JP2009534533A - 全体としてコンパクトな粒状ミクロ構造をもつ材料にチタンおよび窒化物を拡散する方法、およびこの方法によって製造した製品 - Google Patents
全体としてコンパクトな粒状ミクロ構造をもつ材料にチタンおよび窒化物を拡散する方法、およびこの方法によって製造した製品 Download PDFInfo
- Publication number
- JP2009534533A JP2009534533A JP2009506685A JP2009506685A JP2009534533A JP 2009534533 A JP2009534533 A JP 2009534533A JP 2009506685 A JP2009506685 A JP 2009506685A JP 2009506685 A JP2009506685 A JP 2009506685A JP 2009534533 A JP2009534533 A JP 2009534533A
- Authority
- JP
- Japan
- Prior art keywords
- carbide
- substrate
- titanium
- salt bath
- treated product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 139
- 239000010936 titanium Substances 0.000 title claims abstract description 139
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 title claims abstract description 71
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 50
- 239000000463 material Substances 0.000 title claims description 33
- 239000000758 substrate Substances 0.000 claims abstract description 137
- 150000003839 salts Chemical class 0.000 claims abstract description 78
- 229910052751 metal Inorganic materials 0.000 claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 28
- 238000000576 coating method Methods 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- ZVCDLGYNFYZZOK-UHFFFAOYSA-M sodium cyanate Chemical compound [Na]OC#N ZVCDLGYNFYZZOK-UHFFFAOYSA-M 0.000 claims abstract description 11
- GKKCIDNWFBPDBW-UHFFFAOYSA-M potassium cyanate Chemical compound [K]OC#N GKKCIDNWFBPDBW-UHFFFAOYSA-M 0.000 claims abstract description 10
- PFUVRDFDKPNGAV-UHFFFAOYSA-N sodium peroxide Chemical compound [Na+].[Na+].[O-][O-] PFUVRDFDKPNGAV-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000005868 electrolysis reaction Methods 0.000 claims abstract description 6
- 150000003609 titanium compounds Chemical class 0.000 claims abstract description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 21
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 15
- 238000005240 physical vapour deposition Methods 0.000 claims description 12
- 238000011282 treatment Methods 0.000 claims description 11
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 10
- INZDTEICWPZYJM-UHFFFAOYSA-N 1-(chloromethyl)-4-[4-(chloromethyl)phenyl]benzene Chemical compound C1=CC(CCl)=CC=C1C1=CC=C(CCl)C=C1 INZDTEICWPZYJM-UHFFFAOYSA-N 0.000 claims description 9
- 229910026551 ZrC Inorganic materials 0.000 claims description 9
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims description 9
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 9
- 239000011780 sodium chloride Substances 0.000 claims description 9
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 9
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 9
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910001567 cementite Inorganic materials 0.000 claims description 7
- 239000010942 ceramic carbide Substances 0.000 claims description 7
- GVEHJMMRQRRJPM-UHFFFAOYSA-N chromium(2+);methanidylidynechromium Chemical compound [Cr+2].[Cr]#[C-].[Cr]#[C-] GVEHJMMRQRRJPM-UHFFFAOYSA-N 0.000 claims description 7
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 claims description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
- 229910003470 tongbaite Inorganic materials 0.000 claims description 7
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 6
- NWYRNCMKWHKPAI-UHFFFAOYSA-N C(=O)=O.[Na] Chemical compound C(=O)=O.[Na] NWYRNCMKWHKPAI-UHFFFAOYSA-N 0.000 claims description 5
- 238000005524 ceramic coating Methods 0.000 claims description 5
- 239000002103 nanocoating Substances 0.000 claims description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 5
- 238000007654 immersion Methods 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 3
- 229910052580 B4C Inorganic materials 0.000 claims 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims 5
- 238000003672 processing method Methods 0.000 claims 2
- 238000004381 surface treatment Methods 0.000 abstract description 16
- 239000011241 protective layer Substances 0.000 description 35
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 229910000831 Steel Inorganic materials 0.000 description 12
- 150000001247 metal acetylides Chemical class 0.000 description 12
- 239000010959 steel Substances 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 8
- 229910052742 iron Inorganic materials 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- 229910001092 metal group alloy Inorganic materials 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 150000003608 titanium Chemical class 0.000 description 5
- 229910000851 Alloy steel Inorganic materials 0.000 description 4
- 239000010962 carbon steel Substances 0.000 description 4
- 230000003197 catalytic effect Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- KSOKAHYVTMZFBJ-UHFFFAOYSA-N iron;methane Chemical compound C.[Fe].[Fe].[Fe] KSOKAHYVTMZFBJ-UHFFFAOYSA-N 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 4
- 159000000000 sodium salts Chemical class 0.000 description 4
- 229910000975 Carbon steel Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 239000011651 chromium Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 229910001337 iron nitride Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- LIXWSNVLHFNXAJ-UHFFFAOYSA-N sodium;oxidoazaniumylidynemethane Chemical compound [Na+].[O-][N+]#[C-] LIXWSNVLHFNXAJ-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C12/00—Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces
- C23C12/02—Diffusion in one step
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B19/00—Layered products comprising a layer of natural mineral fibres or particles, e.g. asbestos, mica
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5062—Borides, Nitrides or Silicides
- C04B41/5068—Titanium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
- C23C10/20—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions only one element being diffused
- C23C10/24—Salt bath containing the element to be diffused
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
- C23C10/26—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions more than one element being diffused
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Electrolytic Production Of Metals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/405,947 US7732014B2 (en) | 2006-04-18 | 2006-04-18 | Process for diffusing titanium and nitride into a material having a generally compact, granular microstructure |
| PCT/US2007/066290 WO2008070197A2 (en) | 2006-04-18 | 2007-04-10 | Process for diffusing titanium and nitride into a material having a generally compact, granular microstructure and products produced thereby |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009534533A true JP2009534533A (ja) | 2009-09-24 |
| JP2009534533A5 JP2009534533A5 (enExample) | 2010-05-27 |
Family
ID=38605178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009506685A Pending JP2009534533A (ja) | 2006-04-18 | 2007-04-10 | 全体としてコンパクトな粒状ミクロ構造をもつ材料にチタンおよび窒化物を拡散する方法、およびこの方法によって製造した製品 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7732014B2 (enExample) |
| EP (1) | EP2004397A4 (enExample) |
| JP (1) | JP2009534533A (enExample) |
| KR (2) | KR20090060966A (enExample) |
| CA (1) | CA2649558A1 (enExample) |
| MX (1) | MX2008013365A (enExample) |
| WO (1) | WO2008070197A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102216815B1 (ko) * | 2020-07-02 | 2021-02-18 | 주식회사 티씨케이 | 탄화붕소 내플라즈마 부재를 포함하는 반도체 제조용 부품 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008030857A2 (en) * | 2006-09-05 | 2008-03-13 | Philos Jongho Ko | Sports equipment comprising diffused titanium nitride |
| CN111747748B (zh) * | 2020-06-24 | 2023-04-07 | 山东合创明业精细陶瓷有限公司 | 超高温防/隔热一体化ZrC/Zr2C复相材料及其制备方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020009551A1 (en) * | 1999-06-01 | 2002-01-24 | Jong Ho Ko | Process for heat treatment nitriding in the presence of titanium and products produced thereby |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3639641A (en) * | 1965-08-31 | 1972-02-01 | Shinzoh Satoh | Method for rapid manufacture of nitrided thick layer of super high hardness on ferrous metal articles |
| AT268003B (de) * | 1967-06-14 | 1969-01-27 | Plansee Metallwerk | Verwendung von Zerspanungswerkzeugen zur Stahlbearbeitung |
| AT301299B (de) * | 1970-09-09 | 1972-08-25 | Plansee Metallwerk | Verwendung von Zerspanungswerkzeugen zur Bearbeitung von Belag bildenden Stählen |
| US3787228A (en) * | 1971-11-12 | 1974-01-22 | Surfalloy Corp | Method of forming diffusion coatings |
| US3882579A (en) * | 1972-03-13 | 1975-05-13 | Granville Phillips Co | Anti-wear thin film coatings and method for making same |
| SE412417B (sv) * | 1973-01-18 | 1980-03-03 | Massachusetts Inst Technology | Skaerverktyg av volframkarbid och foerfarande foer dess tillverkning |
| US4019928A (en) * | 1973-03-05 | 1977-04-26 | Duetsche Gold- Und Silber-Scheideanstalt Vormals Roessler | Process for nitriding iron and steel in salt baths regenerated with triazine polymers |
| US3916052A (en) * | 1973-05-16 | 1975-10-28 | Airco Inc | Coating of carbon-containing substrates with titanium carbide |
| US4399168A (en) * | 1980-01-21 | 1983-08-16 | Santrade Ltd. | Method of preparing coated cemented carbide product |
| JPS575859A (en) * | 1980-06-13 | 1982-01-12 | Shinzo Sato | High temperature electrolytic nitriding method |
| WO1982003094A1 (en) * | 1981-03-05 | 1982-09-16 | Metal Techn Inc Turbine | Abrasion and erosion resistant articles and method therefor |
| US4343865A (en) * | 1981-06-24 | 1982-08-10 | General Electric Company | Hard metal body and method of making same |
| DE3142318A1 (de) | 1981-10-24 | 1983-05-05 | Degussa Ag, 6000 Frankfurt | Salzbad zum nitrieren von eisenwerkstoffen |
| US4492004A (en) * | 1982-12-03 | 1985-01-08 | Hans Oetiker | Earless clamp structure |
| US4614341A (en) * | 1984-07-19 | 1986-09-30 | David Fernandez | Tennis racket frame made of metal oxide fibers and ceramic particles |
| JPS61253365A (ja) * | 1985-05-02 | 1986-11-11 | Sumitomo Electric Ind Ltd | 表面被覆体 |
| DE3515919A1 (de) * | 1985-05-03 | 1986-11-06 | Fried. Krupp Gmbh, 4300 Essen | Verschleissfester beschichteter hartmetallkoerper und verfahren zu seiner herstellung |
| JPS63147882A (ja) * | 1986-12-10 | 1988-06-20 | 株式会社豊田中央研究所 | 表面処理方法 |
| US5976707A (en) * | 1996-09-26 | 1999-11-02 | Kennametal Inc. | Cutting insert and method of making the same |
| US5948177A (en) * | 1997-03-17 | 1999-09-07 | Hardinge Inc. | Collet metal treating process |
| US6107225A (en) * | 1997-10-23 | 2000-08-22 | Agency Of Industrial Science And Technology | High-temperature ceramics-based composite material and its manufacturing process |
| US6645566B2 (en) * | 1999-06-01 | 2003-11-11 | Jong Ho Ko | Process for heat treatment nitriding in the presence of titanium and products produced thereby |
| US6410086B1 (en) * | 1999-11-26 | 2002-06-25 | Cerel (Ceramic Technologies) Ltd. | Method for forming high performance surface coatings and compositions of same |
| US6723389B2 (en) * | 2000-07-21 | 2004-04-20 | Toshiba Tungaloy Co., Ltd. | Process for producing coated cemented carbide excellent in peel strength |
| KR100513563B1 (ko) * | 2002-05-21 | 2005-09-09 | 고종호 | 티탄 존재 하에서의 금속 모재의 질화 열처리방법 |
| US7438769B2 (en) * | 2006-04-18 | 2008-10-21 | Philos Jongho Ko | Process for diffusing titanium and nitride into a material having a coating thereon |
| WO2008030857A2 (en) * | 2006-09-05 | 2008-03-13 | Philos Jongho Ko | Sports equipment comprising diffused titanium nitride |
-
2006
- 2006-04-18 US US11/405,947 patent/US7732014B2/en not_active Expired - Fee Related
-
2007
- 2007-04-10 MX MX2008013365A patent/MX2008013365A/es active IP Right Grant
- 2007-04-10 JP JP2009506685A patent/JP2009534533A/ja active Pending
- 2007-04-10 KR KR1020087028060A patent/KR20090060966A/ko not_active Ceased
- 2007-04-10 WO PCT/US2007/066290 patent/WO2008070197A2/en not_active Ceased
- 2007-04-10 EP EP07870941A patent/EP2004397A4/en not_active Withdrawn
- 2007-04-10 CA CA002649558A patent/CA2649558A1/en not_active Abandoned
- 2007-04-10 KR KR1020147003964A patent/KR101470291B1/ko active Active
-
2010
- 2010-06-07 US US12/794,978 patent/US8092915B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020009551A1 (en) * | 1999-06-01 | 2002-01-24 | Jong Ho Ko | Process for heat treatment nitriding in the presence of titanium and products produced thereby |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102216815B1 (ko) * | 2020-07-02 | 2021-02-18 | 주식회사 티씨케이 | 탄화붕소 내플라즈마 부재를 포함하는 반도체 제조용 부품 |
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| Publication number | Publication date |
|---|---|
| KR20140043478A (ko) | 2014-04-09 |
| US8092915B2 (en) | 2012-01-10 |
| KR101470291B1 (ko) | 2014-12-05 |
| US20070243412A1 (en) | 2007-10-18 |
| EP2004397A4 (en) | 2012-06-06 |
| EP2004397A2 (en) | 2008-12-24 |
| WO2008070197A2 (en) | 2008-06-12 |
| US7732014B2 (en) | 2010-06-08 |
| US20100248931A1 (en) | 2010-09-30 |
| MX2008013365A (es) | 2009-04-15 |
| CA2649558A1 (en) | 2008-06-12 |
| WO2008070197A3 (en) | 2009-04-09 |
| KR20090060966A (ko) | 2009-06-15 |
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