JP2010243468A - 圧力検出モジュール - Google Patents

圧力検出モジュール Download PDF

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Publication number
JP2010243468A
JP2010243468A JP2009095721A JP2009095721A JP2010243468A JP 2010243468 A JP2010243468 A JP 2010243468A JP 2009095721 A JP2009095721 A JP 2009095721A JP 2009095721 A JP2009095721 A JP 2009095721A JP 2010243468 A JP2010243468 A JP 2010243468A
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JP
Japan
Prior art keywords
pressure
pressure sensor
package
lead frame
detection module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009095721A
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English (en)
Japanese (ja)
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JP2010243468A5 (enExample
Inventor
Masayuki Oto
正之 大戸
Toshinobu Sakurai
俊信 櫻井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009095721A priority Critical patent/JP2010243468A/ja
Publication of JP2010243468A publication Critical patent/JP2010243468A/ja
Publication of JP2010243468A5 publication Critical patent/JP2010243468A5/ja
Withdrawn legal-status Critical Current

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JP2009095721A 2009-04-10 2009-04-10 圧力検出モジュール Withdrawn JP2010243468A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009095721A JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009095721A JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

Publications (2)

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JP2010243468A true JP2010243468A (ja) 2010-10-28
JP2010243468A5 JP2010243468A5 (enExample) 2012-05-24

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ID=43096624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009095721A Withdrawn JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

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JP (1) JP2010243468A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015068800A (ja) * 2013-09-30 2015-04-13 セイコーエプソン株式会社 圧力センサー、電子機器および移動体
JP2018132485A (ja) * 2017-02-17 2018-08-23 アズビル株式会社 静電容量型圧力センサ
KR20210131690A (ko) * 2020-04-24 2021-11-03 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기
KR102404331B1 (ko) * 2020-12-02 2022-06-07 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196938A (ja) * 1989-01-26 1990-08-03 Aisan Ind Co Ltd 圧力センサ
JPH0495740A (ja) * 1990-08-06 1992-03-27 Toyota Autom Loom Works Ltd 半導体装置
JP2002082009A (ja) * 2000-06-30 2002-03-22 Denso Corp 圧力センサ
JP2007180201A (ja) * 2005-12-27 2007-07-12 Yamaha Corp 半導体装置
JP2008122129A (ja) * 2006-11-09 2008-05-29 Denso Corp 圧力センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196938A (ja) * 1989-01-26 1990-08-03 Aisan Ind Co Ltd 圧力センサ
JPH0495740A (ja) * 1990-08-06 1992-03-27 Toyota Autom Loom Works Ltd 半導体装置
JP2002082009A (ja) * 2000-06-30 2002-03-22 Denso Corp 圧力センサ
JP2007180201A (ja) * 2005-12-27 2007-07-12 Yamaha Corp 半導体装置
JP2008122129A (ja) * 2006-11-09 2008-05-29 Denso Corp 圧力センサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015068800A (ja) * 2013-09-30 2015-04-13 セイコーエプソン株式会社 圧力センサー、電子機器および移動体
JP2018132485A (ja) * 2017-02-17 2018-08-23 アズビル株式会社 静電容量型圧力センサ
KR20210131690A (ko) * 2020-04-24 2021-11-03 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기
KR102345111B1 (ko) 2020-04-24 2021-12-30 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기
KR102404331B1 (ko) * 2020-12-02 2022-06-07 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기

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