JP2010150641A - 摺動部材 - Google Patents
摺動部材 Download PDFInfo
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- JP2010150641A JP2010150641A JP2008333078A JP2008333078A JP2010150641A JP 2010150641 A JP2010150641 A JP 2010150641A JP 2008333078 A JP2008333078 A JP 2008333078A JP 2008333078 A JP2008333078 A JP 2008333078A JP 2010150641 A JP2010150641 A JP 2010150641A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 94
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 94
- 239000000463 material Substances 0.000 claims abstract description 69
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 25
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000011651 chromium Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 34
- 229910052782 aluminium Inorganic materials 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 17
- 229910052804 chromium Inorganic materials 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- 239000010936 titanium Substances 0.000 claims description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 12
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 230000007423 decrease Effects 0.000 claims description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 229910003470 tongbaite Inorganic materials 0.000 claims description 6
- 238000007733 ion plating Methods 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 150000004679 hydroxides Chemical class 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
- -1 borides Chemical class 0.000 claims description 3
- 230000001502 supplementing effect Effects 0.000 claims description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 16
- 230000007797 corrosion Effects 0.000 abstract description 16
- 229910021385 hard carbon Inorganic materials 0.000 abstract description 16
- 229910003460 diamond Inorganic materials 0.000 abstract description 2
- 239000010432 diamond Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 186
- 239000011248 coating agent Substances 0.000 description 51
- 238000000576 coating method Methods 0.000 description 51
- 239000011261 inert gas Substances 0.000 description 19
- 239000004215 Carbon black (E152) Substances 0.000 description 12
- 229930195733 hydrocarbon Natural products 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 150000002430 hydrocarbons Chemical class 0.000 description 11
- 239000003921 oil Substances 0.000 description 9
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000010407 anodic oxide Substances 0.000 description 7
- 239000010687 lubricating oil Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910021365 Al-Mg-Si alloy Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910003481 amorphous carbon Inorganic materials 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000003483 aging Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910018464 Al—Mg—Si Inorganic materials 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
- F16D69/00—Friction linings; Attachment thereof; Selection of coacting friction substances or surfaces
- F16D69/02—Composition of linings ; Methods of manufacturing
- F16D69/027—Compositions based on metals or inorganic oxides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/02—Carbon based material
- F16C2206/04—Diamond like carbon [DLC]
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/42—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic oxides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Braking Arrangements (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
【解決手段】酸化アルミニウム層で覆われているアルミニウム合金を基材とし、前記基材の外側に前記基材側から順に、導電層、前記基材との密着性を向上させ、前記基材の硬度を補うためのバッファー層、及びダイヤモンドライクカーボン層を形成する。
【選択図】図1
Description
(比較例1)
Fe、Cr、Moを含む合金(クロムモリブデン鋼材)の基材12の上に、UBM法を用いて、図2に示す被膜11を形成する。
(比較例2)
アルミニウム合金101(Al−Mg−Si系合金)A6061−T6材の表面が陽極酸化被膜3で覆われた基材2の上に、UBM法を用いて、図3に示す被膜11を形成する。
Claims (13)
- 酸化アルミニウム層で覆われているアルミニウム合金を基材とし、前記基材の外側に前記基材側から順に、導電層、前記基材との密着性を向上させ、前記基材の硬度を補うためのバッファー層、及びダイヤモンドライクカーボン層を形成したことを特徴とする摺動部材。
- 前記ダイヤモンドライクカーボン層がアルミニウムを含むことを特徴とする請求項1記載の摺動部材。
- 前記導電層がアルミニウム、クロム及びチタンの群から選ばれる1種類の金属を含むことを特徴とする請求項1又は2に記載の摺動部材。
- 前記バッファー層がクロム窒化物及びチタン窒化物の群から選ばれる1種類の窒化物を含むことを特徴とする請求項1〜3のいずれか一項に記載の摺動部材。
- 前記バッファー層がクロム炭化物及びチタン炭化物の群から選ばれる1種類の炭化物を含むことを特徴とする請求項1〜3のいずれか一項に記載の摺動部材。
- 前記バッファー層と前記ダイヤモンドライクカーボン層との間に、傾斜層を設けることを特徴とする請求項1〜5のいずれか一項に記載の摺動部材。
- 前記傾斜層が、炭素及び金属の混合物又は金属の炭化物であり、前記傾斜層に含まれる金属の含有量が、前記基材側から外側に向かって減少し、前記傾斜層に含まれる炭素の含有量が、前記基材側から前記外側に向かって増加し、前記金属がアルミニウム、クロム及びチタンの群から選ばれる1種類の金属であることを特徴とする請求項6記載の摺動部材。
- 前記傾斜層が、炭素及び金属の混合物又は金属の炭化物であり、前記傾斜層に含まれる第一の金属の含有量が、前記基材側から外側に向かって減少し、前記傾斜層に含まれる第二の金属及び炭素の含有量が、前記基材側から前記外側に向かって増加し、前記第一の金属は、アルミニウム、クロム及びチタンの群から選ばれる1種類の金属であり、前記第二の金属は、アルミニウム、クロム及びチタンの群から選ばれる1種類の金属であり、かつ前記第一の金属とは異なる金属であることを特徴とする請求項6記載の摺動部材。
- 前記ダイヤモンドライクカーボン層に含まれるアルミニウムの含有量が、0.5〜4.5at%であることを特徴とする請求項2〜8のいずれか一項に記載の摺動部材。
- 前記ダイヤモンドライクカーボン層に含まれるアルミニウムの状態が、金属、硼化物、炭化物、窒化物、酸化物及び水酸化物の群から選ばれる1つの状態であることを特徴とする請求項2〜9のいずれか一項に記載の摺動部材。
- 前記ダイヤモンドライクカーボン層に、sp2結合炭素とsp3結合炭素とが混在することを特徴とする請求項1〜10のいずれか一項に記載の摺動部材。
- 請求項1〜11のいずれか一項に記載の摺動部材で構成したことを特徴とする自動車用ブレーキピストン。
- 酸化アルミニウム層で覆われているアルミニウム合金を基材とし、この基材の表面にスパッタリング或いはイオンプレーティングにより導電層を形成する工程と、前記基材にバイアス電圧を印加した状態で、前記導電層の上に前記基材との密着性を向上させ、前記基材の硬度を補うためのバッファー層を形成し、このバッファー層の上に傾斜層を形成し、この傾斜層の上に、アルミニウムを含むダイヤモンドライクカーボン層を形成する工程と、を含むことを特徴とする摺動部材の製造方法。
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JP2008333078A JP5227782B2 (ja) | 2008-12-26 | 2008-12-26 | 摺動部材 |
EP09180326A EP2206800A1 (en) | 2008-12-26 | 2009-12-22 | Slide member |
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JP2008333078A JP5227782B2 (ja) | 2008-12-26 | 2008-12-26 | 摺動部材 |
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JP2010150641A true JP2010150641A (ja) | 2010-07-08 |
JP5227782B2 JP5227782B2 (ja) | 2013-07-03 |
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JP2008333078A Expired - Fee Related JP5227782B2 (ja) | 2008-12-26 | 2008-12-26 | 摺動部材 |
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EP (1) | EP2206800A1 (ja) |
JP (1) | JP5227782B2 (ja) |
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WO2014126080A1 (ja) * | 2013-02-12 | 2014-08-21 | カヤバ工業株式会社 | 摺動部材 |
JP2016056435A (ja) * | 2014-09-12 | 2016-04-21 | 株式会社神戸製鋼所 | 硬質摺動部材の製造方法、および硬質摺動部材 |
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