JP2010507886A5 - - Google Patents

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Publication number
JP2010507886A5
JP2010507886A5 JP2009533926A JP2009533926A JP2010507886A5 JP 2010507886 A5 JP2010507886 A5 JP 2010507886A5 JP 2009533926 A JP2009533926 A JP 2009533926A JP 2009533926 A JP2009533926 A JP 2009533926A JP 2010507886 A5 JP2010507886 A5 JP 2010507886A5
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JP
Japan
Prior art keywords
substrate
axis
drive arm
ion beam
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009533926A
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English (en)
Japanese (ja)
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JP2010507886A (ja
JP5345062B2 (ja
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Priority claimed from US11/588,432 external-priority patent/US7785060B2/en
Application filed filed Critical
Publication of JP2010507886A publication Critical patent/JP2010507886A/ja
Publication of JP2010507886A5 publication Critical patent/JP2010507886A5/ja
Application granted granted Critical
Publication of JP5345062B2 publication Critical patent/JP5345062B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009533926A 2006-10-27 2007-09-25 イオン注入装置における多方向機械的走査 Expired - Fee Related JP5345062B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/588,432 2006-10-27
US11/588,432 US7785060B2 (en) 2006-10-27 2006-10-27 Multi-directional mechanical scanning in an ion implanter
PCT/GB2007/003633 WO2008050079A1 (en) 2006-10-27 2007-09-25 Multi-directional mechanical scanning in an ion implanter

Publications (3)

Publication Number Publication Date
JP2010507886A JP2010507886A (ja) 2010-03-11
JP2010507886A5 true JP2010507886A5 (https=) 2010-10-07
JP5345062B2 JP5345062B2 (ja) 2013-11-20

Family

ID=39032338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009533926A Expired - Fee Related JP5345062B2 (ja) 2006-10-27 2007-09-25 イオン注入装置における多方向機械的走査

Country Status (6)

Country Link
US (1) US7785060B2 (https=)
JP (1) JP5345062B2 (https=)
KR (1) KR101345683B1 (https=)
DE (1) DE112007002570T5 (https=)
TW (1) TWI392053B (https=)
WO (1) WO2008050079A1 (https=)

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