JP2010085222A - 質量分析装置及び質量分析方法 - Google Patents

質量分析装置及び質量分析方法 Download PDF

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Publication number
JP2010085222A
JP2010085222A JP2008253915A JP2008253915A JP2010085222A JP 2010085222 A JP2010085222 A JP 2010085222A JP 2008253915 A JP2008253915 A JP 2008253915A JP 2008253915 A JP2008253915 A JP 2008253915A JP 2010085222 A JP2010085222 A JP 2010085222A
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Japan
Prior art keywords
mass spectrometer
sample
gas
probe
ionization chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008253915A
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English (en)
Japanese (ja)
Other versions
JP2010085222A5 (enExample
Inventor
Yoshiro Shiokawa
善郎 塩川
Yoshiki Hirano
芳樹 平野
Megumi Nakamura
恵 中村
Yasuyuki Taneda
康之 種田
Tsuyoshi Ho
強 彭
Harumi Maruyama
はる美 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
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Canon Anelva Technix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Technix Corp filed Critical Canon Anelva Technix Corp
Priority to JP2008253915A priority Critical patent/JP2010085222A/ja
Priority to PCT/JP2009/004215 priority patent/WO2010038354A1/ja
Priority to CN2009801014206A priority patent/CN101903769A/zh
Priority to EP09817398.2A priority patent/EP2330414A4/en
Publication of JP2010085222A publication Critical patent/JP2010085222A/ja
Priority to US12/794,665 priority patent/US8324568B2/en
Publication of JP2010085222A5 publication Critical patent/JP2010085222A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2008253915A 2008-09-30 2008-09-30 質量分析装置及び質量分析方法 Pending JP2010085222A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008253915A JP2010085222A (ja) 2008-09-30 2008-09-30 質量分析装置及び質量分析方法
PCT/JP2009/004215 WO2010038354A1 (ja) 2008-09-30 2009-08-28 質量分析装置及び質量分析方法
CN2009801014206A CN101903769A (zh) 2008-09-30 2009-08-28 质谱分析装置和质谱分析方法
EP09817398.2A EP2330414A4 (en) 2008-09-30 2009-08-28 Mass spectrometer and mass spectrometry method
US12/794,665 US8324568B2 (en) 2008-09-30 2010-06-04 Mass spectrometer and mass spectrometry method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008253915A JP2010085222A (ja) 2008-09-30 2008-09-30 質量分析装置及び質量分析方法

Publications (2)

Publication Number Publication Date
JP2010085222A true JP2010085222A (ja) 2010-04-15
JP2010085222A5 JP2010085222A5 (enExample) 2011-11-17

Family

ID=42073140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008253915A Pending JP2010085222A (ja) 2008-09-30 2008-09-30 質量分析装置及び質量分析方法

Country Status (5)

Country Link
US (1) US8324568B2 (enExample)
EP (1) EP2330414A4 (enExample)
JP (1) JP2010085222A (enExample)
CN (1) CN101903769A (enExample)
WO (1) WO2010038354A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008606A (ja) * 2011-06-27 2013-01-10 Hitachi High-Technologies Corp 質量分析装置及び質量分析方法
WO2015159714A1 (ja) * 2014-04-16 2015-10-22 株式会社日立ハイテクノロジーズ 質量分析装置および質量分析装置に用いられるカートリッジ
WO2018012220A1 (ja) * 2016-07-12 2018-01-18 国立研究開発法人産業技術総合研究所 質量分析方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010125669A1 (ja) 2009-04-30 2010-11-04 キヤノンアネルバ株式会社 質量分析用イオン検出装置、イオン検出方法、およびイオン検出装置の製造方法
JP5463361B2 (ja) 2009-09-15 2014-04-09 キヤノンアネルバ株式会社 平均自由行程を測定する装置および真空容器
JP2012047725A (ja) 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
GB2518391A (en) * 2013-09-19 2015-03-25 Smiths Detection Watford Ltd Method and apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002124208A (ja) * 2000-08-10 2002-04-26 Anelva Corp 質量分析のイオン化方法および質量分析装置
JP2002203509A (ja) * 2000-12-28 2002-07-19 Anelva Corp イオン付着質量分析の方法および装置
JP2004265674A (ja) * 2003-02-28 2004-09-24 Anelva Corp イオン付着を利用する質量分析装置および質量分析方法
JP2005127931A (ja) * 2003-10-27 2005-05-19 Rigaku Corp 昇温脱離ガス分析装置
JP2007322365A (ja) * 2006-06-05 2007-12-13 Canon Anelva Technix Corp イオン付着質量分析方法
JP2008164383A (ja) * 2006-12-27 2008-07-17 Toshiba Corp 質量分析装置

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DE2650685A1 (de) * 1976-11-05 1978-05-18 Varian Mat Gmbh Verfahren zur identifizierenden analyse von gemischen organischer substanzen
JP3236879B2 (ja) 1991-11-20 2001-12-10 国立環境研究所長 中性活性種の検出方法とその装置
US5316955A (en) * 1993-06-14 1994-05-31 Govorchin Steven W Furnace atomization electron ionization mass spectrometry
JPH09243602A (ja) * 1996-03-08 1997-09-19 Fuji Electric Co Ltd アゾ化合物の構造解析方法
JP2907176B2 (ja) * 1997-02-20 1999-06-21 日本電気株式会社 検量線作成方法及び装置
JP2001165829A (ja) * 1999-12-14 2001-06-22 Mitsubishi Electric Corp 昇温脱ガス分析装置
JP4057355B2 (ja) * 2002-06-21 2008-03-05 日油株式会社 火薬類から発生する気体の測定法
US7737395B2 (en) * 2006-09-20 2010-06-15 Agilent Technologies, Inc. Apparatuses, methods and compositions for ionization of samples and mass calibrants
JP2008253915A (ja) 2007-04-04 2008-10-23 Max Co Ltd ディスポーザー
JP2010190573A (ja) * 2007-06-18 2010-09-02 Tsurui Chemical Co Ltd 質量分析用プレートとそれを用いた薄層クロマトグラフィ−質量分析方法及び装置
JP4582815B2 (ja) 2008-04-25 2010-11-17 キヤノンアネルバ株式会社 内部標準物質とそれを用いた質量分析方法、及び内部標準樹脂
JP2009264949A (ja) 2008-04-25 2009-11-12 Canon Anelva Technix Corp イオン付着質量分析装置及びそのイオン付着質量分析方法
JP4557266B2 (ja) 2008-04-30 2010-10-06 キヤノンアネルバ株式会社 質量分析装置及び質量分析方法
JP5390343B2 (ja) * 2008-12-26 2014-01-15 キヤノンアネルバ株式会社 質量分析方法およびそれに用いる質量分析装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002124208A (ja) * 2000-08-10 2002-04-26 Anelva Corp 質量分析のイオン化方法および質量分析装置
JP2002203509A (ja) * 2000-12-28 2002-07-19 Anelva Corp イオン付着質量分析の方法および装置
JP2004265674A (ja) * 2003-02-28 2004-09-24 Anelva Corp イオン付着を利用する質量分析装置および質量分析方法
JP2005127931A (ja) * 2003-10-27 2005-05-19 Rigaku Corp 昇温脱離ガス分析装置
JP2007322365A (ja) * 2006-06-05 2007-12-13 Canon Anelva Technix Corp イオン付着質量分析方法
JP2008164383A (ja) * 2006-12-27 2008-07-17 Toshiba Corp 質量分析装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013008606A (ja) * 2011-06-27 2013-01-10 Hitachi High-Technologies Corp 質量分析装置及び質量分析方法
US9184037B2 (en) 2011-06-27 2015-11-10 Hitachi High-Technologies Corporation Mass spectrometer and mass analyzing method
WO2015159714A1 (ja) * 2014-04-16 2015-10-22 株式会社日立ハイテクノロジーズ 質量分析装置および質量分析装置に用いられるカートリッジ
JPWO2015159714A1 (ja) * 2014-04-16 2017-04-13 株式会社日立ハイテクノロジーズ 質量分析装置および質量分析装置に用いられるカートリッジ
WO2018012220A1 (ja) * 2016-07-12 2018-01-18 国立研究開発法人産業技術総合研究所 質量分析方法
JPWO2018012220A1 (ja) * 2016-07-12 2019-02-14 国立研究開発法人産業技術総合研究所 質量分析方法

Also Published As

Publication number Publication date
EP2330414A1 (en) 2011-06-08
EP2330414A4 (en) 2017-10-04
US8324568B2 (en) 2012-12-04
CN101903769A (zh) 2010-12-01
US20100243884A1 (en) 2010-09-30
WO2010038354A1 (ja) 2010-04-08

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