JP2009512566A5 - - Google Patents
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- Publication number
- JP2009512566A5 JP2009512566A5 JP2008536710A JP2008536710A JP2009512566A5 JP 2009512566 A5 JP2009512566 A5 JP 2009512566A5 JP 2008536710 A JP2008536710 A JP 2008536710A JP 2008536710 A JP2008536710 A JP 2008536710A JP 2009512566 A5 JP2009512566 A5 JP 2009512566A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- phase
- superabrasive material
- workpiece
- abrasive article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 8
- 239000002131 composite material Substances 0.000 claims 7
- 239000011347 resin Substances 0.000 claims 7
- 229920005989 resin Polymers 0.000 claims 7
- 238000000034 method Methods 0.000 claims 4
- 238000005498 polishing Methods 0.000 claims 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- WKBPZYKAUNRMKP-UHFFFAOYSA-N 1-[2-(2,4-dichlorophenyl)pentyl]1,2,4-triazole Chemical compound C=1C=C(Cl)C=C(Cl)C=1C(CCC)CN1C=NC=N1 WKBPZYKAUNRMKP-UHFFFAOYSA-N 0.000 claims 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910000831 Steel Inorganic materials 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M acrylate group Chemical group C(C=C)(=O)[O-] NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052787 antimony Inorganic materials 0.000 claims 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims 1
- 229910052797 bismuth Inorganic materials 0.000 claims 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 1
- 229910052793 cadmium Inorganic materials 0.000 claims 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000003822 epoxy resin Substances 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 239000011133 lead Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 229920006254 polymer film Polymers 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000011135 tin Substances 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 239000011031 topaz Substances 0.000 claims 1
- 229910052853 topaz Inorganic materials 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/254,614 | 2005-10-20 | ||
| US11/254,614 US7594845B2 (en) | 2005-10-20 | 2005-10-20 | Abrasive article and method of modifying the surface of a workpiece |
| PCT/US2006/040317 WO2007047558A1 (en) | 2005-10-20 | 2006-10-16 | Abrasive article and method of modifying the surface of a workpiece |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009512566A JP2009512566A (ja) | 2009-03-26 |
| JP2009512566A5 true JP2009512566A5 (https=) | 2009-11-26 |
| JP5379481B2 JP5379481B2 (ja) | 2013-12-25 |
Family
ID=37962831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008536710A Expired - Fee Related JP5379481B2 (ja) | 2005-10-20 | 2006-10-16 | 研磨材物品及び加工物の表面の修正方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7594845B2 (https=) |
| EP (1) | EP1954446A4 (https=) |
| JP (1) | JP5379481B2 (https=) |
| KR (1) | KR101300874B1 (https=) |
| CN (1) | CN101291780A (https=) |
| TW (1) | TW200730304A (https=) |
| WO (1) | WO2007047558A1 (https=) |
Families Citing this family (77)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
| US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
| US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
| US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
| US8398466B2 (en) * | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
| US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
| US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US8622787B2 (en) * | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| KR101281342B1 (ko) * | 2005-11-22 | 2013-07-02 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 발광용품 어레이 및 이의 제조 방법 |
| US20080153398A1 (en) * | 2006-11-16 | 2008-06-26 | Chien-Min Sung | Cmp pad conditioners and associated methods |
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| US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| CA2688335C (en) | 2007-05-29 | 2015-07-21 | Innova Materials, Llc | Surfaces having particles and related methods |
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| TWI388402B (en) * | 2007-12-06 | 2013-03-11 | Methods for orienting superabrasive particles on a surface and associated tools | |
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| DE102008021636B3 (de) * | 2008-04-30 | 2009-11-19 | Esk Ceramics Gmbh & Co. Kg | Verfahren zum Fixieren eines Verbindungselements auf einem Werkstück und Bauteil aus einem Werkstück mit einem darauf fixierten Verbindungselement |
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| US8226737B2 (en) * | 2008-07-03 | 2012-07-24 | 3M Innovative Properties Company | Fixed abrasive particles and articles made therefrom |
| KR20100013716A (ko) * | 2008-07-31 | 2010-02-10 | 삼성전자주식회사 | 잉크젯 프린트헤드의 제조방법 |
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| EP2675591B1 (en) * | 2011-02-16 | 2022-08-17 | 3M Innovative Properties Company | Coated abrasive article having rotationally aligned formed ceramic abrasive particles and method of manufacturing the same |
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| KR102232039B1 (ko) | 2012-07-23 | 2021-03-26 | 제이에이치 로드스 컴퍼니, 인크 | 비평면 유리 연마 패드 및 상기 연마 패드 제작 방법 |
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| BR112016010724B1 (pt) | 2013-11-12 | 2021-11-16 | 3M Innovative Properties Company | Artigo abrasivo estruturado |
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| CN106376234B (zh) | 2014-05-02 | 2019-11-05 | 3M创新有限公司 | 间断的结构化磨料制品以及抛光工件的方法 |
| US9873180B2 (en) | 2014-10-17 | 2018-01-23 | Applied Materials, Inc. | CMP pad construction with composite material properties using additive manufacturing processes |
| US10875153B2 (en) | 2014-10-17 | 2020-12-29 | Applied Materials, Inc. | Advanced polishing pad materials and formulations |
| KR20240015167A (ko) | 2014-10-17 | 2024-02-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 애디티브 제조 프로세스들을 이용한 복합 재료 특성들을 갖는 ｃｍｐ 패드 구성 |
| US11745302B2 (en) | 2014-10-17 | 2023-09-05 | Applied Materials, Inc. | Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process |
| US10687613B2 (en) | 2015-05-07 | 2020-06-23 | Craig R. Smith | Rotary cleaning tool for commode surfaces |
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| TWI754275B (zh) * | 2015-10-16 | 2022-02-01 | 美商應用材料股份有限公司 | 拋光墊及形成其之方法 |
| US10391605B2 (en) | 2016-01-19 | 2019-08-27 | Applied Materials, Inc. | Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process |
| US20180009032A1 (en) * | 2016-07-08 | 2018-01-11 | General Electric Company | Metal objects and methods for making metal objects using disposable molds |
| US10195713B2 (en) | 2016-08-11 | 2019-02-05 | 3M Innovative Properties Company | Lapping pads and systems and methods of making and using the same |
| EP3558587A4 (en) * | 2016-12-22 | 2020-12-09 | 3M Innovative Properties Company | ABRASIVE ARTICLE AND ITS MANUFACTURING PROCESS |
| JP6589039B1 (ja) * | 2018-12-21 | 2019-10-09 | 株式会社ノリタケカンパニーリミテド | センタレス加工用研磨ベルト、センタレス加工用砥石車、およびセンタレス加工用研磨ベルトの製造方法 |
| CN110641052B (zh) * | 2019-10-30 | 2021-05-14 | 仁新实业发展（信阳）有限公司 | 一种人造石英石板修复装置 |
| CN116936344B (zh) * | 2023-07-24 | 2025-08-26 | 江苏邑文微电子科技有限公司 | 一种半导体材料的减薄抛光方法及减薄抛光装置 |
| CN117506750B (zh) * | 2023-10-11 | 2026-04-17 | 广东纳德新材料有限公司 | 一种针对陶瓷大板中磨工序的树脂磨块及制备方法 |
| CN118404493A (zh) * | 2024-04-12 | 2024-07-30 | 北京利研科技有限公司 | 一种用于碳化硅衬底抛光的钻石垫及其制备方法 |
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| KR101281342B1 (ko) | 2005-11-22 | 2013-07-02 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 발광용품 어레이 및 이의 제조 방법 |
-
2005
- 2005-10-20 US US11/254,614 patent/US7594845B2/en not_active Expired - Fee Related
-
2006
- 2006-10-16 JP JP2008536710A patent/JP5379481B2/ja not_active Expired - Fee Related
- 2006-10-16 KR KR1020087009275A patent/KR101300874B1/ko not_active Expired - Fee Related
- 2006-10-16 WO PCT/US2006/040317 patent/WO2007047558A1/en not_active Ceased
- 2006-10-16 CN CNA2006800392406A patent/CN101291780A/zh active Pending
- 2006-10-16 EP EP06826005A patent/EP1954446A4/en not_active Withdrawn
- 2006-10-19 TW TW095138664A patent/TW200730304A/zh unknown
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