JP2011020241A - 研磨加工方法 - Google Patents
研磨加工方法 Download PDFInfo
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- JP2011020241A JP2011020241A JP2009169899A JP2009169899A JP2011020241A JP 2011020241 A JP2011020241 A JP 2011020241A JP 2009169899 A JP2009169899 A JP 2009169899A JP 2009169899 A JP2009169899 A JP 2009169899A JP 2011020241 A JP2011020241 A JP 2011020241A
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- polishing
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009169899A JP2011020241A (ja) | 2009-07-21 | 2009-07-21 | 研磨加工方法 |
Applications Claiming Priority (1)
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JP2009169899A JP2011020241A (ja) | 2009-07-21 | 2009-07-21 | 研磨加工方法 |
Publications (2)
Publication Number | Publication Date |
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JP2011020241A true JP2011020241A (ja) | 2011-02-03 |
JP2011020241A5 JP2011020241A5 (th) | 2012-09-06 |
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JP2009169899A Pending JP2011020241A (ja) | 2009-07-21 | 2009-07-21 | 研磨加工方法 |
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JP (1) | JP2011020241A (th) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013006267A (ja) * | 2011-05-24 | 2013-01-10 | Canon Inc | 被加工物の加工方法 |
WO2013035709A1 (en) * | 2011-09-05 | 2013-03-14 | Canon Kabushiki Kaisha | Processing apparatus and optical member manufacturing method |
CN104191370A (zh) * | 2014-09-09 | 2014-12-10 | 成都精密光学工程研究中心 | 全口径抛光中抛光盘表面形状的修正方法及装置 |
CN115464501A (zh) * | 2022-09-30 | 2022-12-13 | 中国科学院国家天文台南京天文光学技术研究所 | 使用单一研抛工具、可变公转半径的面形误差加工方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0557606A (ja) * | 1991-08-30 | 1993-03-09 | Canon Inc | 研磨方法および研磨装置 |
JP2002052451A (ja) * | 2000-08-11 | 2002-02-19 | Canon Inc | 研磨方法及び光学素子及び光学素子の成形用金型 |
JP2006095622A (ja) * | 2004-09-28 | 2006-04-13 | Olympus Corp | 研磨加工方法 |
-
2009
- 2009-07-21 JP JP2009169899A patent/JP2011020241A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0557606A (ja) * | 1991-08-30 | 1993-03-09 | Canon Inc | 研磨方法および研磨装置 |
JP2002052451A (ja) * | 2000-08-11 | 2002-02-19 | Canon Inc | 研磨方法及び光学素子及び光学素子の成形用金型 |
JP2006095622A (ja) * | 2004-09-28 | 2006-04-13 | Olympus Corp | 研磨加工方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013006267A (ja) * | 2011-05-24 | 2013-01-10 | Canon Inc | 被加工物の加工方法 |
WO2013035709A1 (en) * | 2011-09-05 | 2013-03-14 | Canon Kabushiki Kaisha | Processing apparatus and optical member manufacturing method |
CN104191370A (zh) * | 2014-09-09 | 2014-12-10 | 成都精密光学工程研究中心 | 全口径抛光中抛光盘表面形状的修正方法及装置 |
CN104191370B (zh) * | 2014-09-09 | 2017-02-15 | 成都精密光学工程研究中心 | 全口径抛光中抛光盘表面形状的修正方法及装置 |
CN115464501A (zh) * | 2022-09-30 | 2022-12-13 | 中国科学院国家天文台南京天文光学技术研究所 | 使用单一研抛工具、可变公转半径的面形误差加工方法 |
CN115464501B (zh) * | 2022-09-30 | 2023-06-20 | 中国科学院国家天文台南京天文光学技术研究所 | 使用单一研抛工具、可变公转半径的面形误差加工方法 |
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