JP2009520955A - 特に座標測定機に用いられる、物体の表面走査のための走査システム - Google Patents
特に座標測定機に用いられる、物体の表面走査のための走査システム Download PDFInfo
- Publication number
- JP2009520955A JP2009520955A JP2008546175A JP2008546175A JP2009520955A JP 2009520955 A JP2009520955 A JP 2009520955A JP 2008546175 A JP2008546175 A JP 2008546175A JP 2008546175 A JP2008546175 A JP 2008546175A JP 2009520955 A JP2009520955 A JP 2009520955A
- Authority
- JP
- Japan
- Prior art keywords
- light
- scanning
- transmission module
- module
- optical transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 134
- 230000005540 biological transmission Effects 0.000 claims abstract description 118
- 239000012530 fluid Substances 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 15
- 230000033001 locomotion Effects 0.000 claims description 41
- 230000009471 action Effects 0.000 claims description 28
- 238000005259 measurement Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 13
- 238000007689 inspection Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
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- 108010076504 Protein Sorting Signals Proteins 0.000 description 1
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- 238000005286 illumination Methods 0.000 description 1
- 238000012994 industrial processing Methods 0.000 description 1
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- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Laminated Bodies (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005062130A DE102005062130A1 (de) | 2005-12-23 | 2005-12-23 | Abtastsystem zum Abtasten einer Objektoberfläche, insbesondere für eine Koordinaten-Meßmaschine |
| PCT/EP2006/011586 WO2007079837A1 (de) | 2005-12-23 | 2006-12-02 | Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009520955A true JP2009520955A (ja) | 2009-05-28 |
| JP2009520955A5 JP2009520955A5 (enExample) | 2010-01-28 |
Family
ID=37697847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008546175A Pending JP2009520955A (ja) | 2005-12-23 | 2006-12-02 | 特に座標測定機に用いられる、物体の表面走査のための走査システム |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20100220369A1 (enExample) |
| EP (1) | EP1963781B1 (enExample) |
| JP (1) | JP2009520955A (enExample) |
| AT (1) | ATE472089T1 (enExample) |
| AU (1) | AU2006334831A1 (enExample) |
| CA (1) | CA2634290A1 (enExample) |
| DE (2) | DE102005062130A1 (enExample) |
| WO (1) | WO2007079837A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180093891A (ko) * | 2015-10-14 | 2018-08-22 | 슈투름 머쉬넨- & 안라겐바우 게엠베하 | 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE502007001288D1 (de) | 2007-01-02 | 2009-09-24 | Isis Sentronics Gmbh | Positionserkennungssystem zur berührungslosen interferometrischen Detektion der Ortsposition eines Zielobjektes und damit ausgestattetes Abtastsystem |
| DE102007008361B3 (de) | 2007-02-16 | 2008-04-03 | Isis Sentronics Gmbh | Abtastsensorsystem zum berührungslosen optischen Abtasten von Objektoberflächen |
| FR2979143B1 (fr) | 2011-08-16 | 2016-03-25 | Univ Joseph Fourier | Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube |
| CN104121872B (zh) | 2013-04-26 | 2018-04-13 | 通用电气公司 | 表面粗糙度测量装置 |
| EP2977715B1 (en) | 2014-07-23 | 2017-12-06 | Tesa Sa | Probe holder for measuring system |
| KR102499831B1 (ko) * | 2016-05-23 | 2023-02-14 | 코닝 인코포레이티드 | 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법 |
| CN114434442B (zh) * | 2022-01-21 | 2024-06-25 | 新拓三维技术(深圳)有限公司 | 一种基于协作机器人的自动化检测方法及系统 |
| CN115265359B (zh) * | 2022-06-23 | 2024-07-30 | 宿州捷创模具有限公司 | 汽车钣金验收检具 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02151277A (ja) * | 1988-09-30 | 1990-06-11 | Rockwell Internatl Corp | ピエゾ電気駆動装置及び方法 |
| JPH07167620A (ja) * | 1993-12-13 | 1995-07-04 | Nikon Corp | レーザ測定方法および測定針 |
| JP2000321034A (ja) * | 1999-05-14 | 2000-11-24 | Olympus Optical Co Ltd | 光イメージング装置 |
| JP2001083077A (ja) * | 1999-09-09 | 2001-03-30 | Olympus Optical Co Ltd | 光イメージング装置 |
| JP2001510357A (ja) * | 1996-10-01 | 2001-07-31 | ライカ マイクロシステムス ハイデルベルク ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共焦点表面測定のための装置 |
| JP2001211676A (ja) * | 1999-12-21 | 2001-08-03 | Koninkl Philips Electronics Nv | 球体及び圧電駆動部を具えるアクチュエータ |
| JP2002513919A (ja) * | 1998-05-04 | 2002-05-14 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 干渉計形測定装置 |
| JP2005518535A (ja) * | 2002-02-21 | 2005-06-23 | クニュッテル,アレクサンダー | 物体の光光学走査のための低コヒーレンス干渉装置 |
| WO2005088241A1 (de) * | 2004-03-13 | 2005-09-22 | Knuettel Alexander | Niederkohärenz-interferometrisches verfahren und gerät zur lichtoptischen abtastung von oberflächen |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4585379A (en) * | 1980-12-27 | 1986-04-29 | Hitachi, Ltd. | Precision positioning device |
| DE60033272T2 (de) * | 1999-03-03 | 2007-11-29 | Riken, Wako | Sondenartiger formmessaufnehmer sowie nc-bearbeitungsvorrichtung und formmessverfahren unter verwendung des messaufnehmers |
| US6687010B1 (en) * | 1999-09-09 | 2004-02-03 | Olympus Corporation | Rapid depth scanning optical imaging device |
| DE10210750B4 (de) * | 2002-03-12 | 2004-02-12 | Precise Präzisionsspindeln GmbH | Schnellfrequenzspindel |
| JP3908226B2 (ja) * | 2004-02-04 | 2007-04-25 | 日本電産株式会社 | スキャニング型レンジセンサ |
-
2005
- 2005-12-23 DE DE102005062130A patent/DE102005062130A1/de not_active Withdrawn
-
2006
- 2006-12-02 JP JP2008546175A patent/JP2009520955A/ja active Pending
- 2006-12-02 US US12/086,527 patent/US20100220369A1/en not_active Abandoned
- 2006-12-02 CA CA002634290A patent/CA2634290A1/en not_active Abandoned
- 2006-12-02 EP EP06829248A patent/EP1963781B1/de not_active Not-in-force
- 2006-12-02 WO PCT/EP2006/011586 patent/WO2007079837A1/de not_active Ceased
- 2006-12-02 AU AU2006334831A patent/AU2006334831A1/en not_active Abandoned
- 2006-12-02 DE DE502006007290T patent/DE502006007290D1/de active Active
- 2006-12-02 AT AT06829248T patent/ATE472089T1/de active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02151277A (ja) * | 1988-09-30 | 1990-06-11 | Rockwell Internatl Corp | ピエゾ電気駆動装置及び方法 |
| JPH07167620A (ja) * | 1993-12-13 | 1995-07-04 | Nikon Corp | レーザ測定方法および測定針 |
| JP2001510357A (ja) * | 1996-10-01 | 2001-07-31 | ライカ マイクロシステムス ハイデルベルク ゲゼルシャフト ミット ベシュレンクテル ハフツング | 共焦点表面測定のための装置 |
| JP2002513919A (ja) * | 1998-05-04 | 2002-05-14 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 干渉計形測定装置 |
| JP2000321034A (ja) * | 1999-05-14 | 2000-11-24 | Olympus Optical Co Ltd | 光イメージング装置 |
| JP2001083077A (ja) * | 1999-09-09 | 2001-03-30 | Olympus Optical Co Ltd | 光イメージング装置 |
| JP2001211676A (ja) * | 1999-12-21 | 2001-08-03 | Koninkl Philips Electronics Nv | 球体及び圧電駆動部を具えるアクチュエータ |
| JP2005518535A (ja) * | 2002-02-21 | 2005-06-23 | クニュッテル,アレクサンダー | 物体の光光学走査のための低コヒーレンス干渉装置 |
| WO2005088241A1 (de) * | 2004-03-13 | 2005-09-22 | Knuettel Alexander | Niederkohärenz-interferometrisches verfahren und gerät zur lichtoptischen abtastung von oberflächen |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180093891A (ko) * | 2015-10-14 | 2018-08-22 | 슈투름 머쉬넨- & 안라겐바우 게엠베하 | 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법 |
| JP2018535407A (ja) * | 2015-10-14 | 2018-11-29 | シュトゥルム マシーネン ウント アラゲンバウ ゲゼルシャフト ミット ベシュレンクテル ハフツングSturm Maschinen− & Anlagenbau GmbH | 円筒状中空エンクロージャの表面を検査するセンサデバイスおよび方法 |
| KR102087758B1 (ko) * | 2015-10-14 | 2020-03-11 | 슈투름 머쉬넨- & 안라겐바우 게엠베하 | 원통형 공동의 표면을 검사하기 위한 센서 장치 및 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1963781B1 (de) | 2010-06-23 |
| US20100220369A1 (en) | 2010-09-02 |
| DE502006007290D1 (de) | 2010-08-05 |
| EP1963781A1 (de) | 2008-09-03 |
| CA2634290A1 (en) | 2007-07-19 |
| ATE472089T1 (de) | 2010-07-15 |
| AU2006334831A1 (en) | 2007-07-19 |
| WO2007079837A1 (de) | 2007-07-19 |
| DE102005062130A1 (de) | 2007-06-28 |
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Legal Events
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