JP2010537843A5 - - Google Patents

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Publication number
JP2010537843A5
JP2010537843A5 JP2010524112A JP2010524112A JP2010537843A5 JP 2010537843 A5 JP2010537843 A5 JP 2010537843A5 JP 2010524112 A JP2010524112 A JP 2010524112A JP 2010524112 A JP2010524112 A JP 2010524112A JP 2010537843 A5 JP2010537843 A5 JP 2010537843A5
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JP
Japan
Prior art keywords
pattern
microstructure pattern
layer
stamper
microstructure
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Pending
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JP2010524112A
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English (en)
Japanese (ja)
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JP2010537843A (ja
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Priority claimed from PCT/US2008/075021 external-priority patent/WO2009032815A1/en
Publication of JP2010537843A publication Critical patent/JP2010537843A/ja
Publication of JP2010537843A5 publication Critical patent/JP2010537843A5/ja
Pending legal-status Critical Current

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JP2010524112A 2007-09-06 2008-09-02 微細構造物品を作製するための工具 Pending JP2010537843A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US96762207P 2007-09-06 2007-09-06
PCT/US2008/075021 WO2009032815A1 (en) 2007-09-06 2008-09-02 Tool for making microstructured articles

Publications (2)

Publication Number Publication Date
JP2010537843A JP2010537843A (ja) 2010-12-09
JP2010537843A5 true JP2010537843A5 (OSRAM) 2011-10-06

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010524112A Pending JP2010537843A (ja) 2007-09-06 2008-09-02 微細構造物品を作製するための工具

Country Status (5)

Country Link
US (1) US20100308497A1 (OSRAM)
EP (1) EP2205521A4 (OSRAM)
JP (1) JP2010537843A (OSRAM)
CN (1) CN101795961B (OSRAM)
WO (1) WO2009032815A1 (OSRAM)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100080785A (ko) 2007-09-06 2010-07-12 쓰리엠 이노베이티브 프로퍼티즈 컴파니 광 출력의 영역 제어를 제공하는 광 추출 구조물을 갖는 도광체
US9102083B2 (en) 2007-09-06 2015-08-11 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
WO2009048808A1 (en) 2007-10-11 2009-04-16 3M Innovative Properties Company Chromatic confocal sensor
JP5524856B2 (ja) 2007-12-12 2014-06-18 スリーエム イノベイティブ プロパティズ カンパニー エッジ明瞭性が向上した構造の製造方法
JP5801558B2 (ja) * 2008-02-26 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー 多光子露光システム
CN101885577A (zh) * 2009-05-14 2010-11-17 鸿富锦精密工业(深圳)有限公司 压印成型微小凹透镜阵列的模仁、模压装置及方法
CN102491257A (zh) * 2011-12-28 2012-06-13 大连理工大学 一种热塑性聚合物纳米通道的制作方法
TW201325884A (zh) * 2011-12-29 2013-07-01 Hon Hai Prec Ind Co Ltd 光學薄膜壓印滾輪及該滾輪之製作方法
JP2015532323A (ja) * 2012-09-28 2015-11-09 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company イメージャブルな架橋性フルオロポリマーフィルムを配置された基材を含むイメージャブル物品、並びにそれらから作製されたイメージ化物品
US9711744B2 (en) 2012-12-21 2017-07-18 3M Innovative Properties Company Patterned structured transfer tape
JP6317247B2 (ja) * 2014-12-22 2018-04-25 富士フイルム株式会社 インプリント用モールド
RU2688736C1 (ru) 2016-02-05 2019-05-22 Хави Глобал Солюшенз, Ллк Поверхность с микроструктурами, обладающая улучшенными изоляционными свойствами и сопротивлением конденсации
US10687642B2 (en) 2016-02-05 2020-06-23 Havi Global Solutions, Llc Microstructured packaging surfaces for enhanced grip
AU2017248301B2 (en) 2016-04-07 2022-05-12 Havi Global Solutions, Llc Fluid pouch with inner microstructure
CA3028981A1 (en) * 2016-06-27 2018-01-04 Havi Global Solutions, Llc Microstructured packaging surfaces for enhanced grip
CN111032284B (zh) * 2017-08-04 2022-11-04 3M创新有限公司 具有增强的共平面性的微复制型抛光表面
US11965120B2 (en) 2018-04-05 2024-04-23 3M Innovative Properties Company Gel adhesive comprising crosslinked blend of polydiorganosiloxane and acrylic polymer
EP3877454A4 (en) 2018-11-09 2022-11-16 3M Innovative Properties Company NANOSTRUCTURED OPTICAL FILMS AND INTERMEDIATE PRODUCTS
US11766822B2 (en) 2019-08-20 2023-09-26 3M Innovative Properties Company Microstructured surface with increased microorganism removal when cleaned, articles and methods
US12434427B2 (en) 2019-08-20 2025-10-07 Solventum Intellectual Properties Company Microstructured surface with increased microorganism removal when cleaned, articles and methods
JP2022545424A (ja) 2019-08-20 2022-10-27 スリーエム イノベイティブ プロパティズ カンパニー 洗浄時の微生物除去が向上した微細構造化表面、物品、及び方法
US20230158557A1 (en) 2020-05-20 2023-05-25 3M Innovative Properties Company Medical Articles with Microstructured Surface
DE102020125484A1 (de) * 2020-09-30 2022-03-31 Lts Lohmann Therapie-Systeme Ag Verfahren zur Herstellung eines Formelements für die Herstellung von Mikroarrays sowie Formelement
EP4259415A1 (en) 2020-12-11 2023-10-18 3M Innovative Properties Company Method of thermoforming film with structured surface and articles
WO2022137063A1 (en) 2020-12-21 2022-06-30 3M Innovative Properties Company Superhydrophobic films
EP4284570A1 (en) 2021-01-28 2023-12-06 3M Innovative Properties Company Microstructured surface with increased microorganism removal when cleaned, articles and methods
US20240343550A1 (en) 2021-09-14 2024-10-17 3M Innovative Properties Company Articles including a microstructured curved surface and methods of making same
WO2024141815A1 (en) 2022-12-28 2024-07-04 3M Innovative Properties Company Multilayered articles including a uv barrier layer
WO2024213958A1 (en) 2023-04-14 2024-10-17 Solventum Intellectual Properties Company Multilayer polymer film, method, and articles suitable for thermoforming

Family Cites Families (109)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3018262A (en) * 1957-05-01 1962-01-23 Shell Oil Co Curing polyepoxides with certain metal salts of inorganic acids
US3729313A (en) * 1971-12-06 1973-04-24 Minnesota Mining & Mfg Novel photosensitive systems comprising diaryliodonium compounds and their use
US3808006A (en) * 1971-12-06 1974-04-30 Minnesota Mining & Mfg Photosensitive material containing a diaryliodium compound, a sensitizer and a color former
US3741769A (en) * 1972-10-24 1973-06-26 Minnesota Mining & Mfg Novel photosensitive polymerizable systems and their use
AU497960B2 (en) * 1974-04-11 1979-01-25 Minnesota Mining And Manufacturing Company Photopolymerizable compositions
US4250053A (en) * 1979-05-21 1981-02-10 Minnesota Mining And Manufacturing Company Sensitized aromatic iodonium or aromatic sulfonium salt photoinitiator systems
US4262072A (en) * 1979-06-25 1981-04-14 Minnesota Mining And Manufacturing Company Poly(ethylenically unsaturated alkoxy) heterocyclic protective coatings
US4249011A (en) * 1979-06-25 1981-02-03 Minnesota Mining And Manufacturing Company Poly(ethylenically unsaturated alkoxy) heterocyclic compounds
US4279717A (en) * 1979-08-03 1981-07-21 General Electric Company Ultraviolet curable epoxy silicone coating compositions
US4491628A (en) * 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
US4668601A (en) * 1985-01-18 1987-05-26 Minnesota Mining And Manufacturing Company Protective coating for phototools
US4642126A (en) * 1985-02-11 1987-02-10 Norton Company Coated abrasives with rapidly curable adhesives and controllable curvature
US4652274A (en) * 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Coated abrasive product having radiation curable binder
CA1323949C (en) * 1987-04-02 1993-11-02 Michael C. Palazzotto Ternary photoinitiator system for addition polymerization
US4859572A (en) * 1988-05-02 1989-08-22 Eastman Kodak Company Dye sensitized photographic imaging system
WO1991002992A1 (en) * 1989-08-21 1991-03-07 Amos Carl R Methods of and apparatus for manipulating electromagnetic phenomenon
JP2724232B2 (ja) * 1990-05-02 1998-03-09 株式会社日立製作所 自動焦点手段およびその自動焦点手段を用いた光ディスク装置
US5235015A (en) * 1991-02-21 1993-08-10 Minnesota Mining And Manufacturing Company High speed aqueous solvent developable photopolymer compositions
GB9121789D0 (en) * 1991-10-14 1991-11-27 Minnesota Mining & Mfg Positive-acting photothermographic materials
EP0544332B1 (en) * 1991-11-28 1997-01-29 Enplas Corporation Surface light source device
TW268969B (OSRAM) * 1992-10-02 1996-01-21 Minnesota Mining & Mfg
US5298741A (en) * 1993-01-13 1994-03-29 Trustees Of Tufts College Thin film fiber optic sensor array and apparatus for concurrent viewing and chemical sensing of a sample
US5512219A (en) * 1994-06-03 1996-04-30 Reflexite Corporation Method of casting a microstructure sheet having an array of prism elements using a reusable polycarbonate mold
US5856373A (en) * 1994-10-31 1999-01-05 Minnesota Mining And Manufacturing Company Dental visible light curable epoxy system with enhanced depth of cure
US5858624A (en) * 1996-09-20 1999-01-12 Minnesota Mining And Manufacturing Company Method for assembling planarization and indium-tin-oxide layer on a liquid crystal display color filter with a transfer process
US5922238A (en) * 1997-02-14 1999-07-13 Physical Optics Corporation Method of making replicas and compositions for use therewith
DE19713362A1 (de) * 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
US6025406A (en) * 1997-04-11 2000-02-15 3M Innovative Properties Company Ternary photoinitiator system for curing of epoxy resins
US6001297A (en) * 1997-04-28 1999-12-14 3D Systems, Inc. Method for controlling exposure of a solidfiable medium using a pulsed radiation source in building a three-dimensional object using stereolithography
US5859251A (en) * 1997-09-18 1999-01-12 The United States Of America As Represented By The Secretary Of The Air Force Symmetrical dyes with large two-photon absorption cross-sections
US5770737A (en) * 1997-09-18 1998-06-23 The United States Of America As Represented By The Secretary Of The Air Force Asymmetrical dyes with large two-photon absorption cross-sections
CA2326322C (en) * 1998-04-21 2011-03-01 University Of Connecticut Free-form nanofabrication using multi-photon excitation
US6100405A (en) * 1999-06-15 2000-08-08 The United States Of America As Represented By The Secretary Of The Air Force Benzothiazole-containing two-photon chromophores exhibiting strong frequency upconversion
US7046905B1 (en) * 1999-10-08 2006-05-16 3M Innovative Properties Company Blacklight with structured surfaces
US6288842B1 (en) * 2000-02-22 2001-09-11 3M Innovative Properties Sheeting with composite image that floats
US6696157B1 (en) * 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6560248B1 (en) * 2000-06-08 2003-05-06 Mania Barco Nv System, method and article of manufacture for improved laser direct imaging a printed circuit board utilizing a mode locked laser and scophony operation
US7381516B2 (en) * 2002-10-02 2008-06-03 3M Innovative Properties Company Multiphoton photosensitization system
WO2001096915A2 (en) * 2000-06-15 2001-12-20 3M Innovative Properties Company Microfabrication of organic optical elements
WO2001096952A2 (en) * 2000-06-15 2001-12-20 3M Innovative Properties Company Multicolor imaging using multiphoton photochemical processes
US7790353B2 (en) * 2000-06-15 2010-09-07 3M Innovative Properties Company Multidirectional photoreactive absorption method
US6852766B1 (en) * 2000-06-15 2005-02-08 3M Innovative Properties Company Multiphoton photosensitization system
DE10034737C2 (de) * 2000-07-17 2002-07-11 Fraunhofer Ges Forschung Verfahren zur Herstellung einer permanenten Entformungsschicht durch Plasmapolymerisation auf der Oberfläche eines Formteilwerkzeugs, ein nach dem Verfahren herstellbares Formteilwerkzeug und dessen Verwendung
JP4192414B2 (ja) * 2000-09-14 2008-12-10 凸版印刷株式会社 レンズシートの製造方法
ATE526135T1 (de) * 2001-03-26 2011-10-15 Novartis Ag Giessform und verfahren zur herstellung von opthalmischen linsen
JP2002307398A (ja) * 2001-04-18 2002-10-23 Mitsui Chemicals Inc マイクロ構造物の製造方法
KR100490873B1 (ko) * 2001-05-17 2005-05-23 한국과학기술연구원 초소형 렌즈 어레이 제조방법
US20030006535A1 (en) * 2001-06-26 2003-01-09 Michael Hennessey Method and apparatus for forming microstructures on polymeric substrates
DE10131156A1 (de) * 2001-06-29 2003-01-16 Fraunhofer Ges Forschung Arikel mit plasmapolymerer Beschichtung und Verfahren zu dessen Herstellung
US6804062B2 (en) * 2001-10-09 2004-10-12 California Institute Of Technology Nonimaging concentrator lens arrays and microfabrication of the same
US6948448B2 (en) * 2001-11-27 2005-09-27 General Electric Company Apparatus and method for depositing large area coatings on planar surfaces
US7887889B2 (en) * 2001-12-14 2011-02-15 3M Innovative Properties Company Plasma fluorination treatment of porous materials
US6750266B2 (en) * 2001-12-28 2004-06-15 3M Innovative Properties Company Multiphoton photosensitization system
GB2390327B (en) * 2002-07-01 2005-11-16 Essilor Int Process for making a mold piece having a main curved surface bearing a utilitary microstructure
US20030155667A1 (en) * 2002-12-12 2003-08-21 Devoe Robert J Method for making or adding structures to an article
US7478942B2 (en) * 2003-01-23 2009-01-20 Samsung Electronics Co., Ltd. Light guide plate with light reflection pattern
CN100454087C (zh) * 2003-02-28 2009-01-21 夏普株式会社 面辐射变换元件及其制造方法和液晶显示装置
JP4269745B2 (ja) * 2003-03-31 2009-05-27 株式会社日立製作所 スタンパ及び転写装置
US20040202865A1 (en) * 2003-04-08 2004-10-14 Andrew Homola Release coating for stamper
US7070406B2 (en) * 2003-04-29 2006-07-04 Hewlett-Packard Development Company, L.P. Apparatus for embossing a flexible substrate with a pattern carried by an optically transparent compliant media
ES2383689T3 (es) * 2003-09-23 2012-06-25 University Of North Carolina At Chapel Hill Perfluoropoliéteres fotocurables para su uso como materiales novedosos en dispositivos microfluídicos
WO2005044364A1 (en) * 2003-11-10 2005-05-19 Agency For Science, Technology And Research Microneedles and microneedle fabrication
EP1538482B1 (en) * 2003-12-05 2016-02-17 Obducat AB Device and method for large area lithography
US7632087B2 (en) * 2003-12-19 2009-12-15 Wd Media, Inc. Composite stamper for imprint lithography
US9040090B2 (en) * 2003-12-19 2015-05-26 The University Of North Carolina At Chapel Hill Isolated and fixed micro and nano structures and methods thereof
US20050273146A1 (en) * 2003-12-24 2005-12-08 Synecor, Llc Liquid perfluoropolymers and medical applications incorporating same
US7282324B2 (en) * 2004-01-05 2007-10-16 Microchem Corp. Photoresist compositions, hardened forms thereof, hardened patterns thereof and metal patterns formed using them
JP4879159B2 (ja) * 2004-03-05 2012-02-22 アプライド マテリアルズ インコーポレイテッド アモルファス炭素膜堆積のためのcvdプロセス
US20050254035A1 (en) * 2004-05-11 2005-11-17 Chromaplex, Inc. Multi-photon lithography
US8025831B2 (en) * 2004-05-24 2011-09-27 Agency For Science, Technology And Research Imprinting of supported and free-standing 3-D micro- or nano-structures
KR101257881B1 (ko) * 2004-05-28 2013-04-24 오브듀캇 아베 임프린트 공정용 금속 몰드
US20050272599A1 (en) * 2004-06-04 2005-12-08 Kenneth Kramer Mold release layer
JP4420746B2 (ja) * 2004-06-09 2010-02-24 リコー光学株式会社 形状転写用金型、及びその製造方法、並びにそれを用いた製品の製造方法
JP2006032423A (ja) * 2004-07-12 2006-02-02 Toshiba Corp インプリント加工用スタンパーおよびその製造方法
JP4389791B2 (ja) * 2004-08-25 2009-12-24 セイコーエプソン株式会社 微細構造体の製造方法および露光装置
JP2006165371A (ja) * 2004-12-09 2006-06-22 Canon Inc 転写装置およびデバイス製造方法
WO2006093963A1 (en) * 2005-03-02 2006-09-08 The Trustees Of Boston College Structures and methods of replicating the same
EP1856566A1 (en) * 2005-03-09 2007-11-21 3M Innovative Properties Company Microreplicated article with defect-reducing surface
KR100688866B1 (ko) * 2005-04-07 2007-03-02 삼성전기주식회사 임프린트 장치, 시스템 및 방법
US7478791B2 (en) * 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
KR100692742B1 (ko) * 2005-05-13 2007-03-09 삼성전자주식회사 도광층을 갖는 키 패드 및 키 패드 어셈블리
EP1731965B1 (en) * 2005-06-10 2012-08-08 Obducat AB Imprint stamp comprising cyclic olefin copolymer
ES2315797T3 (es) * 2005-06-10 2009-04-01 Obducat Ab Metodo de replicacion de modelo.
ATE419560T1 (de) * 2005-06-10 2009-01-15 Obducat Ab Kopieren eines musters mit hilfe eines zwischenstempels
US7326948B2 (en) * 2005-08-15 2008-02-05 Asml Netherlands B.V. Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
KR100610336B1 (ko) * 2005-09-12 2006-08-09 김형준 키패드 백라이트용 도광판 및 그 제조 방법
US7878791B2 (en) * 2005-11-04 2011-02-01 Asml Netherlands B.V. Imprint lithography
US7583444B1 (en) * 2005-12-21 2009-09-01 3M Innovative Properties Company Process for making microlens arrays and masterforms
JP4880701B2 (ja) * 2005-12-21 2012-02-22 スリーエム イノベイティブ プロパティズ カンパニー 多光子硬化反応性組成物を処理するための方法及び装置
US7545569B2 (en) * 2006-01-13 2009-06-09 Avery Dennison Corporation Optical apparatus with flipped compound prism structures
WO2007100849A2 (en) * 2006-02-27 2007-09-07 Microcontinuum, Inc. Formation of pattern replicating tools
TWM298289U (en) * 2006-03-17 2006-09-21 Hon Hai Prec Ind Co Ltd Light guide plates and electronic products using the same
US20070216049A1 (en) * 2006-03-20 2007-09-20 Heptagon Oy Method and tool for manufacturing optical elements
US8858807B2 (en) * 2006-03-24 2014-10-14 3M Innovative Properties Company Process for making microneedles, microneedle arrays, masters, and replication tools
CN101448632B (zh) * 2006-05-18 2012-12-12 3M创新有限公司 用于制备具有提取结构的光导的方法以及由此方法生产的光导
TWI322927B (en) * 2006-05-24 2010-04-01 Ind Tech Res Inst Roller module for microstructure thin film imprint
TW200745490A (en) * 2006-06-07 2007-12-16 Jeng Shiang Prec Ind Co Ltd Light guide plate
US20080007964A1 (en) * 2006-07-05 2008-01-10 Tai-Yen Lin Light guiding structure
US20080083886A1 (en) * 2006-09-14 2008-04-10 3M Innovative Properties Company Optical system suitable for processing multiphoton curable photoreactive compositions
US7551359B2 (en) * 2006-09-14 2009-06-23 3M Innovative Properties Company Beam splitter apparatus and system
US8241713B2 (en) * 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7891636B2 (en) * 2007-08-27 2011-02-22 3M Innovative Properties Company Silicone mold and use thereof
US9102083B2 (en) * 2007-09-06 2015-08-11 3M Innovative Properties Company Methods of forming molds and methods of forming articles using said molds
CN101821302A (zh) * 2007-10-11 2010-09-01 3M创新有限公司 高功能性多光子可固化反应性物质
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
JP2009155710A (ja) * 2007-12-27 2009-07-16 Tokai Rika Co Ltd 微細構造体の製造方法
JP5801558B2 (ja) * 2008-02-26 2015-10-28 スリーエム イノベイティブ プロパティズ カンパニー 多光子露光システム
US8570270B2 (en) * 2009-10-19 2013-10-29 Apple Inc. Backlight unit color compensation techniques
TWM385715U (en) * 2009-12-14 2010-08-01 Chunghwa Picture Tubes Ltd Backlight module

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