形成される。ドレイン電極は、裏面側に形成される。ソース電極29sは、例えば、平面視でゲート電極29gを取り囲むように配置される。一つのトランジスタ領域101内に設けられる複数の縦型HEMTのゲート電極29g同士が共通接続され、ソース電極29s同士も共通接続される。ドレイン電極は、複数の縦型HEMTにより共有される。
次に、第4の実施形態について説明する。図12は、第4の実施形態に係る化合物半導体装置の製造方法におけるウェハ上でのレイアウト及び半導体レーザの表面側の電極のレイアウトを示す図である。
次に、第5の実施形態について説明する。第5の実施形態でも、図1及び図2に示すレイアウトでトランジスタ領域101を配置する。但し、浸透溝領域102及び電極溝領域103は配置する必要がない。化合物半導体装置を製造する。図15A乃至図15Dは、第5の実施形態に係る化合物半導体装置の製造方法を工程順に示す図2中のI−I線に沿った断面図である。
基板の上方に、第1のバンドギャップのAlxGa1-xN(0≦x<1)を含む第1の化合物半導体層を形成する工程と、
前記第1の化合物半導体層上に、前記第1のバンドギャップよりも広い第2のバンドギャップのAlyInzGa1-y-zN(0<y<1、0<y+z≦1)を含む第2の化合物半導体層を形成する工程と、
前記第2の化合物半導体層の上方に、化合物半導体積層構造を形成する工程と、
前記第1のバンドギャップと前記第2のバンドギャップとの間のエネルギを有する光を前記第1の化合物半導体層に照射しながら前記第1の化合物半導体層を除去して、前記基板を前記化合物半導体積層構造から分離する工程と、
を有することを特徴とする化合物半導体装置の製造方法。
前記基板を前記化合物半導体積層構造から分離する工程の後に、前記基板よりも熱伝導率が高い第2の基板を前記化合物半導体積層構造に貼り付ける工程を有することを特徴とする付記1に記載の化合物半導体装置の製造方法。
前記基板を前記化合物半導体積層構造から分離する工程の後に、導電性基板を前記化合物半導体積層構造に貼り付ける工程を有することを特徴とする付記1に記載の化合物半導体装置の製造方法。
前記第1の化合物半導体層の除去を、水酸化カリウムを含む電解液中で行うことを特徴とする付記1乃至3のいずれか1項に記載の化合物半導体装置の製造方法。
前記第1の化合物半導体層に前記電解液よりも高い電位を付与することを特徴とする付記4に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造を形成する工程と、前記基板を前記化合物半導体積層構造から分離する工程との間に、
前記化合物半導体積層構造の上方に、前記第1の化合物半導体層に電気的に接続される導電膜を形成する工程を有することを特徴とする付記5に記載の化合物半導体装置の製造方法。
前記水酸化カリウムの濃度を0.001mol/リットル乃至10mol/リットルとし、
前記第1の化合物半導体層に前記電解液よりも2V以下高い正の電位を付与することを特徴とする付記5又は6に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造を形成する工程は、前記第2の化合物半導体層よりも格子定数が大きい第3の化合物半導体層を前記第2の化合物半導体層上に形成する工程を有することを特徴とする付記1乃至7のいずれか1項に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造を形成する工程は、
電子走行層を形成する工程と、
前記電子走行層上に電子供給層を形成する工程と、
を有することを特徴とする付記1乃至7のいずれか1項に記載の化合物半導体装置の製造方法。
前記電子走行層として、前記第2の化合物半導体層よりも格子定数が大きいものを前記第2の化合物半導体層上に形成することを特徴とする付記9に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造として、横型高電子移動度トランジスタを形成することを特徴とする付記1乃至8のいずれか1項に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造として、縦型高電子移動度トランジスタを形成することを特徴とする付記1乃至8のいずれか1項に記載の化合物半導体装置の製造方法。
前記化合物半導体積層構造として、半導体レーザを形成することを特徴とする付記1乃至8のいずれか1項に記載の化合物半導体装置の製造方法。
前記第2の化合物半導体層におけるAl及びInの総量に対するAlの割合は73原子%以上100原子%未満であることを特徴とする付記1乃至13のいずれか1項に記載の化合物半導体装置の製造方法。
前記光の波長は253nm乃至365nmであることを特徴とする付記1乃至14のいずれか1項に記載の化合物半導体装置の製造方法。
基板と、
前記基板の上方に接着された化合物半導体積層構造と、
を有することを特徴とする化合物半導体装置。
基板に接着材料を介して配置され、AlyInzGa1-y-zN(0<y<1、0<y+z≦1)を含む化合物半導体層と、
前記化合物半導体層の上方に設けられ、前記化合物半導体層とは組成の異なる窒化物半導体層と、
を有することを特徴とする化合物半導体装置。
2、22、32:犠牲層
3、23、33:エッチングストッパ層
15:放熱基板
17:導電性基板
71:槽
72:KOH溶液
73:直流電源
74:電極端子
101:トランジスタ領域
102:浸透溝領域
103:電極溝領域
104:レーザ領域
Claims (10)
- 基板の上方に、第1のバンドギャップのAlxGa1-xN(0≦x<1)を含む第1の化合物半導体層を形成する工程と、
前記第1の化合物半導体層上に、前記第1のバンドギャップよりも広い第2のバンドギャップのAlyInzGa1-y-zN(0<y<1、0<y+z≦1)を含む第2の化合物半導体層を形成する工程と、
前記第2の化合物半導体層の上方に、化合物半導体積層構造を形成する工程と、
前記第1のバンドギャップと前記第2のバンドギャップとの間のエネルギを有する光を前記第1の化合物半導体層に照射しながら前記第1の化合物半導体層を除去して、前記基板を前記化合物半導体積層構造から分離する工程と、
を有することを特徴とする化合物半導体装置の製造方法。 - 前記基板を前記化合物半導体積層構造から分離する工程の後に、前記基板よりも熱伝導率が高い第2の基板を前記化合物半導体積層構造に貼り付ける工程を有することを特徴とする請求項1に記載の化合物半導体装置の製造方法。
- 前記基板を前記化合物半導体積層構造から分離する工程の後に、導電性基板を前記化合物半導体積層構造に貼り付ける工程を有することを特徴とする請求項1に記載の化合物半導体装置の製造方法。
- 前記第1の化合物半導体層の除去を、水酸化カリウムを含む電解液中で行うことを特徴とする請求項1乃至3のいずれか1項に記載の化合物半導体装置の製造方法。
- 前記第1の化合物半導体層に前記電解液よりも高い電位を付与することを特徴とする請求項4に記載の化合物半導体装置の製造方法。
- 前記化合物半導体積層構造を形成する工程と、前記基板を前記化合物半導体積層構造から分離する工程との間に、
前記化合物半導体積層構造の上方に、前記第1の化合物半導体層に電気的に接続される導電膜を形成する工程を有することを特徴とする請求項5に記載の化合物半導体装置の製造方法。 - 前記水酸化カリウムの濃度を0.001mol/リットル乃至10mol/リットルとし、
前記第1の化合物半導体層に前記電解液よりも2V以下高い正の電位を付与することを特徴とする請求項5又は6に記載の化合物半導体装置の製造方法。 - 前記化合物半導体積層構造を形成する工程は、前記第2の化合物半導体層よりも格子定数が大きい第3の化合物半導体層を前記第2の化合物半導体層上に形成する工程を有することを特徴とする請求項1乃至7のいずれか1項に記載の化合物半導体装置の製造方法。
- 前記化合物半導体積層構造を形成する工程は、
電子走行層を形成する工程と、
前記電子走行層上に電子供給層を形成する工程と、
を有することを特徴とする請求項1乃至7のいずれか1項に記載の化合物半導体装置の製造方法。 - 前記電子走行層として、前記第2の化合物半導体層よりも格子定数が大きいものを前記第2の化合物半導体層上に形成することを特徴とする請求項9に記載の化合物半導体装置の製造方法。
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