JP2011000677A - 研磨パッド - Google Patents
研磨パッド Download PDFInfo
- Publication number
- JP2011000677A JP2011000677A JP2009146015A JP2009146015A JP2011000677A JP 2011000677 A JP2011000677 A JP 2011000677A JP 2009146015 A JP2009146015 A JP 2009146015A JP 2009146015 A JP2009146015 A JP 2009146015A JP 2011000677 A JP2011000677 A JP 2011000677A
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- JP
- Japan
- Prior art keywords
- polishing
- polishing pad
- grooves
- polished
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 198
- 230000002093 peripheral effect Effects 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims description 32
- 239000006061 abrasive grain Substances 0.000 claims description 16
- 239000011230 binding agent Substances 0.000 claims description 2
- 230000003139 buffering effect Effects 0.000 claims description 2
- 230000035939 shock Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 36
- 239000004065 semiconductor Substances 0.000 description 27
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000227 grinding Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Images
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【解決手段】 被研磨物を研磨する研磨面に複数の溝が形成された研磨パッドであって、前記複数の溝のうち少なくとも一部の溝の該研磨パッドの回転方向後側のエッジ部に、被研磨物と該溝のエッジ部との衝突を緩衝する緩衝部が形成されていることを特徴とする。
【選択図】図3
Description
10 研磨ユニット
26〜26C 研磨パッド
28 保持テーブル(チャックテーブル)
50 半導体ウエーハ
52 緩衝層
54 研磨液供給貫通孔
56 研磨層
56a 研磨面
58 放射状溝
60 同心状円形溝
62 緩衝部
64 研磨液供給源
Claims (4)
- 被研磨物を研磨する研磨面に複数の溝が形成された研磨パッドであって、
前記複数の溝のうち少なくとも一部の溝の該研磨パッドの回転方向後側のエッジ部に、被研磨物と該溝のエッジ部との衝突を緩衝する緩衝部が形成されていることを特徴とする研磨パッド。 - 前記複数の溝は、放射状、同心円状、格子状、又はシリンドリカル形状の少なくとも何れかの形状をしている請求項1記載の研磨パッド。
- 前記研磨パッドは、中央に研磨液供給源に接続される研磨液供給貫通孔を備え、
前記複数の溝は、一端が該研磨液供給貫通孔に連通して該研磨パッドの外周方向に延伸する複数の放射状溝と、
同心状に形成された複数の同心円形溝とを含み、
該放射状溝の他端は、少なくとも複数の該同心円形溝のうち最外周の円形溝に至るように形成され、
該各放射状溝の該研磨パッドの回転方向後側のエッジ部に前記緩衝部が形成されている請求項2記載の研磨パッド。 - 前記研磨面を画成する研磨パッドは少なくとも砥粒と、該砥粒を結合する結合材とを含んでおり、
前記緩衝部は砥粒を含有しない請求項1〜3の何れかに記載の研磨パッド。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009146015A JP5414377B2 (ja) | 2009-06-19 | 2009-06-19 | 研磨パッド |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009146015A JP5414377B2 (ja) | 2009-06-19 | 2009-06-19 | 研磨パッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011000677A true JP2011000677A (ja) | 2011-01-06 |
JP5414377B2 JP5414377B2 (ja) | 2014-02-12 |
Family
ID=43559078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009146015A Active JP5414377B2 (ja) | 2009-06-19 | 2009-06-19 | 研磨パッド |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5414377B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017519649A (ja) * | 2014-05-02 | 2017-07-20 | スリーエム イノベイティブ プロパティズ カンパニー | 断続的構造化研磨物品並びに被加工物の研磨方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06114742A (ja) * | 1992-10-09 | 1994-04-26 | Asahi Glass Co Ltd | 研磨用パッドおよびそれを用いた研磨方法 |
JPH11333699A (ja) * | 1998-03-24 | 1999-12-07 | Sony Corp | 研磨パッド、研磨装置および研磨方法 |
JP2001071256A (ja) * | 1999-08-31 | 2001-03-21 | Shinozaki Seisakusho:Kk | 研磨パッドの溝形成方法及び装置並びに研磨パッド |
JP2003145402A (ja) * | 2001-11-09 | 2003-05-20 | Nippon Electric Glass Co Ltd | ガラス物品用研磨具 |
JP2009101487A (ja) * | 2007-10-25 | 2009-05-14 | Kuraray Co Ltd | 研磨パッド |
-
2009
- 2009-06-19 JP JP2009146015A patent/JP5414377B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06114742A (ja) * | 1992-10-09 | 1994-04-26 | Asahi Glass Co Ltd | 研磨用パッドおよびそれを用いた研磨方法 |
JPH11333699A (ja) * | 1998-03-24 | 1999-12-07 | Sony Corp | 研磨パッド、研磨装置および研磨方法 |
JP2001071256A (ja) * | 1999-08-31 | 2001-03-21 | Shinozaki Seisakusho:Kk | 研磨パッドの溝形成方法及び装置並びに研磨パッド |
JP2003145402A (ja) * | 2001-11-09 | 2003-05-20 | Nippon Electric Glass Co Ltd | ガラス物品用研磨具 |
JP2009101487A (ja) * | 2007-10-25 | 2009-05-14 | Kuraray Co Ltd | 研磨パッド |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017519649A (ja) * | 2014-05-02 | 2017-07-20 | スリーエム イノベイティブ プロパティズ カンパニー | 断続的構造化研磨物品並びに被加工物の研磨方法 |
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JP5414377B2 (ja) | 2014-02-12 |
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