JP2009529247A - 集積回路およびその形成方法(標準的直交回路のためのハイブリッド配向構造) - Google Patents
集積回路およびその形成方法(標準的直交回路のためのハイブリッド配向構造) Download PDFInfo
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Abstract
【解決手段】 本発明の実施形態の集積回路は、第1結晶配向を有する第1領域及び第2結晶配向を有する第2領域を含むハイブリッド配向基板(600)を備える。第1領域の第1結晶配向は、第2領域の第2結晶配向に平行でも垂直でもない。集積回路は、第1領域上の第1型デバイス(620)及び第2領域上の第2型デバイス(630)をさらに備え、ここで第1型デバイス(620)は、第2型デバイス(630)に平行又は垂直であり、第1型デバイス(620)は、互いに直交する第1電流(621)及び第2電流(622)を含み、第1(621)及び第2(622)電流のキャリア移動度は互いに等しい。具体的には、第1型デバイスはp型電界効果トランジスタ(PFET)を含み、第2型デバイスはn型電界効果トランジスタ(NFET)を含む。
【選択図】 図3
Description
より具体的には、実線は(110)ウェハ表面上のキャリア移動度を表し;点線は(111)ウェハ表面上のキャリア移動度を表し、破線は(100)ウェハ表面上のキャリア移動度を表す。従って、Yangは、n型電界効果トランジスタ(NFET)が(100)表面上に形成され、一方p型電界効果トランジスタ(PFET)が(110)表面上に形成される図3、図4の構造体を提案したが、その製造プロセスは図5乃至図10に示す。具体的には、図3は(110)シリコン・オン・インシュレータ24上のPFET20及び(100)シリコン・ハンドル・ウェハ25上のNFET21を示し、ここでSTI部材28は(100)シリコン・ハンドル(処理)ウェハ25の上部にある。さらに、図4は、(100)シリコン・オン・インシュレータ26上のNFET22及び(110)シリコン・ハンドル・ウェハ27上のPFET23を示し、ここでSTI部材28が(110)シリコン・ハンドル・ウェハ27の上部にある。
21、22:NFET
24、26、304:シリコン・オン・インシュレータ
25、27、300:シリコン・ハンドル・ウェハ
28:STI部材
302:埋め込み酸化物層(BOX)
306:窒化物層
307:ギャップ
308:スペーサ
310:ゲート及びスペーサ・デバイス
600:ハイブリッド配向基板
610:ノッチ
620:PFET
630:NFET
621、622、631、632:電流
Claims (20)
- 第1結晶配向を有する第1領域及び第2結晶配向を有する第2領域を含むハイブリッド配向基板(600)と、
前記第1領域上の第1型デバイス(620)と、
前記第2領域上の第2型デバイス(630)と
を備え
前記第1型デバイス(620)は、第1電流(621)及び第2電流(622)を含み、
前記第1電流(621)は前記第2電流(622)に直交し、
前記第1電流(621)の第1キャリア移動度は、前記第2電流(622)の第2キャリア移動度に等しい、
集積回路。 - 前記第1型デバイス(620)及び前記第2型デバイス(630)はトランジスタを含む、請求項1に記載の集積回路。
- 前記第1型デバイス(620)はp型電界効果トランジスタを含み、前記第2型デバイス(630)はn型電界効果トランジスタを含む、請求項2に記載の集積回路。
- 前記第1結晶配向は、前記第2結晶配向に対して平行及び垂直のうちの1つ以外である、請求項1に記載の集積回路。
- 第1結晶配向を有する第1領域及び第2結晶配向を有する第2領域を含むハイブリッド配向基板と、
前記第1領域上の第1型デバイス(620)と、
前記第2領域上の第2型デバイス(630)と
を備え
前記第1結晶配向は、前記第2結晶配向に対して平行及び垂直のうちの1つ以外である、
集積回路。 - 前記第1型デバイス(620)及び前記第2型デバイス(630)はトランジスタを含む、請求項5に記載の集積回路。
- 前記第1型デバイス(620)はp型電界効果トランジスタを含み、前記第2型デバイス(630)はn型電界効果トランジスタを含む、請求項6に記載の集積回路。
- 前記第1型デバイス(620)は、前記第2型デバイス(630)に対して平行及び垂直のうちの1つである、請求項5に記載の集積回路。
- 前記第1結晶配向と前記第2結晶配向の間の角度は、前記第1型デバイス(620)が第1電流(621)及び第2電流(622)を含み、前記第1電流(621)が前記第2電流(622)に直交するような角度である、請求項5に記載の集積回路。
- 前記第1型デバイス(620)は、第1電流(621)及び第2電流(622)を含み、前記第1電流(621)の第1キャリア移動度は、前記第2電流(622)の第2キャリア移動度に等しい、請求項5に記載の集積回路。
- 集積回路を形成する方法であって、
第1結晶配向を有する第1ウェハ(304)を、第2結晶配向を有する第2ウェハ(300)に、前記第1結晶配向が前記第2結晶配向に対して平行及び垂直のうちの1つ以外となるように貼付するステップと、
前記第1ウェハ(304)内に開口部(307)をエッチング形成するステップと、
前記開口部(307)を通して前記第2ウェハ(300)を成長させて前記第1ウェハ(304)内に第2ウェハ領域を形成するステップと、
前記第1ウェハ(304)上に第1型デバイス(620)を形成するステップと、
前記第2ウェハ領域上に第2型デバイス(630)を形成するステップと
を含む方法。 - 前記第1型デバイス(620)を前記形成するステップ及び前記第2型デバイス(630)を前記形成するステップは、トランジスタを形成するステップを含む、請求項11に記載の方法。
- 前記第1型デバイス(620)を前記形成するステップ及び前記第2型デバイス(630)を前記形成するステップは、p型電界効果トランジスタ及びn型電界効果トランジスタを形成するステップを含む、請求項12に記載の方法。
- 前記第2型デバイス(630)を前記形成するステップは、前記第1型デバイス(620)に対して平行及び垂直のうちの1つである前記第2型デバイス(630)を形成するステップを含む、請求項11に記載の方法。
- 前記第1ウェハ(304)を前記貼付するステップは、前記第1型デバイス(620)が第1電流(621)及び第2電流(622)を含み、前記第1電流(621)が前記第2電流(622)に直交するような角度で、前記第1ウェハ(304)を前記第2ウェハ(300)に貼付するステップを含む、請求項11に記載の方法。
- 前記第1型デバイス(620)を前記形成するステップは、第1電流(621)及び第2電流(622)を含む前記第1型デバイス(620)を形成するステップを含み、
前記第1電流(621)の第1キャリア移動度は、前記第2電流(622)の第2キャリア移動度に等しい、
請求項11に記載の方法。 - 集積回路を形成する方法であって、
第1結晶配向を有する第1ウェハ(304)を、第2結晶配向を有する第2ウェハ(300)に、前記第1結晶配向が前記第2結晶配向に対して平行及び垂直のうちの1つ以外となるように貼付するステップと、
前記第1ウェハ(304)内に開口部(307)をエッチング形成するステップと、
前記開口部(307)を通して前記第2ウェハ(300)を成長させて前記第1ウェハ(304)内に第2ウェハ領域を形成するステップと、
前記第1ウェハ(304)上に第1型デバイス(620)を形成するステップと、
前記第2ウェハ領域上に第2型デバイス(630)を形成するステップと
を含み、
前記第1ウェハ(304)を前記貼付するステップは、前記第1型デバイス(620)が第1電流(621)及び第2電流(622)を含み、前記第1電流(621)が前記第2電流(622)に直交するような角度で、前記第1ウェハ(304)を前記第2ウェハ(304)に貼付するステップを含む、
方法。 - 前記第1型デバイス(620)を前記形成するステップ及び前記第2型デバイス(630)を前記形成するステップは、p型電界効果トランジスタ及びn型電界効果トランジスタを形成するステップを含む、請求項17に記載の方法。
- 前記第2型デバイス(630)を前記形成するステップは、前記第1型デバイス(620)に対して平行及び垂直のうちの1つである前記第2型デバイス(630)を形成するステップを含む、請求項17に記載の方法。
- 前記第1型デバイス(620)を前記形成するステップは、第1電流(621)及び第2電流(622)を含む前記第1型デバイス(620)を形成するステップを含み、前記第1電流(621)の第1キャリア移動度は、前記第2電流(622)の第2キャリア移動度に等しい、請求項17に記載の方法。
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PCT/US2007/063275 WO2007103854A2 (en) | 2006-03-06 | 2007-03-05 | Hybrid orientation scheme for standard orthogonal circuits |
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US7432174B1 (en) * | 2007-03-30 | 2008-10-07 | Advanced Micro Devices, Inc. | Methods for fabricating semiconductor substrates with silicon regions having differential crystallographic orientations |
US7696573B2 (en) * | 2007-10-31 | 2010-04-13 | International Business Machines Corporation | Multiple crystallographic orientation semiconductor structures |
US8395216B2 (en) * | 2009-10-16 | 2013-03-12 | Texas Instruments Incorporated | Method for using hybrid orientation technology (HOT) in conjunction with selective epitaxy to form semiconductor devices with regions of different electron and hole mobilities and related apparatus |
US8415718B2 (en) | 2009-10-30 | 2013-04-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of forming epi film in substrate trench |
US9275911B2 (en) | 2012-10-12 | 2016-03-01 | Globalfoundries Inc. | Hybrid orientation fin field effect transistor and planar field effect transistor |
US20150263040A1 (en) * | 2014-03-17 | 2015-09-17 | Silicon Storage Technology, Inc. | Embedded Memory Device With Silicon-On-Insulator Substrate, And Method Of Making Same |
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JP2006040911A (ja) * | 2004-07-22 | 2006-02-09 | Renesas Technology Corp | 半導体装置及びその製造方法 |
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JP3038939B2 (ja) * | 1991-02-08 | 2000-05-08 | 日産自動車株式会社 | 半導体装置 |
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JPH04372166A (ja) * | 1991-06-21 | 1992-12-25 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JP2003188273A (ja) * | 2001-12-13 | 2003-07-04 | Tadahiro Omi | 相補型mis装置 |
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EP1997145A2 (en) | 2008-12-03 |
CN101385144B (zh) | 2010-12-15 |
TW200802715A (en) | 2008-01-01 |
TWI390673B (zh) | 2013-03-21 |
CN101385144A (zh) | 2009-03-11 |
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