JP2010125352A5 - - Google Patents

Download PDF

Info

Publication number
JP2010125352A5
JP2010125352A5 JP2008299657A JP2008299657A JP2010125352A5 JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5 JP 2008299657 A JP2008299657 A JP 2008299657A JP 2008299657 A JP2008299657 A JP 2008299657A JP 2010125352 A5 JP2010125352 A5 JP 2010125352A5
Authority
JP
Japan
Prior art keywords
waste water
treatment system
photoresist development
wastewater
anion exchange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008299657A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010125352A (ja
JP5256002B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008299657A priority Critical patent/JP5256002B2/ja
Priority claimed from JP2008299657A external-priority patent/JP5256002B2/ja
Publication of JP2010125352A publication Critical patent/JP2010125352A/ja
Publication of JP2010125352A5 publication Critical patent/JP2010125352A5/ja
Application granted granted Critical
Publication of JP5256002B2 publication Critical patent/JP5256002B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008299657A 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム Expired - Fee Related JP5256002B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008299657A JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

Publications (3)

Publication Number Publication Date
JP2010125352A JP2010125352A (ja) 2010-06-10
JP2010125352A5 true JP2010125352A5 (https=) 2011-09-22
JP5256002B2 JP5256002B2 (ja) 2013-08-07

Family

ID=42326104

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008299657A Expired - Fee Related JP5256002B2 (ja) 2008-11-25 2008-11-25 フォトレジスト現像排水の排水処理システム

Country Status (1)

Country Link
JP (1) JP5256002B2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6526506B2 (ja) * 2015-07-07 2019-06-05 リファインホールディングス株式会社 アニオン性界面活性剤を含有する水の水処理方法
CA3035672A1 (en) 2016-09-12 2018-05-31 Aecom (Delaware Corporation) Use of electrochemical oxidation for treatment of per-and polyfluoroalkyl substances (pfas) in waste generated from sorbent and resin regeneration processes
JP7494216B2 (ja) * 2019-06-07 2024-06-03 エヴォクア ウォーター テクノロジーズ エルエルシー 分離および電気化学的排除を使用したｐｆａｓ処理スキーム
KR20220024012A (ko) * 2019-06-28 2022-03-03 바텔리 메모리얼 인스티튜트 산화 공정을 통한 pfas의 파괴 및 오염된 장소로의 운송에 적합한 장치
KR20230048325A (ko) * 2020-08-06 2023-04-11 바텔리 메모리얼 인스티튜트 역삼투법 및 염 분리법을 이용한 pfas의 염 분리 및 분해
TW202423849A (zh) 2022-08-25 2024-06-16 日商東京威力科創股份有限公司 處理系統及處理方法
JP2024151433A (ja) 2023-04-12 2024-10-25 東京エレクトロン株式会社 処理システム及び処理方法
JP2024151434A (ja) 2023-04-12 2024-10-25 東京エレクトロン株式会社 処理システム及び処理方法
KR20260037113A (ko) 2023-07-14 2026-03-17 클라로스 테크놀로지스 인코포레이티드 수용액에서 요오드를 포획하는 방법 및 시스템
US12545601B2 (en) 2023-07-14 2026-02-10 Claros Technologies Inc. Methods and systems of photosensitizer recovery for improved PFAS destruction
US12534390B2 (en) 2023-07-14 2026-01-27 Claros Technologies Inc. Methods and systems of nitrate removal in aqueous systems for improved PFAS destruction
WO2025234057A1 (ja) 2024-05-09 2025-11-13 東京エレクトロン株式会社 処理システム及び処理方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3364308B2 (ja) * 1993-12-29 2003-01-08 株式会社東芝 排水処理方法及びその装置
JP3164968B2 (ja) * 1994-06-02 2001-05-14 オルガノ株式会社 テトラアルキルアンモニウムヒドロオキシド含有廃液の処理方法及び装置
JPH0839059A (ja) * 1994-07-28 1996-02-13 Kurita Water Ind Ltd 有機アルカリを含む半導体洗浄排水の回収方法
JP3656338B2 (ja) * 1996-09-13 2005-06-08 オルガノ株式会社 フォトレジスト現像廃液の処理方法
JP3543915B2 (ja) * 1996-11-21 2004-07-21 オルガノ株式会社 フォトレジスト現像廃液の再生処理方法
JP3663804B2 (ja) * 1997-01-24 2005-06-22 オルガノ株式会社 フォトレジスト現像廃液の処理方法
DE19824614A1 (de) * 1998-06-02 1999-12-09 Dyneon Gmbh Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern
DE19824615A1 (de) * 1998-06-02 1999-12-09 Dyneon Gmbh Verfahren zur Rückgewinnung von fluorierten Alkansäuren aus Abwässern
JP3801793B2 (ja) * 1998-10-15 2006-07-26 オルガノ株式会社 有機成分の回収装置
JP3968678B2 (ja) * 1998-10-26 2007-08-29 オルガノ株式会社 テトラアルキルアンモニウムイオン含有液の処理方法
DE19932771A1 (de) * 1999-07-14 2001-01-18 Dyneon Gmbh Verfahren zur Eluierung fluorierter Emulgatoren
DE19953285A1 (de) * 1999-11-05 2001-05-10 Dyneon Gmbh Verfahren zur Rückgewinnung fluorierter Emulgatoren
JP2001239142A (ja) * 1999-12-20 2001-09-04 Japan Organo Co Ltd 超臨界水酸化分解処理装置
JP2003190949A (ja) * 2001-12-27 2003-07-08 Tokuyama Corp フォトレジスト現像廃液の再生処理方法
JP2003215810A (ja) * 2002-01-22 2003-07-30 Japan Organo Co Ltd フォトレジスト現像廃液からの現像液の回収方法
JP2004283746A (ja) * 2003-03-24 2004-10-14 Kurita Water Ind Ltd 水溶性樹脂成分含有アルカリ廃液の処理方法および装置
JP3884407B2 (ja) * 2003-06-03 2007-02-21 株式会社東芝 フッ素含有水の処理方法および装置
JP2005175118A (ja) * 2003-12-10 2005-06-30 Japan Organo Co Ltd フォトレジスト現像廃液の再生処理装置
JP2005173402A (ja) * 2003-12-12 2005-06-30 Japan Organo Co Ltd フォトレジスト現像廃液の再生処理装置
JP2005215627A (ja) * 2004-02-02 2005-08-11 Japan Organo Co Ltd レジスト剥離廃液の再生処理方法及び装置
JP4561967B2 (ja) * 2004-05-19 2010-10-13 オルガノ株式会社 テトラアルキルアンモニウムイオン含有排水から水を回収する方法及び装置
EP1700869A1 (en) * 2005-03-11 2006-09-13 3M Innovative Properties Company Recovery of fluorinated surfactants from a basic anion exchange resin having quaternary ammonium groups
CN101282788B (zh) * 2005-10-14 2011-04-06 旭硝子株式会社 碱性阴离子交换树脂的再生方法
US7666929B2 (en) * 2006-05-31 2010-02-23 E.I. Du Pont De Nemours And Company Process for reducing fluorosurfactant content of fluropolymer dispersions using anionic surfactant-treated anion exchange resin
EP2132143B1 (en) * 2007-02-16 2012-12-26 3M Innovative Properties Company System and process for the removal of fluorochemicals from water
TWI399342B (zh) * 2007-04-25 2013-06-21 Tokuyama Corp Process for the preparation of waste liquid containing tetraalkylammonium ion
JP4859863B2 (ja) * 2008-03-24 2012-01-25 オルガノ株式会社 水処理方法および水処理装置
JP5298639B2 (ja) * 2008-05-26 2013-09-25 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5051004B2 (ja) * 2008-05-30 2012-10-17 栗田工業株式会社 水溶性樹脂成分含有アルカリ廃液の処理方法および処理装置
JP5062093B2 (ja) * 2008-08-06 2012-10-31 栗田工業株式会社 アミノ基を有する水溶性有機溶媒の回収方法

Similar Documents

Publication Publication Date Title
JP2010125352A5 (https=)
Zhang et al. Sorption of pharmaceuticals and personal care products (PPCPs) from water and wastewater by carbonaceous materials: a review
Nghiem et al. Removal of natural hormones by nanofiltration membranes: measurement, modeling, and mechanisms
Alexandratos Ion-exchange resins: a retrospective from industrial and engineering chemistry research
Dehghani et al. Adsorption of bisphenol A (BPA) from aqueous solutions by carbon nanotubes: kinetic and equilibrium studies
Sun et al. Boron removal from reverse osmosis permeate using an electrosorption process: feasibility, kinetics, and mechanism
Ji et al. Dynamic adsorption of Cu (II) from aqueous solution by zeolite/cellulose acetate blend fiber in fixed-bed
Chularueangaksorn et al. Regeneration and reusability of anion exchange resin used in perfluorooctane sulfonate removal by batch experiments
Zhang et al. Enhanced removal of iodide ions by nano Cu2O/Cu modified activated carbon from simulated wastewater with improved countercurrent two-stage adsorption
JP2016117001A5 (https=)
Rahman et al. Ion-exchange treatment of perfluorinated carboxylic acids in water: comparison of polystyrenic and polyacrylic resin structures and impact of sulfate on their performance
Shepsko et al. Treated municipal wastewater reuse: A holistic approach using hybrid ion exchange (HIX) with concurrent nutrient recovery and CO2 sequestration
Pirom et al. The effect of temperature on mass transfer and thermodynamic parameters in the removal of amoxicillin via hollow fiber supported liquid membrane
CN103706333A (zh) 一种载氧化锆除磷生物复合材料的制备及除磷方法
JP2010131478A (ja) 有機フッ素化合物処理システム
Parschová et al. Comparison of several polymeric sorbents for selective boron removal from reverse osmosis permeate
Dong et al. CO2 utilization for water treatment: ion exchange nitrate removal driven by CO2 without producing spent brine regenerant
Tan et al. Effect of pore structure on the removal of clofibric acid by magnetic anion exchange resin
CN103861564A (zh) 基于树枝状高分子修饰的氧化石墨烯吸附材料的制备
Shan et al. Adsorption of berberine by polymeric resin H103: kinetics and thermodynamics
Cao et al. Numerical evaluation of the ozonation process in a hollow fibre membrane contactor
JP2011058832A5 (https=)
Blaney Ozone treatment of antibiotics in water
Patankar et al. Defluoridation of drinking water using PURAL® MG-20 mixed hydroxide adsorbent
Ji et al. Norfloxacin removal efficiency by a carbon filtration column under the influence of nanoplastics: mechanistic analysis and prediction model