JP2010133710A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010133710A5 JP2010133710A5 JP2008306951A JP2008306951A JP2010133710A5 JP 2010133710 A5 JP2010133710 A5 JP 2010133710A5 JP 2008306951 A JP2008306951 A JP 2008306951A JP 2008306951 A JP2008306951 A JP 2008306951A JP 2010133710 A5 JP2010133710 A5 JP 2010133710A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- micro
- carrier
- microscope
- microsampler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005070 sampling Methods 0.000 claims 11
- 230000005540 biological transmission Effects 0.000 claims 10
- 238000010884 ion-beam technique Methods 0.000 claims 6
- 239000007788 liquid Substances 0.000 claims 6
- 230000007547 defect Effects 0.000 claims 5
- 238000007689 inspection Methods 0.000 claims 5
- 239000002608 ionic liquid Substances 0.000 claims 5
- 150000002500 ions Chemical class 0.000 claims 5
- 238000004458 analytical method Methods 0.000 claims 4
- 239000000126 substance Substances 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000002360 preparation method Methods 0.000 claims 2
- 230000000007 visual effect Effects 0.000 claims 2
- UHRMDRAOJCCYFG-UHFFFAOYSA-O 4-butyl-2-ethyl-1-methyl-1H-imidazol-1-ium Chemical compound C(CCC)C=1N=C([NH+](C1)C)CC UHRMDRAOJCCYFG-UHFFFAOYSA-O 0.000 claims 1
- 150000001450 anions Chemical class 0.000 claims 1
- -1 butylmethylimidazolium tetrafluoroborate Chemical compound 0.000 claims 1
- 238000004364 calculation method Methods 0.000 claims 1
- 239000000969 carrier Substances 0.000 claims 1
- 150000001768 cations Chemical class 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910001338 liquidmetal Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000001000 micrograph Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008306951A JP5205234B2 (ja) | 2008-12-02 | 2008-12-02 | 微小試料採取装置，検査解析システム、および検査解析方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008306951A JP5205234B2 (ja) | 2008-12-02 | 2008-12-02 | 微小試料採取装置，検査解析システム、および検査解析方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010133710A JP2010133710A (ja) | 2010-06-17 |
| JP2010133710A5 true JP2010133710A5 (enExample) | 2011-05-06 |
| JP5205234B2 JP5205234B2 (ja) | 2013-06-05 |
Family
ID=42345152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008306951A Active JP5205234B2 (ja) | 2008-12-02 | 2008-12-02 | 微小試料採取装置，検査解析システム、および検査解析方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5205234B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5707082B2 (ja) * | 2010-10-08 | 2015-04-22 | 株式会社日立ハイテクノロジーズ | 液体の表面を浮遊する試料の走査電子顕微鏡観察方法 |
| JP2012098229A (ja) * | 2010-11-05 | 2012-05-24 | Hitachi Ltd | サンプリング装置 |
| JP5723801B2 (ja) * | 2012-02-06 | 2015-05-27 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および配線方法 |
| KR101402973B1 (ko) | 2012-12-10 | 2014-06-03 | 김용균 | 미세 시료용 프로브 고정홀더 및 이를 구비한 미세 시료 채취 장치 |
| US9821486B2 (en) * | 2013-10-30 | 2017-11-21 | Fei Company | Integrated lamellae extraction station |
| EP3043372B1 (en) * | 2015-01-12 | 2017-01-04 | Fei Company | Method of modifying a sample surface layer from a microscopic sample |
| WO2021130992A1 (ja) * | 2019-12-26 | 2021-07-01 | 株式会社日立ハイテク | 解析システム、ラメラの検査方法および荷電粒子線装置 |
| WO2022178903A1 (zh) * | 2021-02-28 | 2022-09-01 | 浙江大学 | 一种制造微装置的方法和装置 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06122869A (ja) * | 1991-06-28 | 1994-05-06 | Texas Instr Inc <Ti> | 微細蝕刻における測定のための帯電防止溶液 |
| JP4069545B2 (ja) * | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
| JP2001074621A (ja) * | 1999-09-08 | 2001-03-23 | Toshiba Microelectronics Corp | 電子顕微鏡用試料の作製方法 |
| JP3850182B2 (ja) * | 1999-09-09 | 2006-11-29 | 日本電子株式会社 | 荷電粒子線装置 |
| JP2001147208A (ja) * | 1999-11-22 | 2001-05-29 | Canon Inc | 試料ホルダおよび分析装置 |
| JP2002150983A (ja) * | 2000-11-09 | 2002-05-24 | Jeol Ltd | マニピュレータ |
| IL156027A0 (en) * | 2000-12-01 | 2003-12-23 | El Mul Technologies Ltd | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| JP3727532B2 (ja) * | 2000-12-26 | 2005-12-14 | シャープ株式会社 | 薄片試料処理装置及び薄片試料処理方法 |
| JP2003194681A (ja) * | 2001-12-26 | 2003-07-09 | Toshiba Microelectronics Corp | Ｔｅｍ試料作製方法 |
| JP2006030017A (ja) * | 2004-07-16 | 2006-02-02 | Sii Nanotechnology Inc | プローブ及び微小サンプルピックアップ機構 |
| JP4413746B2 (ja) * | 2004-10-28 | 2010-02-10 | 株式会社日立ハイテクノロジーズ | 荷電粒子ビーム装置 |
| JP2007165283A (ja) * | 2005-12-09 | 2007-06-28 | Lee Bing Huan | 電子顕微鏡用の超薄液体制御板及び電子顕微鏡用の超薄液体制御板とボックスとの組合せ |
| EP1978355B1 (en) * | 2006-01-20 | 2016-07-27 | Hitachi High-Technologies Corporation | Method of observing sample using a liquid medium for preventing charge-up in an electron microscope |
| EP2130086A4 (en) * | 2007-03-02 | 2012-03-14 | Protochips Inc | MEMBRANE SUPPORTS WITH REINFORCING FUNCTIONS |
| JP4834704B2 (ja) * | 2008-09-01 | 2011-12-14 | 株式会社日立製作所 | 試料作製方法 |
-
2008
- 2008-12-02 JP JP2008306951A patent/JP5205234B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010133710A5 (enExample) | ||
| US9304068B2 (en) | Cell collection apparatus, cell collecting system, and cell collecting method | |
| JP6416809B2 (ja) | 荷電粒子顕微鏡用のサンプルの調製 | |
| US8357913B2 (en) | Method and apparatus for sample extraction and handling | |
| JP2000241319A5 (ja) | 試料作製方法および試料作製システム | |
| US9865428B2 (en) | Preparation of cryogenic sample for charged-particle microscopy | |
| US9116091B2 (en) | Preparation of cryogenic sample for charged-particle microscopy | |
| JP2014153362A (ja) | 試料調製ステージ | |
| KR20060092828A (ko) | 진공 챔버에서 샘플 형성 및 미세 분석을 하기 위한 방법및 장치 | |
| JP5205234B2 (ja) | 微小試料採取装置，検査解析システム、および検査解析方法 | |
| US8759765B2 (en) | Method for processing samples held by a nanomanipulator | |
| TW202346017A (zh) | 用於低溫和環境控制樣品處理的方法和設備 | |
| JP3584430B2 (ja) | 汚染物検出方法 | |
| JP4967830B2 (ja) | 試料分析法および装置 | |
| JP2020071227A (ja) | 荷電粒子装置で調査するための生体試料を調製する方法 | |
| Heien et al. | Lipid detection, identification, and imaging single cells with SIMS | |
| US20220026441A1 (en) | Method of processing samples | |
| JP5135516B2 (ja) | 薄片試料作製方法 | |
| JP2004328003A5 (enExample) | ||
| JP2006222459A5 (enExample) | ||
| JP7065573B2 (ja) | 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 | |
| JP2001147208A (ja) | 試料ホルダおよび分析装置 | |
| TWI811653B (zh) | 樣品載台及修飾樣品的系統及方法 | |
| JP2012098070A (ja) | 表面不純物測定方法、及び表面不純物測定装置 | |
| JP2012098229A (ja) | サンプリング装置 |