JP2010048726A - 加熱励振を利用した熱伝導型気圧センサ - Google Patents
加熱励振を利用した熱伝導型気圧センサ Download PDFInfo
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- JP2010048726A JP2010048726A JP2008214713A JP2008214713A JP2010048726A JP 2010048726 A JP2010048726 A JP 2010048726A JP 2008214713 A JP2008214713 A JP 2008214713A JP 2008214713 A JP2008214713 A JP 2008214713A JP 2010048726 A JP2010048726 A JP 2010048726A
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- Prior art keywords
- thin film
- cantilever
- thermocouple
- heating
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000005284 excitation Effects 0.000 title claims description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims description 112
- 239000010408 film Substances 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 14
- 238000005452 bending Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 239000012528 membrane Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 description 21
- 238000001816 cooling Methods 0.000 description 13
- 230000035945 sensitivity Effects 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007430 reference method Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Micromachines (AREA)
Abstract
【解決手段】カンチレバ状の薄膜に、薄膜温度センサと加熱手段および励振手段を設けてあり、薄膜ヒータの加熱手段による間欠加熱時の薄膜を構成する主たる二層の熱膨張の違いに基づく反り曲がりを利用して励振手段にしたこと、主たる二層として熱膨張係数に非常に大きな差があるシリコン層とシリコン熱酸化膜を使用する。
【選択図】図2
Description
10、10A、10B 薄膜
11 SOI層
12 下地基板
15 カンチレバ
20 温度差センサ
21 n型拡散領域(SOI層)
24 熱電対
25 熱電対ヒータ部
29 オーム性コンタクト
40 空洞
42 スリット
45 熱抵抗部
50 シリコン酸化膜
51 BOX層(シリコン酸化膜)
70a、70b 電極パッド
71a、71b 電極パッド
100 熱伝導型センサチップ
110 配線
120a, 120b 熱電対導体
Claims (3)
- 基板から熱分離した薄膜に、少なくとも1個の薄膜温度センサと該薄膜を昇温させる加熱手段および前記の薄膜を振動させる励振手段を具備した熱伝導型気圧センサにおいて、前記薄膜は、少なくとも膨張係数の異なる二層以上の薄膜からなり、前記励振手段として、前記加熱手段による間欠加熱時の前記薄膜を構成する主たる二層の熱膨張の違いに基づく反り曲がりを利用するようにしたことを特徴とする熱伝導型気圧センサ。
- 薄膜は、シリコンとシリコン酸化膜の主たる二層を含み、該シリコンとシリコン酸化膜との熱膨張係数の違いを利用した請求項1記載の熱伝導型気圧センサ。
- 加熱手段に薄膜ヒータを用いた請求項1または2のいずれかに記載の熱伝導型気圧センサ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008214713A JP5745205B2 (ja) | 2008-08-22 | 2008-08-22 | 加熱励振を利用した熱伝導型気圧センサ |
EP09808316A EP2330396A1 (en) | 2008-08-22 | 2009-08-21 | Heat conduction-type barometric sensor utilizing thermal excitation |
KR1020117006243A KR101537139B1 (ko) | 2008-08-22 | 2009-08-21 | 가열 여진을 이용한 열전도형 기압 센서 |
US13/060,183 US8453501B2 (en) | 2008-08-22 | 2009-08-21 | Heat conduction-type barometric sensor utilizing thermal excitation |
CN200980141673.6A CN102197293B (zh) | 2008-08-22 | 2009-08-21 | 利用加热激振的热传导式气压传感器 |
PCT/JP2009/064658 WO2010021380A1 (ja) | 2008-08-22 | 2009-08-21 | 加熱励振を利用した熱伝導型気圧センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008214713A JP5745205B2 (ja) | 2008-08-22 | 2008-08-22 | 加熱励振を利用した熱伝導型気圧センサ |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014150247A Division JP2014197037A (ja) | 2014-07-23 | 2014-07-23 | 加熱励振を利用した熱伝導型気圧センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010048726A true JP2010048726A (ja) | 2010-03-04 |
JP5745205B2 JP5745205B2 (ja) | 2015-07-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008214713A Expired - Fee Related JP5745205B2 (ja) | 2008-08-22 | 2008-08-22 | 加熱励振を利用した熱伝導型気圧センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8453501B2 (ja) |
EP (1) | EP2330396A1 (ja) |
JP (1) | JP5745205B2 (ja) |
KR (1) | KR101537139B1 (ja) |
CN (1) | CN102197293B (ja) |
WO (1) | WO2010021380A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013080208A (ja) * | 2011-09-20 | 2013-05-02 | Denso Corp | 光走査装置 |
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US20130188667A1 (en) * | 2007-08-29 | 2013-07-25 | Texas Instruments Incorporated | Apparatus and method to test embedded thermoelectric devices |
JP2010237118A (ja) * | 2009-03-31 | 2010-10-21 | Panasonic Electric Works Co Ltd | 赤外線アレイセンサ |
JP5874117B2 (ja) * | 2011-02-18 | 2016-03-02 | 学校法人東北学院 | 流体の温度と種類の影響を校正した熱伝導型センサと、これを用いた熱型フローセンサおよび熱型気圧センサ |
GB2491806B (en) | 2011-05-25 | 2013-07-10 | Microvisk Ltd | Apparatus and method for measuring properties of a fluid |
JP2013011556A (ja) * | 2011-06-30 | 2013-01-17 | Md Innovations Kk | 隔膜気圧計 |
CN102494836B (zh) * | 2011-11-29 | 2013-09-04 | 成都国光电气股份有限公司 | 一种热偶真空计 |
US8907433B2 (en) * | 2012-09-28 | 2014-12-09 | Agilent Technologies, Inc. | Thin film with improved temperature range |
CN103776568A (zh) * | 2012-10-18 | 2014-05-07 | 无锡华润上华半导体有限公司 | 压力传感器 |
FR3012881B1 (fr) | 2013-11-06 | 2015-11-27 | Commissariat Energie Atomique | Capteur de pression a resonateur electromagnetique |
EP3100017B1 (en) * | 2014-01-31 | 2020-04-29 | Nanotech Analysis S.R.L. | Electro-mechanical miniaturized device for pressure measurements |
WO2017009827A1 (en) * | 2015-07-12 | 2017-01-19 | Todos Technologies Ltd. | Pressure level sensing device and a method for sensing pressure |
IES86813B2 (en) * | 2015-08-14 | 2017-08-09 | Climote Ltd | Apparatus and methods for managing hot water in a hot water storage tank heating system |
JP6499566B2 (ja) * | 2015-11-27 | 2019-04-10 | 日立オートモティブシステムズ株式会社 | 気体センサ装置及び気体センサ装置の加熱電流制御方法 |
US10681777B2 (en) | 2016-04-01 | 2020-06-09 | Infineon Technologies Ag | Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures |
US10955599B2 (en) | 2016-04-01 | 2021-03-23 | Infineon Technologies Ag | Light emitter devices, photoacoustic gas sensors and methods for forming light emitter devices |
US10347814B2 (en) * | 2016-04-01 | 2019-07-09 | Infineon Technologies Ag | MEMS heater or emitter structure for fast heating and cooling cycles |
CN106918398B (zh) * | 2017-04-20 | 2019-06-18 | 安徽春辉仪表线缆集团有限公司 | 一种电脑cpu用测温热电偶结构 |
JP7055543B2 (ja) * | 2018-01-05 | 2022-04-18 | ハーン-シッカート-ゲゼルシャフト フュア アンゲヴァンテ フォアシュング アインゲトラーゲナー フェライン | ガスセンサおよびその動作方法 |
CN117309929A (zh) | 2018-01-05 | 2023-12-29 | 汉席克卡德应用研究协会 | 用于热学气体传感器的评估装置、方法和计算机程序 |
US10845263B2 (en) * | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
WO2020121576A1 (ja) * | 2018-12-12 | 2020-06-18 | 株式会社アルバック | 真空計及びこの真空計を備える圧力測定システム |
US11480479B2 (en) * | 2019-02-04 | 2022-10-25 | The Board Of Trustees Of The University Of Illinois | Microscale thermocouple probe for intracellular temperature measurements |
JP7252851B2 (ja) * | 2019-07-18 | 2023-04-05 | 横河電機株式会社 | 回路基板及び温度測定器 |
US11099093B2 (en) * | 2019-08-09 | 2021-08-24 | Rosemount Aerospace Inc. | Thermally-matched piezoresistive elements in bridges |
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CN112414609B (zh) * | 2021-01-25 | 2021-06-29 | 南京高华科技股份有限公司 | 一种基于热电堆原理的压力传感器 |
CN113029264B (zh) * | 2021-02-09 | 2022-12-30 | 青岛芯笙微纳电子科技有限公司 | 一种高灵敏度的mems流量传感器及其制作方法 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04304679A (ja) * | 1991-04-01 | 1992-10-28 | Nissan Motor Co Ltd | 圧力センサ |
JPH08122107A (ja) * | 1994-10-25 | 1996-05-17 | Ricoh Seiki Co Ltd | 熱依存性検出装置 |
JP2004286492A (ja) * | 2003-03-19 | 2004-10-14 | Japan Science & Technology Agency | 気体センシングシステムとこれに用いる温度センサ |
JP2006153782A (ja) * | 2004-11-30 | 2006-06-15 | Mitsuteru Kimura | 多孔蓋を有した気体センシングデバイス |
JP2007051963A (ja) * | 2005-08-19 | 2007-03-01 | Mitsuteru Kimura | 熱型気圧センサとこれを用いた気圧計測装置 |
JP2008111822A (ja) * | 2006-10-04 | 2008-05-15 | Mitsuteru Kimura | ガスセンサ素子およびこれを用いたガス濃度測定装置 |
Family Cites Families (2)
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ATE174450T1 (de) * | 1990-07-06 | 1998-12-15 | Tsubochi Kazuo | Verfahren zur herstellung einer metallschicht |
JP4304679B1 (ja) | 2008-03-21 | 2009-07-29 | 友康 谷貝 | 吊具 |
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2008
- 2008-08-22 JP JP2008214713A patent/JP5745205B2/ja not_active Expired - Fee Related
-
2009
- 2009-08-21 EP EP09808316A patent/EP2330396A1/en not_active Withdrawn
- 2009-08-21 CN CN200980141673.6A patent/CN102197293B/zh not_active Expired - Fee Related
- 2009-08-21 WO PCT/JP2009/064658 patent/WO2010021380A1/ja active Application Filing
- 2009-08-21 KR KR1020117006243A patent/KR101537139B1/ko active IP Right Grant
- 2009-08-21 US US13/060,183 patent/US8453501B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04304679A (ja) * | 1991-04-01 | 1992-10-28 | Nissan Motor Co Ltd | 圧力センサ |
JPH08122107A (ja) * | 1994-10-25 | 1996-05-17 | Ricoh Seiki Co Ltd | 熱依存性検出装置 |
JP2004286492A (ja) * | 2003-03-19 | 2004-10-14 | Japan Science & Technology Agency | 気体センシングシステムとこれに用いる温度センサ |
JP2006153782A (ja) * | 2004-11-30 | 2006-06-15 | Mitsuteru Kimura | 多孔蓋を有した気体センシングデバイス |
JP2007051963A (ja) * | 2005-08-19 | 2007-03-01 | Mitsuteru Kimura | 熱型気圧センサとこれを用いた気圧計測装置 |
JP2008111822A (ja) * | 2006-10-04 | 2008-05-15 | Mitsuteru Kimura | ガスセンサ素子およびこれを用いたガス濃度測定装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013080208A (ja) * | 2011-09-20 | 2013-05-02 | Denso Corp | 光走査装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102197293A (zh) | 2011-09-21 |
US20120118060A1 (en) | 2012-05-17 |
KR20110067100A (ko) | 2011-06-21 |
EP2330396A1 (en) | 2011-06-08 |
CN102197293B (zh) | 2014-10-08 |
US8453501B2 (en) | 2013-06-04 |
JP5745205B2 (ja) | 2015-07-08 |
KR101537139B1 (ko) | 2015-07-16 |
WO2010021380A1 (ja) | 2010-02-25 |
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