JP2010096866A5 - - Google Patents

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Publication number
JP2010096866A5
JP2010096866A5 JP2008265715A JP2008265715A JP2010096866A5 JP 2010096866 A5 JP2010096866 A5 JP 2010096866A5 JP 2008265715 A JP2008265715 A JP 2008265715A JP 2008265715 A JP2008265715 A JP 2008265715A JP 2010096866 A5 JP2010096866 A5 JP 2010096866A5
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JP
Japan
Prior art keywords
lens
optical system
projection optical
intersection
center position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008265715A
Other languages
English (en)
Japanese (ja)
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JP5253081B2 (ja
JP2010096866A (ja
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Publication date
Application filed filed Critical
Priority to JP2008265715A priority Critical patent/JP5253081B2/ja
Priority claimed from JP2008265715A external-priority patent/JP5253081B2/ja
Priority to US12/577,635 priority patent/US8432532B2/en
Publication of JP2010096866A publication Critical patent/JP2010096866A/ja
Publication of JP2010096866A5 publication Critical patent/JP2010096866A5/ja
Application granted granted Critical
Publication of JP5253081B2 publication Critical patent/JP5253081B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008265715A 2008-10-14 2008-10-14 投影光学系、露光装置及びデバイスの製造方法 Expired - Fee Related JP5253081B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008265715A JP5253081B2 (ja) 2008-10-14 2008-10-14 投影光学系、露光装置及びデバイスの製造方法
US12/577,635 US8432532B2 (en) 2008-10-14 2009-10-12 Projection optical system with rarefaction compensation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008265715A JP5253081B2 (ja) 2008-10-14 2008-10-14 投影光学系、露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2010096866A JP2010096866A (ja) 2010-04-30
JP2010096866A5 true JP2010096866A5 (cg-RX-API-DMAC7.html) 2011-12-01
JP5253081B2 JP5253081B2 (ja) 2013-07-31

Family

ID=42098605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008265715A Expired - Fee Related JP5253081B2 (ja) 2008-10-14 2008-10-14 投影光学系、露光装置及びデバイスの製造方法

Country Status (2)

Country Link
US (1) US8432532B2 (cg-RX-API-DMAC7.html)
JP (1) JP5253081B2 (cg-RX-API-DMAC7.html)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
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SG11201608847UA (en) 2014-04-25 2016-11-29 Bayer Healthcare Llc Syringe with rolling diaphragm
US10933190B2 (en) 2015-04-24 2021-03-02 Bayer Healthcare Llc Syringe with rolling diaphragm
WO2018053074A1 (en) 2016-09-16 2018-03-22 Bayer Healthcare Llc Pressure jacket having syringe retaining element
CA3040484A1 (en) 2016-10-17 2018-04-26 Bayer Healthcare Llc Fluid injector with syringe engagement mechanism
US11547793B2 (en) 2016-10-17 2023-01-10 Bayer Healthcare Llc Fluid injector with syringe engagement mechanism
WO2019055497A1 (en) 2017-09-13 2019-03-21 Bayer Healthcare Llc SYRINGE SLIDE CAP FOR SEPARATE FILLING AND DISPENSING
WO2020055785A1 (en) 2018-09-11 2020-03-19 Bayer Healthcare Llc Syringe retention feature for fluid injector system
EP4656218A2 (en) 2019-09-10 2025-12-03 Bayer HealthCare LLC Pressure jackets and syringe retention features for angiography fluid injectors
EP4106857A1 (en) 2020-02-21 2022-12-28 Bayer HealthCare, LLC Fluid path connectors for medical fluid delivery
FI4110452T3 (fi) 2020-02-28 2025-01-17 Bayer Healthcare Llc Nesteensekoitussarja
US12427247B2 (en) 2020-03-16 2025-09-30 Bayer Healthcare Llc Stopcock apparatus for angiography injector fluid paths
AU2021292515A1 (en) 2020-06-18 2022-12-22 Bayer Healthcare Llc In-line air bubble suspension apparatus for angiography injector fluid paths
CR20230084A (es) 2020-08-11 2023-03-23 Bayer Healthcare Llc Características para jeringa de angiografía
IL302694A (en) 2020-12-01 2023-07-01 Bayer Healthcare Llc Cassette for keeping liquid path components for a liquid injector system
US12239818B2 (en) 2021-06-17 2025-03-04 Bayer Healthcare Llc System and method for detecting fluid type in tubing for fluid injector apparatus

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
EP0989434B1 (en) * 1998-07-29 2006-11-15 Carl Zeiss SMT AG Catadioptric optical system and exposure apparatus having the same
KR20000034967A (ko) * 1998-11-30 2000-06-26 헨켈 카르스텐 수정-렌즈를 갖는 오브젝티브 및 투사 조명 장치
US6995930B2 (en) * 1999-12-29 2006-02-07 Carl Zeiss Smt Ag Catadioptric projection objective with geometric beam splitting
US6339505B1 (en) * 2000-06-26 2002-01-15 International Business Machines Corporation Method for radiation projection and lens assembly for semiconductor exposure tools
JP2004511092A (ja) * 2000-10-03 2004-04-08 コーニング　インコーポレイテッド フォトリソグラフィの方法およびフォトリソグラフィ装置
US7190527B2 (en) * 2002-03-01 2007-03-13 Carl Zeiss Smt Ag Refractive projection objective
DE10210899A1 (de) * 2002-03-08 2003-09-18 Zeiss Carl Smt Ag Refraktives Projektionsobjektiv für Immersions-Lithographie
KR20040104691A (ko) * 2002-05-03 2004-12-10 칼 짜이스 에스엠테 아게 높은 개구를 갖는 투영 대물렌즈
JP4174400B2 (ja) * 2003-09-24 2008-10-29 信越石英株式会社 シリカガラスの選別方法
JP2005114881A (ja) * 2003-10-06 2005-04-28 Nikon Corp 投影光学系、露光装置、および露光方法
US6992753B2 (en) * 2003-12-24 2006-01-31 Carl Zeiss Smt Ag Projection optical system
JP5420821B2 (ja) 2004-01-14 2014-02-19 カール・ツァイス・エスエムティー・ゲーエムベーハー 反射屈折投影対物レンズ
TWI395069B (zh) 2004-02-18 2013-05-01 尼康股份有限公司 投影光學系統、曝光裝置以及曝光方法
JP2006073687A (ja) 2004-09-01 2006-03-16 Nikon Corp 投影光学系、投影光学系の製造方法、露光装置、および露光方法
JP4868209B2 (ja) 2004-11-10 2012-02-01 株式会社ニコン 投影光学系、露光装置、および露光方法
WO2006051689A1 (ja) * 2004-11-10 2006-05-18 Nikon Corporation 投影光学系、露光装置、および露光方法
DE102006027787A1 (de) * 2005-07-05 2007-01-18 Carl Zeiss Smt Ag Projektionsbelichtungsanlage und Betriebsmethode dieser
JP2008063181A (ja) * 2006-09-07 2008-03-21 Shin Etsu Chem Co Ltd エキシマレーザー用合成石英ガラス基板及びその製造方法

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