JP2010013344A - 炭化硅素(SiC)セラミック材料、その製造方法、食器、重粘土製品、および衛生陶器製品の焼成のための焼成用道具材、ならびに複合セラミック体 - Google Patents
炭化硅素(SiC)セラミック材料、その製造方法、食器、重粘土製品、および衛生陶器製品の焼成のための焼成用道具材、ならびに複合セラミック体 Download PDFInfo
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Abstract
【解決手段】本発明は新規のSiCセラミック材料とその製造方法に関する。本発明の炭化硅素(SiC)材料は、炭化硅素(SiC)セラミック材料であって、セラミック材料が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部と非凝集SiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とするセラミック材料二峰性である。
【選択図】図1
Description
本発明は新規の炭化硅素(SiC)系セラミック材料、同材料から成るセラミック体、及びその製造方法に関する。
炭化硅素(SiC)は最も重要な非酸化物セラミック材料の一つである。炭化硅素は硬く、また熱伝導性や化学的安定性(腐食抵抗)も高いため、様々な用途で広く使用される魅力的な材料である。しかし、非酸化物セラミック材料の焼結過程は複雑で高価となりやすい。焼結条件にばらつきがあると、セラミック材料の最終的特性には大きな影響が出る。
本明細書で述べる通り、本発明は炭化硅素(SiC)セラミック材料に関し、このセラミック材料は炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とする。一実施形態において、炭化硅素粒子の粒度分布は二峰性であることがより好ましい。
a) SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性の粒度分布を有する炭化硅素粒子の混合物を提供し、
b) 工程aの混合物を、無機バナジウム化合物、酸化イットリウム(Y2O3)、イットリウム・アルミナ組成物、イットリウム・アルミナ・ガーネット(YAG)、イットリウム・シリケート組成物、イットリウム・アルミナ・シリカ組成物、アルミナ・シリケート組成物、マグネシア・アルミナ組成物、マグネシア・アルミナ・スピネル組成物、シリカから選択される1又は複数の化合物から成る結合剤と混合し、結合剤は乾燥組成物中に合計で0.1〜10重量%で存在し、
c) 組成物に成型工程を施しセラミック素地を得て、
d) セラミック素地に、第1焼成工程を酸素含有雰囲気存在下で行なう一連の焼成工程から成る焼成サイクルを施すことを特徴とする。
a) SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性の粒度分布を有する炭化硅素粒子の混合物を提供し、
b) 工程aの混合物を、無機バナジウム化合物、酸化イットリウム(Y2O3)、イットリウム・アルミナ組成物、イットリウム・アルミナ・ガーネット(YAG)、イットリウム・シリケート組成物、イットリウム・アルミナ・シリカ組成物、アルミナ・シリケート組成物、マグネシア・アルミナ組成物、マグネシア・アルミナ・スピネル組成物、シリカから選択される1又は複数の化合物から成る結合剤と混合し、結合剤は乾燥組成物中に合計で0.1〜10重量%で存在し、
c) 組成物に、好ましくは鋳造工程を含む成型工程を施し、食器、衛生陶器、重粘土製品等の焼成用の、炉用支持具セラミック素地体を得て、
d) 食器、衛生陶器、重粘土製品等の焼成用の炉用支持具セラミック素地体に、第1焼成工程を酸素含有雰囲気存在下で行なう一連の焼成工程から成る焼成サイクルを施すことを特徴とする。
囲で存在する。炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であることが好ましい。
本発明のSiCセラミック材料は、最終製品におけるSiC粒度分布が少なくとも二峰性であることを特徴とする。SiC大粒は酸化物結合相中に埋め込まれ、同酸化物結合相はさらにSiC細粒を含んでいる。
せることで得られる。SiC粒子表面が酸化する結果、SiO2が形成されるが、これは主な酸化物結合相として存在するか、あるいは以下の実施例で述べるようにその他の酸化物相と共に存在する。
A:外表面にSiO2を主成分とする非晶質層を形成し、製品の内部断面を密封してSiCが過度に、すなわち破壊的に酸化するのを防ぎ、
B:さらに結晶化過程を加えればSiC粒子間に均質な化学結合部が形成される。
A:30〜60重量%の緻密な極細粒子結合マトリックスにより、ミクロン、サブミクロンレベルでのSiC細粒のSiO2結合が非常に緩やかに、かつ制御し易く進み、さらに、SiC粗粒は粗粒同士が直接接触することなく埋め込まれる(図1〜12)。この結合マトリックスはSiC細粒と、SiO2と、無機バナジウム化合物、酸化イットリウム(Y2O3)、イットリウム・アルミナ組成物、イットリウム・アルミナ・ガーネット(YAG)、イットリウム・シリケート組成物、イットリウム・アルミナ・シリカ組成物、アルミナ・シリケート組成物、マグネシア・アルミナ組成物、マグネシア・アルミナ・スピネル組成物、シリカから選択される1又は複数の化合物から成る結合剤とから成り、その微細構造中に細孔を有し(図1〜12)、これが炉用支持具としての使用から発生する熱サイクルによる熱機械的ストレスを相殺すると考えられる。本明細書中で述べるように高純度SiC及び高純度焼結添加剤を用いる結果、SiC細粒表面の酸化もまた高純度で行われ、これにより非晶質相含有量が非常に低くなり、負荷及び高温下の極めて高いクリープ抵抗が得られる。
B:従来の鋳造法、低圧鋳造、高圧鋳造などのスリップ鋳込み成形法に特に適したスリップ組成物は、粘性が低いながら含水量は低く、非常に安定した流動学的特性を有する。これにより、重粘土製品用の軽量Hカセットや食器用の二重セッターなどの、複雑形状で薄壁の炉用支持具を製造する上で有利となる。ここで、壁厚みは8mm又は7mm又は6mm又は5mm又は4mm又は3mmの範囲とすることができるが、これに限られない。
A.方法及び機器
スラリーの粘性は、30SWGねじりワイヤ及び1/4インチシリンダを用い、GALLENKAMP社製のねじり粘度計VHA−200−Mにて測定した。
曲げ強度は、150x20x8mmの試料の焼成表面に対して、120mm範囲で負荷速度0.15MPa/secにて3点曲げ試験を行い測定した。機器は、METEFEM社製の曲げ試験機XP−01のMH−1/AS102型を使用した。
加熱工程 加熱速度0.69℃/分で100−700℃
酸化工程 700−800℃で35時間
加熱工程 加熱速度0.73℃/分で800−1400℃
浸漬時間 1400℃にて4時間
冷却工程 冷却速度1.12℃/分で1400−200℃
変形は焼成前及び焼成後の試料の平坦度差として記録している。図4に平坦度測定機器を示している。
加熱工程 加熱速度3.1℃/分で100−1330℃
浸漬時間 1330℃にて3時間
冷却工程 冷却速度4.1℃/分で1330−100℃
熱膨張率はNetsch社製膨張計402Eにて加熱速度10℃/分にて測定した。試料の支持体にはAl2O3を用いた。
以下の実施例を用いて本発明をさらに説明する。
スラリー調合は6kg単位で行なう。水と解膠剤を混ぜ合わせる。結合剤を形成する成分を加え、混合物を15分間均質化する。SiC粉末の細粒分を加え、スラリーを1時間均質化する。SiC粉末の粗粒分を加え、スラリーを再び1時間均質化する。スラリーを鋳造する前に24時間低速撹拌し続ける。
鋳造:
試料の成形は石膏型を用い従来の鋳造法で行なう。試料は150x20x8mm寸法で棒状に鋳造する。約60分間の固化時間後、棒状素地を型から取り出す。試料を空気中で2時間乾燥させた後、110℃の乾燥機内に3時間置く。
焼成:
焼成はガス炉にて次のサイクルで行なう:
加熱工程 加熱速度0.69℃/分で100−700℃(酸素:6〜10%)
酸化工程 700−800℃で35時間(酸素:6〜10%)
加熱工程 加熱速度0.73℃/分で800−1300℃、酸素量低下(酸素:4〜8%)
加熱工程 加熱速度0.73℃/分で1300−1410℃(一酸化炭素:1〜2.5%)
浸漬時間 1410℃にて4時間(一酸化炭素:1〜2.5%)
冷却工程 冷却速度1.12℃/分にて1300−200℃(酸素:20〜21%)
全15個の実施例を作製した。実施例に使用したスラリーの厳密な組成は表1に示す通りである。得られたセラミック材料の特性を表2、表3にそれぞれまとめる。
Claims (23)
- 炭化硅素(SiC)セラミック材料であって、セラミック材料が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部と非凝集SiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とするセラミック材料。
- SiC細粒の平均粒度が0.5〜6μm、好ましくは1.0〜5.0μm、より好ましくは1.0〜3.0μmの範囲である請求項1に記載のセラミック材料。
- SiC大粒の平均粒度が50〜800μm、好ましくは50〜100μm、より好ましくは60〜80μmの範囲、あるいは、好ましくは500〜800μm、より好ましくは600〜700μmの範囲である請求項1又は2に記載のセラミック材料。
- 酸化物結合相が、セラミック材料の全重量に基づく5〜25重量%、好ましくは5〜15重量%の範囲のクリストバライトから成る請求項1〜3のいずれか一項に記載のセラミック材料。
- 酸化物結合相がさらに、アルミニウム、マグネシウム、イットリウム、バナジウムから選択される1又は複数の元素を含む請求項4に記載のセラミック材料。
- 材料の曲げ強度(MOR)が25〜200MPa、好ましくは60〜170MPa、より好ましくは80〜150MPaの範囲であることを特徴とする請求項1〜5のいずれか一項に記載のセラミック材料。
- 材料の熱クリープ抵抗が0.01〜4mm、好ましくは0.01〜1mm、より好ましくは0.01〜0.2mmの範囲であることを特徴とする請求項1〜6のいずれか一項に記載のセラミック材料。
- 室温から1000℃までの熱膨張係数が4x10−6K−1〜6x10−6K−1の範囲であることを特徴とする請求項1〜7のいずれか一項に記載のセラミック材料。
- SiC細粒部分が組成の30〜60重量%を占めることを特徴とする請求項1〜8のいずれか一項に記載のセラミック材料。
- SiC粗粒部分が組成の70〜40重量%を占めることを特徴とする請求項1〜9のいずれか一項に記載のセラミック材料。
- a)SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性の粒度分布を有する炭化硅素粒子の混合物を提供し、
b)工程aの混合物を、無機バナジウム化合物、酸化イットリウム(Y2O3)、イットリウム・アルミナ組成物、イットリウム・アルミナ・ガーネット(YAG)、イットリウム・シリケート組成物、イットリウム・アルミナ・シリカ組成物、アルミナ・シリケート組成物、マグネシア・アルミナ組成物、マグネシア・アルミナ・スピネル組成物、シリカから選択される1又は複数の化合物から成る結合剤と混合し、結合剤は乾燥組成物中に合計で0.1〜10重量%で存在し、
c)組成物に成型工程を施しセラミック素地を得て、
d)セラミック素地に、第1焼成工程を酸素含有雰囲気存在下で行なう一連の焼成工程から成る焼成サイクルを施すことを特徴とする、請求項1に記載の炭化硅素セラミック材料
の製造過程。 - 成型工程がスリップ鋳込み成形から成る請求項11に記載の過程。
- 焼成サイクルが2以上の焼成工程から成る請求項11に記載の方法。
- 第1焼成工程の雰囲気が6〜10容量%の酸素ガスから成る請求項11に記載の方法。
- 第1焼成工程が室温から1300℃の温度範囲で、好ましくは500〜1000℃の延長酸化期間を設けて行なわれる請求項11に記載の方法。
- 第2焼成工程が1200〜1550℃、好ましくは1300〜1450℃の温度範囲にて行なわれる請求項13に記載の方法。
- 第2焼成工程が1200〜1550℃、好ましくは1300〜1450℃の温度範囲にて行なわれ、雰囲気が1〜2.5容量%の一酸化炭素から成る請求項11〜16のいずれか一項に記載の方法。
- SiC細粒部分のd50値が1.0〜5.0μm、好ましくは1.0〜3.0μmの範囲であり、全組成中の30〜60重量%を占める請求項11に記載の方法。
- SiC大粒部分のd50値が50〜100μm、好ましくは60〜80μmの範囲であり、あるいは500〜800μm、好ましくは600〜700μmの範囲であり、組成中の70〜40重量%を占める請求項11に記載の方法。
- 炭化硅素(SiC)セラミック材料から成る食器焼成用の炉用支持具製品であって、セラミック材料が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とする、炉用支持具製品。
- 炭化硅素(SiC)セラミック材料から成る重粘土製品焼成用の炉用支持具製品であって、セラミック材料が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とする、炉用支持具製品。
- 炭化硅素(SiC)セラミック材料から成る衛生陶器製品焼成用の炉用支持具製品であって、セラミック材料が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であることを特徴とする、炉用支持具製品。
- SiO2から成る外側保護層に囲まれる酸化物結合炭化硅素芯部から成るセラミック複合体であって、前記酸化物結合炭化硅素芯部が炭化硅素粒子及び1又は複数の酸化物結合相から成り、炭化硅素がセラミック材料の全重量に基づき少なくとも70重量%、好ましくは80重量%、より好ましくは80〜95重量%の範囲で存在し、炭化硅素粒子の粒度
分布が、SiC細粒の少なくとも一部とSiC大粒の少なくとも一部を含む少なくとも二峰性であるセラミック複合体。
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