JP2009520955A - 特に座標測定機に用いられる、物体の表面走査のための走査システム - Google Patents

特に座標測定機に用いられる、物体の表面走査のための走査システム Download PDF

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JP2009520955A
JP2009520955A JP2008546175A JP2008546175A JP2009520955A JP 2009520955 A JP2009520955 A JP 2009520955A JP 2008546175 A JP2008546175 A JP 2008546175A JP 2008546175 A JP2008546175 A JP 2008546175A JP 2009520955 A JP2009520955 A JP 2009520955A
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Prior art keywords
light
scanning
transmission module
module
optical transmission
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JP2008546175A
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Japanese (ja)
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JP2009520955A5 (enExample
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クニュッテル,アレクサンダー
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アイシス・ゼントロニクス・ゲー・エム・ベー・ハー
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Publication of JP2009520955A publication Critical patent/JP2009520955A/ja
Publication of JP2009520955A5 publication Critical patent/JP2009520955A5/ja
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laminated Bodies (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2008546175A 2005-12-23 2006-12-02 特に座標測定機に用いられる、物体の表面走査のための走査システム Pending JP2009520955A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005062130A DE102005062130A1 (de) 2005-12-23 2005-12-23 Abtastsystem zum Abtasten einer Objektoberfläche, insbesondere für eine Koordinaten-Meßmaschine
PCT/EP2006/011586 WO2007079837A1 (de) 2005-12-23 2006-12-02 Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine

Publications (2)

Publication Number Publication Date
JP2009520955A true JP2009520955A (ja) 2009-05-28
JP2009520955A5 JP2009520955A5 (enExample) 2010-01-28

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JP2008546175A Pending JP2009520955A (ja) 2005-12-23 2006-12-02 特に座標測定機に用いられる、物体の表面走査のための走査システム

Country Status (8)

Country Link
US (1) US20100220369A1 (enExample)
EP (1) EP1963781B1 (enExample)
JP (1) JP2009520955A (enExample)
AT (1) ATE472089T1 (enExample)
AU (1) AU2006334831A1 (enExample)
CA (1) CA2634290A1 (enExample)
DE (2) DE102005062130A1 (enExample)
WO (1) WO2007079837A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180093891A (ko) * 2015-10-14 2018-08-22 슈투름 머쉬넨- & 안라겐바우 게엠베하 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502007001288D1 (de) 2007-01-02 2009-09-24 Isis Sentronics Gmbh Positionserkennungssystem zur berührungslosen interferometrischen Detektion der Ortsposition eines Zielobjektes und damit ausgestattetes Abtastsystem
DE102007008361B3 (de) 2007-02-16 2008-04-03 Isis Sentronics Gmbh Abtastsensorsystem zum berührungslosen optischen Abtasten von Objektoberflächen
FR2979143B1 (fr) 2011-08-16 2016-03-25 Univ Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
CN104121872B (zh) 2013-04-26 2018-04-13 通用电气公司 表面粗糙度测量装置
EP2977715B1 (en) 2014-07-23 2017-12-06 Tesa Sa Probe holder for measuring system
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
CN114434442B (zh) * 2022-01-21 2024-06-25 新拓三维技术(深圳)有限公司 一种基于协作机器人的自动化检测方法及系统
CN115265359B (zh) * 2022-06-23 2024-07-30 宿州捷创模具有限公司 汽车钣金验收检具

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151277A (ja) * 1988-09-30 1990-06-11 Rockwell Internatl Corp ピエゾ電気駆動装置及び方法
JPH07167620A (ja) * 1993-12-13 1995-07-04 Nikon Corp レーザ測定方法および測定針
JP2000321034A (ja) * 1999-05-14 2000-11-24 Olympus Optical Co Ltd 光イメージング装置
JP2001083077A (ja) * 1999-09-09 2001-03-30 Olympus Optical Co Ltd 光イメージング装置
JP2001510357A (ja) * 1996-10-01 2001-07-31 ライカ マイクロシステムス ハイデルベルク ゲゼルシャフト ミット ベシュレンクテル ハフツング 共焦点表面測定のための装置
JP2001211676A (ja) * 1999-12-21 2001-08-03 Koninkl Philips Electronics Nv 球体及び圧電駆動部を具えるアクチュエータ
JP2002513919A (ja) * 1998-05-04 2002-05-14 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 干渉計形測定装置
JP2005518535A (ja) * 2002-02-21 2005-06-23 クニュッテル,アレクサンダー 物体の光光学走査のための低コヒーレンス干渉装置
WO2005088241A1 (de) * 2004-03-13 2005-09-22 Knuettel Alexander Niederkohärenz-interferometrisches verfahren und gerät zur lichtoptischen abtastung von oberflächen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585379A (en) * 1980-12-27 1986-04-29 Hitachi, Ltd. Precision positioning device
DE60033272T2 (de) * 1999-03-03 2007-11-29 Riken, Wako Sondenartiger formmessaufnehmer sowie nc-bearbeitungsvorrichtung und formmessverfahren unter verwendung des messaufnehmers
US6687010B1 (en) * 1999-09-09 2004-02-03 Olympus Corporation Rapid depth scanning optical imaging device
DE10210750B4 (de) * 2002-03-12 2004-02-12 Precise Präzisionsspindeln GmbH Schnellfrequenzspindel
JP3908226B2 (ja) * 2004-02-04 2007-04-25 日本電産株式会社 スキャニング型レンジセンサ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02151277A (ja) * 1988-09-30 1990-06-11 Rockwell Internatl Corp ピエゾ電気駆動装置及び方法
JPH07167620A (ja) * 1993-12-13 1995-07-04 Nikon Corp レーザ測定方法および測定針
JP2001510357A (ja) * 1996-10-01 2001-07-31 ライカ マイクロシステムス ハイデルベルク ゲゼルシャフト ミット ベシュレンクテル ハフツング 共焦点表面測定のための装置
JP2002513919A (ja) * 1998-05-04 2002-05-14 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 干渉計形測定装置
JP2000321034A (ja) * 1999-05-14 2000-11-24 Olympus Optical Co Ltd 光イメージング装置
JP2001083077A (ja) * 1999-09-09 2001-03-30 Olympus Optical Co Ltd 光イメージング装置
JP2001211676A (ja) * 1999-12-21 2001-08-03 Koninkl Philips Electronics Nv 球体及び圧電駆動部を具えるアクチュエータ
JP2005518535A (ja) * 2002-02-21 2005-06-23 クニュッテル,アレクサンダー 物体の光光学走査のための低コヒーレンス干渉装置
WO2005088241A1 (de) * 2004-03-13 2005-09-22 Knuettel Alexander Niederkohärenz-interferometrisches verfahren und gerät zur lichtoptischen abtastung von oberflächen

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180093891A (ko) * 2015-10-14 2018-08-22 슈투름 머쉬넨- & 안라겐바우 게엠베하 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법
JP2018535407A (ja) * 2015-10-14 2018-11-29 シュトゥルム マシーネン ウント アラゲンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツングSturm Maschinen− & Anlagenbau GmbH 円筒状中空エンクロージャの表面を検査するセンサデバイスおよび方法
KR102087758B1 (ko) * 2015-10-14 2020-03-11 슈투름 머쉬넨- & 안라겐바우 게엠베하 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법

Also Published As

Publication number Publication date
EP1963781B1 (de) 2010-06-23
US20100220369A1 (en) 2010-09-02
DE502006007290D1 (de) 2010-08-05
EP1963781A1 (de) 2008-09-03
CA2634290A1 (en) 2007-07-19
ATE472089T1 (de) 2010-07-15
AU2006334831A1 (en) 2007-07-19
WO2007079837A1 (de) 2007-07-19
DE102005062130A1 (de) 2007-06-28

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