JP7065573B2 - 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 - Google Patents
固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 Download PDFInfo
- Publication number
- JP7065573B2 JP7065573B2 JP2017121227A JP2017121227A JP7065573B2 JP 7065573 B2 JP7065573 B2 JP 7065573B2 JP 2017121227 A JP2017121227 A JP 2017121227A JP 2017121227 A JP2017121227 A JP 2017121227A JP 7065573 B2 JP7065573 B2 JP 7065573B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- jig
- observation
- adjusting
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
2 調整用治具
4 貫通孔
6 光学顕微鏡等
8 試料ホルダ
10 電子線源
12 検出部
14 接着部材
S 試料
Claims (2)
- 略球体の試料の観察又は分析の対象部分の探索とその位置調整に用いられる調整用治具と、
前記試料が前記調整用治具により位置調整された位置で保持された状態で載置される試料ホルダと、
前記試料ホルダ上の前記調整用治具に保持された試料の観察又は分析を行なう観察又は分析部と、
を備えた装置であって、
前記調整用治具は、上面から下面に通じる貫通孔をもち、少なくとも前記貫通孔の設けられている部分が、上面側の前記貫通孔の縁の全周で接しながら保持した前記試料が当該調整用治具の下面に当接する厚みを有することを特徴とする装置。 - 前記調整用治具は導電性を有する材料により構成されている、請求項1に記載の装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017121227A JP7065573B2 (ja) | 2017-06-21 | 2017-06-21 | 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017121227A JP7065573B2 (ja) | 2017-06-21 | 2017-06-21 | 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019007755A JP2019007755A (ja) | 2019-01-17 |
JP7065573B2 true JP7065573B2 (ja) | 2022-05-12 |
Family
ID=65028738
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017121227A Active JP7065573B2 (ja) | 2017-06-21 | 2017-06-21 | 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP7065573B2 (ja) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4654269B2 (ja) * | 2008-06-19 | 2011-03-16 | 株式会社天辻鋼球製作所 | ボールの目視検査用治具及び該治具を用いた目視検査方法 |
WO2013136260A1 (en) * | 2012-03-12 | 2013-09-19 | Ecole Polytechnique Federale De Lausanne (Epfl) | Universal sample holder |
-
2017
- 2017-06-21 JP JP2017121227A patent/JP7065573B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2019007755A (ja) | 2019-01-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10663414B2 (en) | Method of performing electron diffraction pattern analysis upon a sample | |
JP6288951B2 (ja) | 走査電子顕微鏡を利用した検査システム | |
CN1696652A (zh) | 带电粒子束装置探针操作 | |
KR20060092828A (ko) | 진공 챔버에서 샘플 형성 및 미세 분석을 하기 위한 방법및 장치 | |
US9384941B2 (en) | Charged particle beam apparatus and sample observation method | |
JP2010507882A (ja) | サンプル抽出および取り扱いのための方法および装置 | |
KR20190010473A (ko) | 이중 빔 하전 입자 현미경에서의 시료 준비 및 검사 | |
JP2009141081A (ja) | 半導体ウェーハ表面検査装置 | |
JP2013235778A (ja) | 走査型電子顕微鏡用試料台および走査型電子顕微鏡の試料設置方法 | |
JP2010133710A5 (ja) | ||
JP7065573B2 (ja) | 固体試料の位置の調整用治具、その調整用治具を用いる装置及び方法 | |
JP5450357B2 (ja) | 走査電子顕微鏡 | |
US9012841B2 (en) | Specimen holder for observing cross section of specimen and method for controlling the same | |
KR101721550B1 (ko) | Sem 또는 stem용 복수시료 장착장치 | |
CN106324872B (zh) | 检查装置及被处理物检查方法 | |
JP2014044967A (ja) | 走査電子顕微鏡および試料ホルダ | |
KR101694723B1 (ko) | 시료고정장치 | |
JP2008014899A (ja) | 試料作製方法 | |
JP2018163109A (ja) | 断面試料作製装置に用いる試料ホルダー | |
JP2006352165A5 (ja) | ||
WO2012060056A1 (ja) | サンプリング装置 | |
KR20090096167A (ko) | 주사전자현미경 홀더 | |
JP2001147208A (ja) | 試料ホルダおよび分析装置 | |
US8502142B2 (en) | Charged particle beam analysis while part of a sample to be analyzed remains in a generated opening of the sample | |
KR20100025921A (ko) | 주사전자현미경의 시편 홀더장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191108 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200916 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200923 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20201120 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210623 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210924 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20210924 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20211004 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20211005 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20211022 |
|
C211 | Notice of termination of reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C211 Effective date: 20211026 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20211109 |
|
C13 | Notice of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: C13 Effective date: 20211228 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220225 |
|
C23 | Notice of termination of proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C23 Effective date: 20220315 |
|
C03 | Trial/appeal decision taken |
Free format text: JAPANESE INTERMEDIATE CODE: C03 Effective date: 20220419 |
|
C30A | Notification sent |
Free format text: JAPANESE INTERMEDIATE CODE: C3012 Effective date: 20220419 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220426 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7065573 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |