JP2011029401A5 - - Google Patents
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- Publication number
- JP2011029401A5 JP2011029401A5 JP2009173508A JP2009173508A JP2011029401A5 JP 2011029401 A5 JP2011029401 A5 JP 2011029401A5 JP 2009173508 A JP2009173508 A JP 2009173508A JP 2009173508 A JP2009173508 A JP 2009173508A JP 2011029401 A5 JP2011029401 A5 JP 2011029401A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- liquid
- wafers
- compartments
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 9
- 239000007788 liquid Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 2
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009173508A JP2011029401A (ja) | 2009-07-24 | 2009-07-24 | ウエハ搬送方法およびウエハ搬送装置 |
| CN201080033609.9A CN102473666B (zh) | 2009-07-24 | 2010-07-22 | 晶片输送方法和晶片输送装置 |
| PCT/JP2010/062303 WO2011010683A1 (ja) | 2009-07-24 | 2010-07-22 | ウエハ搬送方法およびウエハ搬送装置 |
| KR1020117029322A KR101370578B1 (ko) | 2009-07-24 | 2010-07-22 | 웨이퍼 반송방법 및 웨이퍼 반송장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009173508A JP2011029401A (ja) | 2009-07-24 | 2009-07-24 | ウエハ搬送方法およびウエハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011029401A JP2011029401A (ja) | 2011-02-10 |
| JP2011029401A5 true JP2011029401A5 (cg-RX-API-DMAC10.html) | 2012-07-05 |
Family
ID=43637810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009173508A Pending JP2011029401A (ja) | 2009-07-24 | 2009-07-24 | ウエハ搬送方法およびウエハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011029401A (cg-RX-API-DMAC10.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011029390A (ja) * | 2009-07-24 | 2011-02-10 | Sumitomo Metal Fine Technology Co Ltd | ウエハ搬送方法およびウエハ搬送装置 |
| JP5457113B2 (ja) * | 2009-09-14 | 2014-04-02 | 日鉄住金ファインテック株式会社 | ウエハ搬送方法およびウエハ搬送装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3377161B2 (ja) * | 1995-12-25 | 2003-02-17 | 株式会社日平トヤマ | ウエハの処理システム |
| JPH09326375A (ja) * | 1996-06-04 | 1997-12-16 | Mitsubishi Materials Corp | ウェハの洗浄方法および装置 |
| JP3668336B2 (ja) * | 1996-08-13 | 2005-07-06 | 三菱住友シリコン株式会社 | 半導体ウェーハの搬送装置 |
| JP2002254378A (ja) * | 2001-02-22 | 2002-09-10 | Hiroshi Akashi | 液中ワーク取り出し装置 |
| CN101652849B (zh) * | 2006-12-19 | 2011-09-14 | Rec斯坎沃佛股份有限公司 | 用于分离硅晶片的方法和设备 |
| JP2011029390A (ja) * | 2009-07-24 | 2011-02-10 | Sumitomo Metal Fine Technology Co Ltd | ウエハ搬送方法およびウエハ搬送装置 |
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2009
- 2009-07-24 JP JP2009173508A patent/JP2011029401A/ja active Pending