JP2010121977A5 - - Google Patents

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Publication number
JP2010121977A5
JP2010121977A5 JP2008293851A JP2008293851A JP2010121977A5 JP 2010121977 A5 JP2010121977 A5 JP 2010121977A5 JP 2008293851 A JP2008293851 A JP 2008293851A JP 2008293851 A JP2008293851 A JP 2008293851A JP 2010121977 A5 JP2010121977 A5 JP 2010121977A5
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Japan
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phase
light
light intensity
relative phase
maximum point
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JP2008293851A
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English (en)
Japanese (ja)
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JP5124424B2 (ja
JP2010121977A (ja
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Priority to JP2008293851A priority Critical patent/JP5124424B2/ja
Priority claimed from JP2008293851A external-priority patent/JP5124424B2/ja
Priority to US12/607,357 priority patent/US8102537B2/en
Publication of JP2010121977A publication Critical patent/JP2010121977A/ja
Publication of JP2010121977A5 publication Critical patent/JP2010121977A5/ja
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JP2008293851A 2008-11-17 2008-11-17 光学式変位計 Active JP5124424B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008293851A JP5124424B2 (ja) 2008-11-17 2008-11-17 光学式変位計
US12/607,357 US8102537B2 (en) 2008-11-17 2009-10-28 Optical displacement gage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008293851A JP5124424B2 (ja) 2008-11-17 2008-11-17 光学式変位計

Publications (3)

Publication Number Publication Date
JP2010121977A JP2010121977A (ja) 2010-06-03
JP2010121977A5 true JP2010121977A5 (enExample) 2011-11-10
JP5124424B2 JP5124424B2 (ja) 2013-01-23

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ID=42171788

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JP2008293851A Active JP5124424B2 (ja) 2008-11-17 2008-11-17 光学式変位計

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US (1) US8102537B2 (enExample)
JP (1) JP5124424B2 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5382038B2 (ja) * 2011-03-23 2014-01-08 パルステック工業株式会社 透光性管状物体の厚さ測定装置
JP5961938B2 (ja) * 2011-07-15 2016-08-03 国立大学法人山梨大学 モノスペクトル・マーカならびにその検出方法および装置
JP5674701B2 (ja) * 2012-03-22 2015-02-25 株式会社東芝 情報処理端末装置
JP2014013150A (ja) * 2012-07-03 2014-01-23 Shimadzu Corp 光照射装置
JP6775914B2 (ja) * 2014-01-31 2020-10-28 ザ ジェネラル ホスピタル コーポレイション 光干渉法において振幅および位相を使用した多次元速度測定を実施する方法および装置
DE102015200034A1 (de) 2014-03-31 2015-10-01 Micro-Epsilon Optronic Gmbh Spektrometer
DE112015003040T5 (de) 2014-06-27 2017-03-23 Keyence Corporation Fotoelektrisches Multi-Wellenlängen-Messgerät, konfokales Messgerät, Interferenz-Messgerät und Farbmessgerät
JP6309366B2 (ja) * 2014-06-30 2018-04-11 株式会社ホロン 荷電粒子線装置における高さ測定装置およびオートフォーカス装置
JP6767753B2 (ja) * 2015-03-02 2020-10-14 株式会社ミツトヨ クロマティック共焦点センサ及び測定方法
JP6725988B2 (ja) 2016-01-26 2020-07-22 大塚電子株式会社 厚み測定装置および厚み測定方法
JP6692651B2 (ja) * 2016-02-05 2020-05-13 株式会社ミツトヨ クロマティック共焦点センサ
JP7143057B2 (ja) 2016-12-28 2022-09-28 株式会社キーエンス 三次元測定装置
JP6859098B2 (ja) 2016-12-28 2021-04-14 株式会社キーエンス 光走査高さ測定装置
JP6829992B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP6829993B2 (ja) 2016-12-28 2021-02-17 株式会社キーエンス 光走査高さ測定装置
JP7018098B2 (ja) * 2020-08-13 2022-02-09 株式会社ホロン オートフォーカス装置
CN112556579A (zh) * 2020-12-25 2021-03-26 深圳市中图仪器股份有限公司 一种六自由度空间坐标位置和姿态测量装置
JP7699728B1 (ja) * 2024-07-17 2025-06-27 三菱電機株式会社 制御装置、レーザ加工ヘッド、レーザ加工装置、レーザ加工システムおよびレーザ加工方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3148001B2 (ja) * 1992-06-05 2001-03-19 オリンパス光学工業株式会社 フリンジスキャニング干渉測定方式による波面の位相つなぎ方法
JP3382011B2 (ja) 1993-04-06 2003-03-04 株式会社東芝 膜厚測定装置、ポリシング装置および半導体製造装置
JPH09210628A (ja) * 1996-01-30 1997-08-12 Sefuto Kenkyusho:Kk 位置測定装置
US5610716A (en) * 1995-08-28 1997-03-11 Hewlett-Packard Company Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
JP2001093885A (ja) * 1999-09-22 2001-04-06 Olympus Optical Co Ltd エッチング監視装置
JP2003279324A (ja) * 2002-03-22 2003-10-02 Toppan Printing Co Ltd 膜厚測定方法および膜厚測定装置
WO2005015149A1 (ja) * 2003-08-12 2005-02-17 Bussan Nanotech Research Institute, Inc. 検出装置、光路長測定装置、測定用器具、光学部材評価方法、温度変化検出方法
JP4398277B2 (ja) * 2004-01-15 2010-01-13 株式会社山武 ３次元計測装置、３次元計測方法及び３次元計測プログラム
US7158240B2 (en) * 2004-06-16 2007-01-02 The United States Of America As Represented By The Secretary Of The Army Measurement device and method
TWI278682B (en) * 2004-11-23 2007-04-11 Ind Tech Res Inst Fiber optic interferometric position sensor and measuring method thereof
US7187816B2 (en) * 2004-12-13 2007-03-06 Purdue Research Foundation In-fiber whitelight interferometry using long-period fiber grating
US7515275B2 (en) * 2006-07-18 2009-04-07 Institut National D'optique Optical apparatus and method for distance measuring

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