ATE472089T1 - Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine - Google Patents

Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine

Info

Publication number
ATE472089T1
ATE472089T1 AT06829248T AT06829248T ATE472089T1 AT E472089 T1 ATE472089 T1 AT E472089T1 AT 06829248 T AT06829248 T AT 06829248T AT 06829248 T AT06829248 T AT 06829248T AT E472089 T1 ATE472089 T1 AT E472089T1
Authority
AT
Austria
Prior art keywords
light
scanning
transport module
measuring machine
object surface
Prior art date
Application number
AT06829248T
Other languages
German (de)
English (en)
Inventor
Alexander Knuettel
Original Assignee
Isis Sentronics Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Isis Sentronics Gmbh filed Critical Isis Sentronics Gmbh
Application granted granted Critical
Publication of ATE472089T1 publication Critical patent/ATE472089T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laminated Bodies (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT06829248T 2005-12-23 2006-12-02 Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine ATE472089T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005062130A DE102005062130A1 (de) 2005-12-23 2005-12-23 Abtastsystem zum Abtasten einer Objektoberfläche, insbesondere für eine Koordinaten-Meßmaschine
PCT/EP2006/011586 WO2007079837A1 (de) 2005-12-23 2006-12-02 Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine

Publications (1)

Publication Number Publication Date
ATE472089T1 true ATE472089T1 (de) 2010-07-15

Family

ID=37697847

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06829248T ATE472089T1 (de) 2005-12-23 2006-12-02 Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine

Country Status (8)

Country Link
US (1) US20100220369A1 (enExample)
EP (1) EP1963781B1 (enExample)
JP (1) JP2009520955A (enExample)
AT (1) ATE472089T1 (enExample)
AU (1) AU2006334831A1 (enExample)
CA (1) CA2634290A1 (enExample)
DE (2) DE102005062130A1 (enExample)
WO (1) WO2007079837A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502007001288D1 (de) 2007-01-02 2009-09-24 Isis Sentronics Gmbh Positionserkennungssystem zur berührungslosen interferometrischen Detektion der Ortsposition eines Zielobjektes und damit ausgestattetes Abtastsystem
DE102007008361B3 (de) 2007-02-16 2008-04-03 Isis Sentronics Gmbh Abtastsensorsystem zum berührungslosen optischen Abtasten von Objektoberflächen
FR2979143B1 (fr) 2011-08-16 2016-03-25 Univ Joseph Fourier Dispositif optique d'analyse interferometrique de l'etat de surface interne d'un tube
CN104121872B (zh) 2013-04-26 2018-04-13 通用电气公司 表面粗糙度测量装置
EP2977715B1 (en) 2014-07-23 2017-12-06 Tesa Sa Probe holder for measuring system
ES2747305T3 (es) * 2015-10-14 2020-03-10 Sturm Maschinen & Anlagenbau Gmbh Dispositivo sensor y procedimiento para la inspección de la superficie de un receptáculo hueco cilíndrico
KR102499831B1 (ko) * 2016-05-23 2023-02-14 코닝 인코포레이티드 글라스 시트의 무중력 형상 예측 방법 및 무중력 형상 기반 글라스 시트 품질 관리 방법
CN114434442B (zh) * 2022-01-21 2024-06-25 新拓三维技术(深圳)有限公司 一种基于协作机器人的自动化检测方法及系统
CN115265359B (zh) * 2022-06-23 2024-07-30 宿州捷创模具有限公司 汽车钣金验收检具

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585379A (en) * 1980-12-27 1986-04-29 Hitachi, Ltd. Precision positioning device
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
JPH07167620A (ja) * 1993-12-13 1995-07-04 Nikon Corp レーザ測定方法および測定針
DE19640495C2 (de) * 1996-10-01 1999-12-16 Leica Microsystems Vorrichtung zur konfokalen Oberflächenvermessung
DE19819762A1 (de) * 1998-05-04 1999-11-25 Bosch Gmbh Robert Interferometrische Meßeinrichtung
DE60033272T2 (de) * 1999-03-03 2007-11-29 Riken, Wako Sondenartiger formmessaufnehmer sowie nc-bearbeitungsvorrichtung und formmessverfahren unter verwendung des messaufnehmers
JP4262355B2 (ja) * 1999-05-14 2009-05-13 オリンパス株式会社 光イメージング装置
US6687010B1 (en) * 1999-09-09 2004-02-03 Olympus Corporation Rapid depth scanning optical imaging device
JP2001083077A (ja) * 1999-09-09 2001-03-30 Olympus Optical Co Ltd 光イメージング装置
DE19961684A1 (de) * 1999-12-21 2001-06-28 Philips Corp Intellectual Pty Aktuator mit einer Kugel und piezo-elektrischen Antrieben
DE10207186C1 (de) * 2002-02-21 2003-04-17 Alexander Knuettel Niederkohärenz-interferometrisches Gerät zur lichtoptischen Abtastung eines Objektes
DE10210750B4 (de) * 2002-03-12 2004-02-12 Precise Präzisionsspindeln GmbH Schnellfrequenzspindel
JP3908226B2 (ja) * 2004-02-04 2007-04-25 日本電産株式会社 スキャニング型レンジセンサ
DE102004012426A1 (de) * 2004-03-13 2005-09-29 Knüttel, Alexander, Dr. Niederkohärenz-interferometrisches Verfahren und Gerät zur lichtoptischen Abtastung von Oberflächen

Also Published As

Publication number Publication date
EP1963781B1 (de) 2010-06-23
US20100220369A1 (en) 2010-09-02
DE502006007290D1 (de) 2010-08-05
EP1963781A1 (de) 2008-09-03
CA2634290A1 (en) 2007-07-19
JP2009520955A (ja) 2009-05-28
AU2006334831A1 (en) 2007-07-19
WO2007079837A1 (de) 2007-07-19
DE102005062130A1 (de) 2007-06-28

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