JP2010243468A5 - - Google Patents

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Publication number
JP2010243468A5
JP2010243468A5 JP2009095721A JP2009095721A JP2010243468A5 JP 2010243468 A5 JP2010243468 A5 JP 2010243468A5 JP 2009095721 A JP2009095721 A JP 2009095721A JP 2009095721 A JP2009095721 A JP 2009095721A JP 2010243468 A5 JP2010243468 A5 JP 2010243468A5
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JP
Japan
Prior art keywords
pressure
container
detection module
module according
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009095721A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010243468A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009095721A priority Critical patent/JP2010243468A/ja
Priority claimed from JP2009095721A external-priority patent/JP2010243468A/ja
Publication of JP2010243468A publication Critical patent/JP2010243468A/ja
Publication of JP2010243468A5 publication Critical patent/JP2010243468A5/ja
Withdrawn legal-status Critical Current

Links

JP2009095721A 2009-04-10 2009-04-10 圧力検出モジュール Withdrawn JP2010243468A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009095721A JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009095721A JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

Publications (2)

Publication Number Publication Date
JP2010243468A JP2010243468A (ja) 2010-10-28
JP2010243468A5 true JP2010243468A5 (enExample) 2012-05-24

Family

ID=43096624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009095721A Withdrawn JP2010243468A (ja) 2009-04-10 2009-04-10 圧力検出モジュール

Country Status (1)

Country Link
JP (1) JP2010243468A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015068800A (ja) * 2013-09-30 2015-04-13 セイコーエプソン株式会社 圧力センサー、電子機器および移動体
JP6908391B2 (ja) * 2017-02-17 2021-07-28 アズビル株式会社 静電容量型圧力センサ
KR102345111B1 (ko) * 2020-04-24 2021-12-30 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기
KR102404331B1 (ko) * 2020-12-02 2022-06-07 삼성전기주식회사 포스 센싱 장치 및 이를 구비하는 전자 기기

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02196938A (ja) * 1989-01-26 1990-08-03 Aisan Ind Co Ltd 圧力センサ
JPH0495740A (ja) * 1990-08-06 1992-03-27 Toyota Autom Loom Works Ltd 半導体装置
JP2002082009A (ja) * 2000-06-30 2002-03-22 Denso Corp 圧力センサ
JP2007180201A (ja) * 2005-12-27 2007-07-12 Yamaha Corp 半導体装置
JP2008122129A (ja) * 2006-11-09 2008-05-29 Denso Corp 圧力センサ

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