JP5369186B2 - 電気化学的センサ及びその製造方法 - Google Patents
電気化学的センサ及びその製造方法 Download PDFInfo
- Publication number
- JP5369186B2 JP5369186B2 JP2011532535A JP2011532535A JP5369186B2 JP 5369186 B2 JP5369186 B2 JP 5369186B2 JP 2011532535 A JP2011532535 A JP 2011532535A JP 2011532535 A JP2011532535 A JP 2011532535A JP 5369186 B2 JP5369186 B2 JP 5369186B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- electrochemical sensor
- substrate
- detection region
- nanoparticles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Biochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
●環境保護)大気の質及び水質を測定する場合
●軍隊及び居住地の防護)毒物又は爆発物を検出する場合
●クロマトグラフィ
●例えば食品・飲料又は化粧品工業での品質保証における人工嗅覚としての使用
●環境保護)大気の質及び水質を測定する場合
●軍隊及び居住地の防護)毒物又は爆発物を検出する場合
●クロマトグラフィ
●例えば食品・飲料又は化粧品工業での品質保証における人工嗅覚としての使用
4 基体
10 検出領域
12 マトリックス
14 ナノ粒子
16 担持体
50 粒子
52 基板
54 蒸着ゾーン
56 蒸着物
γ 指数
σ 電気伝導率
Claims (17)
- 電子的なトンネルプロセス、イオン化プロセス又はホッピングプロセス、及び検出すべき標的物質と検出領域(10)との相互作用によって、その検出領域(10)の電気伝導率(σ)が規定されている、検出領域(10)を備えた電気化学的センサ(1)を製造するための方法であって、検出領域(10)が、局部的なエネルギー印加によって作製され、基板(52)の近くの蒸着領域(54)にガス状で供給される多数の前駆体物質(50)がエネルギー励起により転移させられ、その際に転移生成物が固体の不揮発性の形で基板(52)上に付着する電気化学的センサ(1)の製造方法。
- 検出領域(10)が、電子ビーム誘起蒸着によって、作製される請求項1に記載の方法。
- 前駆体物質(50)として、有機の、無機の、誘電性の又は有機金属のモノマー、オリゴマー又はポリマーが使用される請求項1又は2に記載の方法。
- 前駆体物質(50)のエネルギー励起のために用意されたイオンビーム、光子ビーム又は電子ビームが、蒸着物(56)の予め与えられた目標ジオメトリに依存して基板(52)に対して横方向又は3次元方向に案内される請求項1〜3のいずれか1項に記載の方法。
- 基板(52)の温度又は前駆体源の温度が、蒸着中に蒸着領域(54)内で検出される前駆体物質(50)の蒸気圧に依存して調節される請求項1〜4のいずれか1項に記載の方法。
- 前駆体物質(50)の量若しくは組成、蒸着領域(54)内のガス圧、局部的エネルギー印加の強度、それの入射時間、それの焦点サイズ、又は基板材料若しくは基板温度が、検出領域(10)が予め与えられた電気伝導率を有するように調整される請求項1〜5のいずれか1項に記載の方法。
- 請求項1〜6のいずれか1項に記載の製造方法によって得られる電気化学的センサ(1)。
- 検出領域(10)の電気伝導率(σ)の温度(T)に対する依存性が、lnσ〜T- γなる式によって近似的に与えられていて、その特性指数(γ)が0と1との間の値を有する請求項7に記載の電気化学的センサ(1)。
- 検出領域(10)が、マトリックス(12)の中に埋め込まれていてそのマトリックス材料に比べて高い電気伝導率を有するナノ粒子(14)から、形成されている請求項7又は8に記載の電気化学的センサ(1)。
- ナノ粒子(14)が金属である請求項9に記載の電気化学的センサ(1)。
- 金属のナノ粒子(14)が、化学的に安定な金属からなる請求項10に記載の電気化学的センサ(1)。
- マトリックス(12)が、ポリマー材料から、炭素を基礎とする化合物から、炭素・酸素化合物から、水素化合物から、フッ素化合物から又は金属を含む構造要素から、形成されている7〜11のいずれか1項に記載の電気化学的センサ(1)。
- マトリックス(12)が有機材料、無機材料又は誘電材料から形成されている、請求項7〜11のいずれか1項に記載の電気化学的センサ(1)。
- マトリックス(12)形成材料又はナノ粒子(14)形成材料が、予定された標的物質との期待される相互作用を考慮して選択されている請求項7〜13のいずれか1項に記載の電気化学的センサ(1)。
- ナノ粒子(14)が、100nmまでの平均粒子サイズを有する請求項7〜14のいずれか1項に記載の電気化学的センサ(1)。
- 検出領域(10)が、担持体(16)上に形成された被膜によって、構成されている請求項7〜15のいずれか1項に記載の電気化学的センサ(1)。
- 1つの共通な担持体(16)上に、マトリックス(12)若しくはナノ粒子(14)の材料選択又はナノ粒子(14)のサイズ若しくは密度に関して互いに異なる複数の検出領域(10)が配置されている請求項16に記載の電気化学的センサ(1)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200810052645 DE102008052645A1 (de) | 2008-10-22 | 2008-10-22 | Elektrochemischer Sensor und Verfahren zu dessen Herstellung |
DE102008052645.2 | 2008-10-22 | ||
PCT/EP2009/007563 WO2010046105A2 (de) | 2008-10-22 | 2009-10-22 | Elektrochemischer sensor und verfahren zu dessen herstellung |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012506543A JP2012506543A (ja) | 2012-03-15 |
JP2012506543A5 JP2012506543A5 (ja) | 2012-10-04 |
JP5369186B2 true JP5369186B2 (ja) | 2013-12-18 |
Family
ID=41718239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011532535A Active JP5369186B2 (ja) | 2008-10-22 | 2009-10-22 | 電気化学的センサ及びその製造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8907677B2 (ja) |
EP (1) | EP2344868A2 (ja) |
JP (1) | JP5369186B2 (ja) |
CN (1) | CN102257381A (ja) |
CA (1) | CA2777603A1 (ja) |
DE (1) | DE102008052645A1 (ja) |
RU (1) | RU2502992C2 (ja) |
WO (1) | WO2010046105A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB201207583D0 (en) * | 2012-05-01 | 2012-06-13 | Isis Innovation | Electrochemical detection method and related aspects |
US9857498B2 (en) * | 2014-06-05 | 2018-01-02 | Baker Hughes Incorporated | Devices and methods for detecting chemicals |
MD4495C1 (ro) * | 2016-09-09 | 2018-01-31 | Николай АБАБИЙ | Senzor de etanol pe bază de oxid de cupru |
US10145009B2 (en) | 2017-01-26 | 2018-12-04 | Asm Ip Holding B.V. | Vapor deposition of thin films comprising gold |
DE102018203842A1 (de) * | 2018-03-14 | 2019-09-19 | Robert Bosch Gmbh | Sensortag zur Detektion von Feinstaubpartikeln und Staubmaske |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4674320A (en) * | 1985-09-30 | 1987-06-23 | The United States Of America As Represented By The United States Department Of Energy | Chemoresistive gas sensor |
US4900405A (en) * | 1987-07-15 | 1990-02-13 | Sri International | Surface type microelectronic gas and vapor sensor |
US6344271B1 (en) * | 1998-11-06 | 2002-02-05 | Nanoenergy Corporation | Materials and products using nanostructured non-stoichiometric substances |
DE19713719C2 (de) * | 1997-04-03 | 2002-11-14 | Kuehn Hans R | Sensor zur Messung physikalischer und / oder chemischer Größen und Verfahren zur Herstellung eines Sensors |
DE69922776T2 (de) * | 1999-01-21 | 2005-12-08 | Sony International (Europe) Gmbh | Nanoteilchenstruktur zur Anwendung in einer elektronischen Anordnung, insbesondere in einem chemischen Sensor |
JP4137317B2 (ja) * | 1999-10-07 | 2008-08-20 | 独立行政法人科学技術振興機構 | 微小立体構造物、その製造方法及びその製造装置 |
DE60144014D1 (de) | 2001-07-19 | 2011-03-24 | Max Planck Gesellschaft | Chemische Sensoren aus Nanopartikel-Dendrimer-Komposit-Materialen |
US6881582B2 (en) * | 2001-11-08 | 2005-04-19 | Council Of Scientific And Industrial Research | Thin film ethanol sensor and a process for the preparation |
JP2004244649A (ja) * | 2003-02-10 | 2004-09-02 | National Institute For Materials Science | 2次元又は3次元ナノ構造物の作製方法 |
WO2005015792A2 (en) | 2003-08-06 | 2005-02-17 | Purdue Research Foundation | Fabrication of nanoparticle arrays |
JP2006005110A (ja) * | 2004-06-17 | 2006-01-05 | National Institute For Materials Science | 微細構造の作製方法及び作製装置 |
JP2006123150A (ja) * | 2004-11-01 | 2006-05-18 | National Institute For Materials Science | 電子ビーム誘起蒸着法を用いたナノ構造作成制御方法 |
JP5205062B2 (ja) * | 2005-02-10 | 2013-06-05 | イエダ リサーチ アンド デベロップメント カンパニー リミテッド | 酸化還元活性構造体およびそれを利用するデバイス |
EP1790977A1 (en) | 2005-11-23 | 2007-05-30 | SONY DEUTSCHLAND GmbH | Nanoparticle/nanofiber based chemical sensor, arrays of such sensors, uses and method of fabrication thereof, and method of detecting an analyte |
DE102006004922B4 (de) * | 2006-02-01 | 2008-04-30 | Nanoscale Systems Nanoss Gmbh | Miniaturisiertes Federelement und Verfahren zu dessen Herstellung, Balkensonde, Rasterkraftmikroskop sowie Verfahren zu dessen Betrieb |
DE602007001133D1 (de) | 2007-03-30 | 2009-06-25 | Sony Deutschland Gmbh | Verfahren zum Verändern der Empfindlichkeit und/oder Selektivität eines Chemieresistenzsensorarrays |
EP2215464B1 (en) | 2007-11-20 | 2015-10-07 | Technion Research & Development Foundation Ltd. | Sensor system, use of sensor and method for sensing based on cubic nanoparticles capped with an organic coating |
EP2175265A1 (en) * | 2008-10-08 | 2010-04-14 | IEE International Electronics & Engineering S.A.R.L. | Hydrogen sensor and production method thereof |
-
2008
- 2008-10-22 DE DE200810052645 patent/DE102008052645A1/de not_active Ceased
-
2009
- 2009-10-22 US US13/125,423 patent/US8907677B2/en active Active
- 2009-10-22 WO PCT/EP2009/007563 patent/WO2010046105A2/de active Application Filing
- 2009-10-22 CN CN2009801519338A patent/CN102257381A/zh active Pending
- 2009-10-22 JP JP2011532535A patent/JP5369186B2/ja active Active
- 2009-10-22 EP EP09771500A patent/EP2344868A2/de not_active Withdrawn
- 2009-10-22 RU RU2011120331/28A patent/RU2502992C2/ru active
- 2009-10-22 CA CA2777603A patent/CA2777603A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP2344868A2 (de) | 2011-07-20 |
US20120019258A1 (en) | 2012-01-26 |
JP2012506543A (ja) | 2012-03-15 |
CN102257381A (zh) | 2011-11-23 |
US8907677B2 (en) | 2014-12-09 |
RU2011120331A (ru) | 2012-11-27 |
WO2010046105A3 (de) | 2010-06-24 |
CA2777603A1 (en) | 2010-04-29 |
RU2502992C2 (ru) | 2013-12-27 |
WO2010046105A2 (de) | 2010-04-29 |
DE102008052645A1 (de) | 2010-05-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5137852B2 (ja) | ミニチュアばね要素の製造方法 | |
Shafiei et al. | Utilizing p-type native oxide on liquid metal microdroplets for low temperature gas sensing | |
Ramgir et al. | Nanowire‐based sensors | |
Abdelhalim et al. | Highly sensitive and selective carbon nanotube-based gas sensor arrays functionalized with different metallic nanoparticles | |
Ramgir et al. | Sub-ppm H2S sensing at room temperature using CuO thin films | |
KR101448111B1 (ko) | 표면 증강 라만 분광용 기판 및 이의 제조방법 | |
JP5369186B2 (ja) | 電気化学的センサ及びその製造方法 | |
Dobrokhotov et al. | Toward the nanospring-based artificial olfactory system for trace-detection of flammable and explosive vapors | |
US8580099B2 (en) | InN nanowire based multifunctional nanocantilever sensors | |
Di Francia et al. | Conductometric gas nanosensors | |
Cho et al. | Ten nanometer scale WO3/CuO heterojunction nanochannel for an ultrasensitive chemical sensor | |
Harale et al. | Single-step hydrothermally grown nanosheet-assembled tungsten oxide thin films for sensitive and selective NO 2 gas detection | |
Shtykov et al. | Nanomaterials and nanotechnologies in chemical and biochemical sensors: capabilities and applications | |
Hai et al. | Photodetector with superior functional capabilities based on monolayer WO3 developed by atomic layer deposition | |
Snow et al. | Disordered nanomaterials for chemielectric vapor sensing: A review | |
van Dorp et al. | The role of electron-stimulated desorption in focused electron beam induced deposition | |
Yu et al. | Y‐Doped ZnO Nanorods by Hydrothermal Method and Their Acetone Gas Sensitivity | |
Skotadis et al. | Chemical sensing based on double layer PHEMA polymer and platinum nanoparticle films | |
KR101976564B1 (ko) | 이온빔을 이용한 나노 주름 구조가 형성된 폴리머 및 이의 제조방법 | |
Jo et al. | Effects of thin-film thickness on sensing properties of SnO2-based gas sensors for the detection of H2S gas at ppm levels | |
Kim et al. | Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays | |
Ngamaroonchote et al. | Plasma‐Etched Nanosphere Conductivity‐Inverted Lithography (PENCIL): A Facile Fabrication of Size‐Tunable Gold Disc Array on ITO‐Coated Glass | |
Ieva et al. | Au nanoparticles as gate material for NOx field effect capacitive sensors | |
Segev-Bar et al. | In Situ and Real-Time Inspection of Nanoparticle Average Size in Flexible Printed Sensors | |
Jin et al. | Highly integrated synthesis of heterogeneous nanostructures on nanowire heater array |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120820 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120820 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130306 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130423 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130716 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130820 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130913 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5369186 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |