MY156792A - A light detection arrangement and a method for detecting light in a light detection arrangement - Google Patents

A light detection arrangement and a method for detecting light in a light detection arrangement

Info

Publication number
MY156792A
MY156792A MYPI2011003614A MYPI2011003614A MY156792A MY 156792 A MY156792 A MY 156792A MY PI2011003614 A MYPI2011003614 A MY PI2011003614A MY PI2011003614 A MYPI2011003614 A MY PI2011003614A MY 156792 A MY156792 A MY 156792A
Authority
MY
Malaysia
Prior art keywords
light
detection arrangement
camera
optical axis
receiving region
Prior art date
Application number
MYPI2011003614A
Inventor
Liu Tong
Lam Chew Junn
Fang Zhong Ping
Xu Jian
Cheow Yoon Foo
Original Assignee
Agency Science Tech & Res
Component Technology Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res, Component Technology Pte Ltd filed Critical Agency Science Tech & Res
Publication of MY156792A publication Critical patent/MY156792A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/141—Beam splitting or combining systems operating by reflection only using dichroic mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements

Abstract

IN AN EMBODIMENT, A LIGHT DETECTION ARRANGEMENT MAY BE PROVIDED. THE LIGHT DETECTION ARRANGEMENT MAY INCLUDE A BODY STRUCTURE CONFIGURED TO PROVIDE LIGHT, THE BODY STRUCTURE INCLUDING A FIRST LIGHT-TRANS MISSIVE PORTION AND A SECOND LIGHT- TRANS MISSIVE PORTION DISPOSED AT A DISTANCE FROM THE FIRST LIGHT-TRANS MISSIVE PORTION; AN OBJECT RECEIVING REGION ARRANGED SUCH THAT LIGHT PROVIDED BY THE BODY STRUCTURE MAY BE ILLUMINATING AT LEAST A PORTION OF THE OBJECT RECEIVING REGION; A FIRST CAMERA HAVING A FIRST MAIN OPTICAL AXIS; A SECOND CAMERA HAVING A SECOND MAIN OPTICAL AXIS; WHEREIN THE BODY STRUCTURE MAY BE ARRANGED BETWEEN THE FIRST CAMERA AND THE SECOND CAMERA ON ITS ONE SIDE AND THE OBJECT RECEIVING REGION ON ITS OTHER SIDE; WHEREIN THE FIRST CAMERA MAY BE ARRANGED SUCH THAT ITS FIRST MAIN OPTICAL AXIS MAY BE DIRECTED TO THE OBJECT RECEIVING REGION VIA THE FIRST LIGHT-TRANS MISSIVE PORTION; WHEREIN THE SECOND CAMERA MAY BE ARRANGED SUCH THAT ITS SECOND MAIN OPTICAL AXIS MAY BE DIRECTED TO THE OBJECT RECEIVING REGION VIA THE SECOND LIGHT-TRANS MISSIVE PORTION; AN ARRANGEMENT CONFIGURED TO PROVIDE LIGHT REFLECTED FROM THE OBJECT RECEIVING REGION SUCH THAT A FIRST REFLECTED LIGHT PORTION MAY BE PROVIDED AS A FIRST CO-AXIAL LIGHT PORTION ALIGNED TO THE FIRST MAIN OPTICAL AXIS, AND SUCH THAT A SECOND REFLECTED LIGHT PORTION MAY BE PROVIDED AS A SECOND CO-AXIAL LIGHT PORTION ALIGNED TO THE SECOND MAIN OPTICAL AXIS. A METHOD FOR DETECTING LIGHT IN A LIGHT DETECTION ARRANGEMENT MAY ALSO BE PROVIDED.
MYPI2011003614A 2009-02-06 2010-02-08 A light detection arrangement and a method for detecting light in a light detection arrangement MY156792A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15063409P 2009-02-06 2009-02-06

Publications (1)

Publication Number Publication Date
MY156792A true MY156792A (en) 2016-03-31

Family

ID=42542307

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2011003614A MY156792A (en) 2009-02-06 2010-02-08 A light detection arrangement and a method for detecting light in a light detection arrangement

Country Status (4)

Country Link
CN (1) CN102356457B (en)
MY (1) MY156792A (en)
SG (1) SG173070A1 (en)
WO (1) WO2010090604A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI125320B (en) 2012-01-05 2015-08-31 Helmee Imaging Oy EVENTS AND SIMILAR OPTICAL MEASUREMENT PROCEDURES
US8879073B2 (en) * 2012-02-24 2014-11-04 Kla-Tencor Corporation Optical metrology using targets with field enhancement elements
CN109891215A (en) * 2016-10-07 2019-06-14 哈钦森技术股份有限公司 For checking the coaxial of system and diffusion illumination
CN106814073A (en) * 2017-03-17 2017-06-09 苏州富鑫林光电科技有限公司 AOI vision-based detections coaxial light source matches somebody with somebody surrounding bar light and high angle testing agency
CN110836644A (en) * 2018-08-17 2020-02-25 聚晶半导体股份有限公司 Three-dimensional sensing device and three-dimensional sensing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243406A (en) * 1990-07-04 1993-09-07 Fujitsu Limited Method and apparatus for measuring three-dimensional configuration of wire-shaped object in a short time
US5424838A (en) * 1993-03-01 1995-06-13 Siu; Bernard Microelectronics inspection system
US6445518B1 (en) * 2000-11-28 2002-09-03 Semiconductor Technologies & Instruments, Inc. Three dimensional lead inspection system
JP2002310930A (en) * 2001-04-13 2002-10-23 Nec Corp Bonding wire inspecting device

Also Published As

Publication number Publication date
CN102356457B (en) 2014-05-07
WO2010090604A1 (en) 2010-08-12
CN102356457A (en) 2012-02-15
SG173070A1 (en) 2011-08-29

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