CN101903769A - 质谱分析装置和质谱分析方法 - Google Patents

质谱分析装置和质谱分析方法 Download PDF

Info

Publication number
CN101903769A
CN101903769A CN2009801014206A CN200980101420A CN101903769A CN 101903769 A CN101903769 A CN 101903769A CN 2009801014206 A CN2009801014206 A CN 2009801014206A CN 200980101420 A CN200980101420 A CN 200980101420A CN 101903769 A CN101903769 A CN 101903769A
Authority
CN
China
Prior art keywords
gas
mass spectrometry
detected
probe
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2009801014206A
Other languages
English (en)
Chinese (zh)
Inventor
盐川善郎
平野芳树
中村惠
种田康之
彭强
丸山春美
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Publication of CN101903769A publication Critical patent/CN101903769A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN2009801014206A 2008-09-30 2009-08-28 质谱分析装置和质谱分析方法 Pending CN101903769A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-253915 2008-09-30
JP2008253915A JP2010085222A (ja) 2008-09-30 2008-09-30 質量分析装置及び質量分析方法
PCT/JP2009/004215 WO2010038354A1 (ja) 2008-09-30 2009-08-28 質量分析装置及び質量分析方法

Publications (1)

Publication Number Publication Date
CN101903769A true CN101903769A (zh) 2010-12-01

Family

ID=42073140

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801014206A Pending CN101903769A (zh) 2008-09-30 2009-08-28 质谱分析装置和质谱分析方法

Country Status (5)

Country Link
US (1) US8324568B2 (enExample)
EP (1) EP2330414A4 (enExample)
JP (1) JP2010085222A (enExample)
CN (1) CN101903769A (enExample)
WO (1) WO2010038354A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010125669A1 (ja) 2009-04-30 2010-11-04 キヤノンアネルバ株式会社 質量分析用イオン検出装置、イオン検出方法、およびイオン検出装置の製造方法
JP5463361B2 (ja) 2009-09-15 2014-04-09 キヤノンアネルバ株式会社 平均自由行程を測定する装置および真空容器
JP2012047725A (ja) 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
JP5771458B2 (ja) 2011-06-27 2015-09-02 株式会社日立ハイテクノロジーズ 質量分析装置及び質量分析方法
GB2518391A (en) * 2013-09-19 2015-03-25 Smiths Detection Watford Ltd Method and apparatus
JP6224823B2 (ja) * 2014-04-16 2017-11-01 株式会社日立ハイテクノロジーズ 質量分析装置および質量分析装置に用いられるカートリッジ
JP6649651B2 (ja) * 2016-07-12 2020-02-19 国立研究開発法人産業技術総合研究所 質量分析方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2650685A1 (de) * 1976-11-05 1978-05-18 Varian Mat Gmbh Verfahren zur identifizierenden analyse von gemischen organischer substanzen
JP3236879B2 (ja) 1991-11-20 2001-12-10 国立環境研究所長 中性活性種の検出方法とその装置
US5316955A (en) * 1993-06-14 1994-05-31 Govorchin Steven W Furnace atomization electron ionization mass spectrometry
JPH09243602A (ja) * 1996-03-08 1997-09-19 Fuji Electric Co Ltd アゾ化合物の構造解析方法
JP2907176B2 (ja) * 1997-02-20 1999-06-21 日本電気株式会社 検量線作成方法及び装置
JP2001165829A (ja) * 1999-12-14 2001-06-22 Mitsubishi Electric Corp 昇温脱ガス分析装置
JP2002124208A (ja) * 2000-08-10 2002-04-26 Anelva Corp 質量分析のイオン化方法および質量分析装置
JP4596641B2 (ja) * 2000-12-28 2010-12-08 キヤノンアネルバ株式会社 イオン付着質量分析の方法および装置
JP4057355B2 (ja) * 2002-06-21 2008-03-05 日油株式会社 火薬類から発生する気体の測定法
JP4221232B2 (ja) * 2003-02-28 2009-02-12 キヤノンアネルバ株式会社 イオン付着を利用する質量分析装置および質量分析方法
JP4162138B2 (ja) * 2003-10-27 2008-10-08 株式会社リガク 昇温脱離ガス分析装置
JP2007322365A (ja) * 2006-06-05 2007-12-13 Canon Anelva Technix Corp イオン付着質量分析方法
US7737395B2 (en) * 2006-09-20 2010-06-15 Agilent Technologies, Inc. Apparatuses, methods and compositions for ionization of samples and mass calibrants
JP2008164383A (ja) * 2006-12-27 2008-07-17 Toshiba Corp 質量分析装置
JP2008253915A (ja) 2007-04-04 2008-10-23 Max Co Ltd ディスポーザー
JP2010190573A (ja) * 2007-06-18 2010-09-02 Tsurui Chemical Co Ltd 質量分析用プレートとそれを用いた薄層クロマトグラフィ−質量分析方法及び装置
JP4582815B2 (ja) 2008-04-25 2010-11-17 キヤノンアネルバ株式会社 内部標準物質とそれを用いた質量分析方法、及び内部標準樹脂
JP2009264949A (ja) 2008-04-25 2009-11-12 Canon Anelva Technix Corp イオン付着質量分析装置及びそのイオン付着質量分析方法
JP4557266B2 (ja) 2008-04-30 2010-10-06 キヤノンアネルバ株式会社 質量分析装置及び質量分析方法
JP5390343B2 (ja) * 2008-12-26 2014-01-15 キヤノンアネルバ株式会社 質量分析方法およびそれに用いる質量分析装置

Also Published As

Publication number Publication date
EP2330414A1 (en) 2011-06-08
EP2330414A4 (en) 2017-10-04
US8324568B2 (en) 2012-12-04
US20100243884A1 (en) 2010-09-30
JP2010085222A (ja) 2010-04-15
WO2010038354A1 (ja) 2010-04-08

Similar Documents

Publication Publication Date Title
CN101903769A (zh) 质谱分析装置和质谱分析方法
JP4557266B2 (ja) 質量分析装置及び質量分析方法
CN104823045B (zh) 用于横流离子迁移谱分析的设备和方法
CN105914124B (zh) 电离设备
CN101281165B (zh) 一种质谱分析样品的离子化装置
JP5671145B2 (ja) 質量分析計の大気圧イオン化導入口
CN104254903B (zh) 具有快速响应的电子轰击离子源
US9696285B2 (en) Gas analysis system comprising a gas spectrometer equipped with a micro-reflectron
EP1994546B1 (en) High sensitivity slitless ion source mass spectrometer for trace gas leak detection
US9779925B2 (en) Coupling device for mass spectrometry apparatus
CN111971779B (zh) Imr-ms反应室
WO2015176567A1 (zh) 大气压接口装置以及质谱仪
JP5451360B2 (ja) 質量分析装置及び質量分析方法
US9899200B2 (en) Multi-dimensional ion separation
WO2007102204A1 (ja) 質量分析装置
GB2561052A (en) Multi-dimensional ion separation
JP2004103428A (ja) イオン付着質量分析方法
JP4582935B2 (ja) 質量分析装置
Hieke Suppression of unimolecular decay of laser desorbed peptide and protein ions by entrainment in rarefied supersonic gas jets under weak electric fields
CN115803614A (zh) 质量分析装置
CN104282528A (zh) 一种用于中性电喷雾紫外单光子电离源
ITTO20090513A1 (it) Dispositivo di campionamento per gas e apparato analizzatore di gas che impiega detto dispositivo.
WO2016092156A1 (en) Method and device for detecting ambient clusters

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20101201