JP2009525473A - ミニチュアばね要素とその製造方法 - Google Patents
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Abstract
Description
Claims (22)
- 検出域(10)を有するたわみ可能な本体(4)を備えたミニチュアばね要素(1、1′)であって、その導電率(σ)が、電子トンネル過程、イオン化過程或いはホッピング過程によって決定されることを特徴とするミニチュアばね要素。
- 検出域(10)の導電率(σ)の温度依存性が近似的に式lnσ〜t-γで与えられ、その特性指数(γ)が、0から1の間の値を有していることを特徴とする請求項1記載のばね要素。
- 検出域(10)が、母材(12)に埋設されその母材材料に比べて高い導電率を有するナノ粒子(14)で形成されていることを特徴とする請求項1又は2記載のばね要素。
- ナノ粒子(14)が金属質であることを特徴とする請求項3記載のばね要素。
- 金属ナノ粒子(14)が、化学的に安定な材料で形成されていることを特徴とする請求項4記載のばね要素。
- 母材(12)が、ポリマ材料および/又は金属含有構造要素で形成されていることを特徴とする請求項3から5の1つに記載のばね要素。
- 母材(12)が、有機材料、無機材料或いは誘電体の材料で形成されていることを特徴とする請求項3から5の1つに記載のばね要素。
- ナノ粒子(14)が、100nmまでの平均粒度を有していることを特徴とする請求項3から7の1つに記載のばね要素。
- 検出域(10)が、担体(16)上に設けられた被覆で形成されていることを特徴とする請求項1から8の1つに記載のばね要素。
- 本体(4)が検出域(10)を形成していることを特徴とする請求項18の1つに記載のばね要素。
- 本体(4)が、薄い膜として或いは長手方向に延びる棒の形態に形成されていることを特徴とする請求項1から10の1つに記載のばね要素。
- 本体(4)がプリズム状の横断面を有していることを特徴とする請求項11記載のばね要素。
- 探針尖端(20)を備えたカンチレバ(2)を有する原子間力顕微鏡における梁形探針であって、該カンチレバ(2)が請求項1から12の1つに記載のばね要素(1、1′)として形成されていることを特徴とする原子間力顕微鏡における梁形探針。
- 請求項13記載の梁形探針を備えていることを特徴とする原子間力顕微鏡ヘッド。
- 梁形探針の制御或いは測定データを基に測定対象物の表面形状を特徴づけるデータセットを発生する評価装置を備え、該評価装置が、データセットの発生時、カンチレバ(2)の導電率(σ)を特徴づける特性値を考慮することを特徴とする請求項14記載の原子間力顕微鏡ヘッド。
- 請求項1から12の1つに記載のばね要素(1、1′)を製造する方法であって、検出域(10)が、局所的エネルギ供給によって製造されることを特徴とするばね要素の製造方法。
- 基板(52)の近くの蒸着領域(54)にガス状で導入された複数の前駆物質(50)が、変換のためにエネルギ的に励起され、変換生成物が非揮発性固形物の形で基板(52)上に析出することを特徴とする請求項16記載の方法。
- 前駆物質(50)として、有機モノマ、無機モノマ、誘電体モノマ或いは有機金属のモノマ、オリゴマおよび/又はポリマが利用されることを特徴とする請求項17に記載の方法。
- 前駆物質(50)のエネルギ的励起に利用されるイオンビーム、光子ビーム或いは電子ビームが、基板(52)に対して横方向に或いは三次元的に、蒸着物(56)の所定の設定された幾何学的形状に従って制御されることを特徴とする請求項16から18の1つに記載の方法。
- 蒸着中における基板(52)の温度および/又は前駆物質源の温度が、蒸着領域(54)で求められた前駆物質(50)の蒸気圧力に関係して調節されることを特徴とする請求項17から19の1つに記載の方法。
- 前駆物質(50)の種類、量および/又は組成、蒸着領域(54)におけるガス圧、局所的エネルギ供給の強さ、照射持続時間、焦点の大きさ、基板材料および/又は基板温度等の複数のパラメータが、ばね要素(1、1′)が所定のばね定数および/又は所定の品質を有し、或いは検出域(10)が所定の導電率を有するように調整されることを特徴とする請求項17から20の1つに記載の方法。
- 梁形探針の変位が、探針の導電率を特徴づける測定値を基に求められることを特徴とする請求項14又は15記載の原子間力顕微鏡ヘッド(22)の運転方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102006004922A DE102006004922B4 (de) | 2006-02-01 | 2006-02-01 | Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb |
DE102006004922.5 | 2006-02-01 | ||
PCT/EP2007/000738 WO2007088018A1 (de) | 2006-02-01 | 2007-01-29 | Miniaturisiertes federelement und verfahren zu dessen herstellung |
Publications (3)
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JP2009525473A true JP2009525473A (ja) | 2009-07-09 |
JP2009525473A5 JP2009525473A5 (ja) | 2010-02-04 |
JP5137852B2 JP5137852B2 (ja) | 2013-02-06 |
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JP2008552730A Active JP5137852B2 (ja) | 2006-02-01 | 2007-01-29 | ミニチュアばね要素の製造方法 |
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US (1) | US7997125B2 (ja) |
EP (1) | EP2179266B1 (ja) |
JP (1) | JP5137852B2 (ja) |
KR (1) | KR101328064B1 (ja) |
CN (1) | CN101379383B (ja) |
AU (1) | AU2007211688A1 (ja) |
CA (1) | CA2640702A1 (ja) |
DE (1) | DE102006004922B4 (ja) |
RU (1) | RU2420747C2 (ja) |
WO (1) | WO2007088018A1 (ja) |
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US10384238B2 (en) | 2007-09-17 | 2019-08-20 | Rave Llc | Debris removal in high aspect structures |
US10330581B2 (en) | 2007-09-17 | 2019-06-25 | Rave Llc | Debris removal from high aspect structures |
KR100958070B1 (ko) * | 2008-06-26 | 2010-05-13 | 주식회사 코리아 인스트루먼트 | 탐침 및 탐침 제조 방법 |
DE102008052645A1 (de) | 2008-10-22 | 2010-05-06 | Nanoscale Systems Nanoss Gmbh | Elektrochemischer Sensor und Verfahren zu dessen Herstellung |
US10260968B2 (en) | 2013-03-15 | 2019-04-16 | Nano Composite Products, Inc. | Polymeric foam deformation gauge |
MX349262B (es) | 2013-03-15 | 2017-07-20 | Univ Brigham Young | Material compuesto usado como un medidor de deformacion. |
RU2579805C2 (ru) * | 2014-08-12 | 2016-04-10 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Способ повышения чувствительности электромагнитных датчиков пульсаций скорости преобразователей гидрофизических полей |
US9857246B2 (en) | 2014-09-17 | 2018-01-02 | Sensable Technologies, Llc | Sensing system including a sensing membrane |
WO2016112229A1 (en) | 2015-01-07 | 2016-07-14 | Nano Composite Products, Inc. | Shoe-based analysis system |
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EP3262425A1 (en) | 2015-02-26 | 2018-01-03 | Xallent, LLC | Systems and methods for manufacturing nano-electro-mechanical-system probes |
DE102018206278A1 (de) * | 2018-04-24 | 2019-10-24 | Carl Zeiss Smt Gmbh | Verfahren und Vorrichtung zum Entfernen eines Partikels von einer photolithographischen Maske |
DE102020107918B4 (de) * | 2020-03-23 | 2021-11-18 | Digital Diagnostics AG | Detektion von viren |
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DE102021107254A1 (de) | 2021-03-23 | 2022-09-29 | digid GmbH | Digitale Sensorvorrichtung zur Detektion eines Analyten in einer Probe |
DE102022121187B3 (de) | 2022-08-22 | 2024-01-18 | digid GmbH | Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe |
DE102022005110A1 (de) | 2022-08-22 | 2024-04-04 | digid GmbH | Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe |
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JP2006343213A (ja) * | 2005-06-09 | 2006-12-21 | Tdk Corp | 微細構造体、カンチレバー、走査型プローブ顕微鏡及び微細構造体の変形量測定方法 |
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SU907885A1 (ru) | 1980-06-27 | 1982-02-23 | Пензенский Филиал Всесоюзного Научно-Исследовательского Технологического Института Приборостроения | Зондова головка |
US5679888A (en) | 1994-10-05 | 1997-10-21 | Matsushita Electric Industrial Co., Ltd. | Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor |
US5540958A (en) | 1994-12-14 | 1996-07-30 | Vlsi Technology, Inc. | Method of making microscope probe tips |
DE19713719C2 (de) * | 1997-04-03 | 2002-11-14 | Kuehn Hans R | Sensor zur Messung physikalischer und / oder chemischer Größen und Verfahren zur Herstellung eines Sensors |
KR20080047629A (ko) * | 1998-12-02 | 2008-05-29 | 폼팩터, 인크. | 전기 접촉 구조체의 제조 방법 |
EP1226437B1 (en) | 1999-11-03 | 2004-08-11 | International Business Machines Corporation | Cantilever sensors and transducers |
RU2220429C2 (ru) | 2000-05-22 | 2003-12-27 | Закрытое акционерное общество "НТ-МДТ" | Способ формирования сенсорного элемента сканирующего зондового микроскопа |
AT410032B (de) | 2000-06-09 | 2003-01-27 | Lugstein Alois Dr | Verfahren zur herstellung einer vorrichtung für die gleichzeitige durchführung einer elektrochemischen und einer topographischen nahfeldmikroskopie |
JP2004134370A (ja) * | 2002-07-26 | 2004-04-30 | Matsushita Electric Ind Co Ltd | スイッチ |
KR100597067B1 (ko) | 2003-11-20 | 2006-07-07 | 한국기계연구원 | 탐침 팁에의 나노물질 조립장치 및 이 장치가 적용된주사탐침 현미경 |
KR100736358B1 (ko) | 2004-11-12 | 2007-07-06 | 재단법인서울대학교산학협력재단 | 탐침 현미경의 탐침 끝 부분에 나노구조가 선택적으로흡착되는 방법 및 그 탐침이 장착된 탐침 현미경 |
US7974871B2 (en) | 2006-12-29 | 2011-07-05 | International Business Machines Corporation | System and method for reordering meeting agenda items prior to the occurrence of the meeting based upon partial participation by the meeting participants |
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JP2006343213A (ja) * | 2005-06-09 | 2006-12-21 | Tdk Corp | 微細構造体、カンチレバー、走査型プローブ顕微鏡及び微細構造体の変形量測定方法 |
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AU2007211688A1 (en) | 2007-08-09 |
US20090025465A1 (en) | 2009-01-29 |
RU2420747C2 (ru) | 2011-06-10 |
RU2008135359A (ru) | 2010-03-10 |
EP2179266B1 (de) | 2012-10-17 |
US7997125B2 (en) | 2011-08-16 |
CA2640702A1 (en) | 2007-08-09 |
CN101379383A (zh) | 2009-03-04 |
CN101379383B (zh) | 2012-11-14 |
KR20090027186A (ko) | 2009-03-16 |
WO2007088018A1 (de) | 2007-08-09 |
DE102006004922B4 (de) | 2008-04-30 |
KR101328064B1 (ko) | 2013-11-13 |
JP5137852B2 (ja) | 2013-02-06 |
DE102006004922A1 (de) | 2007-08-09 |
EP2179266A1 (de) | 2010-04-28 |
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