JP2010541196A5 - - Google Patents

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Publication number
JP2010541196A5
JP2010541196A5 JP2010525264A JP2010525264A JP2010541196A5 JP 2010541196 A5 JP2010541196 A5 JP 2010541196A5 JP 2010525264 A JP2010525264 A JP 2010525264A JP 2010525264 A JP2010525264 A JP 2010525264A JP 2010541196 A5 JP2010541196 A5 JP 2010541196A5
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JP
Japan
Prior art keywords
support
electrostatic clamp
clamp
electrode
electrostatic
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JP2010525264A
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English (en)
Japanese (ja)
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JP2010541196A (ja
JP5524845B2 (ja
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Priority claimed from US11/902,501 external-priority patent/US7940511B2/en
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Publication of JP2010541196A5 publication Critical patent/JP2010541196A5/ja
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JP2010525264A 2007-09-21 2008-09-19 静電クランプ、リソグラフィ装置および静電クランプを製造する方法 Active JP5524845B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/902,501 US7940511B2 (en) 2007-09-21 2007-09-21 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp
US11/902,501 2007-09-21
PCT/EP2008/007916 WO2009036995A1 (en) 2007-09-21 2008-09-19 Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

Publications (3)

Publication Number Publication Date
JP2010541196A JP2010541196A (ja) 2010-12-24
JP2010541196A5 true JP2010541196A5 (https=) 2011-11-04
JP5524845B2 JP5524845B2 (ja) 2014-06-18

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ID=39929545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010525264A Active JP5524845B2 (ja) 2007-09-21 2008-09-19 静電クランプ、リソグラフィ装置および静電クランプを製造する方法

Country Status (8)

Country Link
US (2) US7940511B2 (https=)
EP (1) EP2208224B1 (https=)
JP (1) JP5524845B2 (https=)
KR (1) KR101533014B1 (https=)
CN (1) CN101803001B (https=)
NL (1) NL1035888A1 (https=)
TW (1) TWI446482B (https=)
WO (1) WO2009036995A1 (https=)

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NL2007768A (en) 2010-12-14 2012-06-18 Asml Netherlands Bv Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder.
EP2490073B1 (en) * 2011-02-18 2015-09-23 ASML Netherlands BV Substrate holder, lithographic apparatus, and method of manufacturing a substrate holder
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NL2009487A (en) * 2011-10-14 2013-04-16 Asml Netherlands Bv Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder.
EP3683627A1 (en) 2012-02-03 2020-07-22 ASML Netherlands B.V. Substrate holder and lithographic apparatus
EP2839506B1 (en) 2012-02-29 2016-08-24 ASML Netherlands B.V. Electrostatic clamp
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US10002782B2 (en) 2014-10-17 2018-06-19 Lam Research Corporation ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough
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DE102018116463A1 (de) * 2018-07-06 2020-01-09 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Elektrostatische Haltevorrichtung und Verfahren zu deren Herstellung
KR102928856B1 (ko) * 2019-02-08 2026-02-20 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치에서 사용하기 위한 컴포넌트, 컴포넌트의 제조 방법, 및 리소그래피 장치에서 테이블을 보호하는 방법
DE102019108855B4 (de) * 2019-04-04 2020-11-12 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Elektrostatische Haltevorrichtung mit einer Schichtverbund-Elektrodeneinrichtung und Verfahren zu deren Herstellung
KR102859857B1 (ko) * 2019-05-24 2025-09-12 에이에스엠엘 홀딩 엔.브이. 리소그래피 장치, 기판 테이블 및 방법
WO2021095492A1 (ja) * 2019-11-15 2021-05-20 株式会社堀場エステック 流体抵抗素子及び流体制御装置
US11817293B2 (en) * 2020-01-10 2023-11-14 The Research Foundation For The State University Of New York Photoresist layers of semiconductor components including electric fields, system, and methods of forming same
US11538714B2 (en) * 2020-05-21 2022-12-27 Applied Materials, Inc. System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
US11875967B2 (en) 2020-05-21 2024-01-16 Applied Materials, Inc. System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
EP3923077A1 (en) * 2020-06-11 2021-12-15 ASML Netherlands B.V. Object holder, electrostatic sheet and method for making an electrostatic sheet
EP4002010A1 (en) * 2020-11-18 2022-05-25 ASML Netherlands B.V. Electrostatic clamp
WO2022144144A1 (en) * 2020-12-29 2022-07-07 Asml Holding N.V. Vacuum sheet bond fixturing and flexible burl applications for substrate tables
EP4053634A1 (en) 2021-03-02 2022-09-07 ASML Netherlands B.V. Substrate restraining system
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EP4105720A1 (en) * 2021-06-16 2022-12-21 ASML Netherlands B.V. Substrate holder and method
EP4386478A1 (en) 2022-12-12 2024-06-19 ASML Netherlands B.V. Apparatus and method for electrostatically clamping a substrate
KR20250123776A (ko) 2022-12-13 2025-08-18 에이에스엠엘 네델란즈 비.브이. 뒤틀린 기판을 클램핑하기 위한 진공 테이블 및 방법

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