JP2010230401A5 - - Google Patents

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Publication number
JP2010230401A5
JP2010230401A5 JP2009076654A JP2009076654A JP2010230401A5 JP 2010230401 A5 JP2010230401 A5 JP 2010230401A5 JP 2009076654 A JP2009076654 A JP 2009076654A JP 2009076654 A JP2009076654 A JP 2009076654A JP 2010230401 A5 JP2010230401 A5 JP 2010230401A5
Authority
JP
Japan
Prior art keywords
pressure
pressure sensor
sensor according
sensitive element
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009076654A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010230401A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009076654A priority Critical patent/JP2010230401A/ja
Priority claimed from JP2009076654A external-priority patent/JP2010230401A/ja
Publication of JP2010230401A publication Critical patent/JP2010230401A/ja
Publication of JP2010230401A5 publication Critical patent/JP2010230401A5/ja
Pending legal-status Critical Current

Links

JP2009076654A 2009-03-26 2009-03-26 圧力センサー Pending JP2010230401A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009076654A JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009076654A JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Publications (2)

Publication Number Publication Date
JP2010230401A JP2010230401A (ja) 2010-10-14
JP2010230401A5 true JP2010230401A5 (zh) 2012-05-24

Family

ID=43046387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009076654A Pending JP2010230401A (ja) 2009-03-26 2009-03-26 圧力センサー

Country Status (1)

Country Link
JP (1) JP2010230401A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101253334B1 (ko) * 2011-10-07 2013-04-11 숭실대학교산학협력단 안압 센서 및 그 제조 방법
JP6989093B2 (ja) * 2016-09-27 2022-01-05 国立大学法人 香川大学 内視鏡

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2770488B2 (ja) * 1989-10-17 1998-07-02 横河電機株式会社 半導体圧力計
JP2001165796A (ja) * 1999-12-14 2001-06-22 Kyocera Corp 圧力センサ
JP2004125417A (ja) * 2002-09-30 2004-04-22 Nippon Seiki Co Ltd 半導体式圧力センサ
JP5403200B2 (ja) * 2006-06-09 2014-01-29 セイコーエプソン株式会社 圧力センサ
JP2007333452A (ja) * 2006-06-13 2007-12-27 Epson Toyocom Corp 圧力センサ用感圧素子、及び圧力センサ
JP4983175B2 (ja) * 2006-09-14 2012-07-25 セイコーエプソン株式会社 感圧センサ
JP4888715B2 (ja) * 2007-03-26 2012-02-29 セイコーエプソン株式会社 圧力センサ用の感圧素子、及びその製造方法

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